ClassID:

207422

H01L21/67796 - CPC Classification

Classification description:

Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof; Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations with angular orientation of workpieces

Recent Application in this class:
#1
20250336706
2025-10-30

DEVICE AND METHOD WITH ARTIFICIAL INTELLIGENCE-BASED WAFER ROTATION

#2
20240186165
2024-06-06

WAFER PICKING AND PLACING APPARATUS

#3
20240096676
2024-03-21

Automatic Alignment Of Overhead Transport Vehicles To Load Ports Of Semiconductor Fabrication Tools

#4
20230420280
2023-12-28

SUBSTRATE TREATING APPARATUS

#5
20230374663
2023-11-23

APPARATUS AND METHOD FOR PROCESSING SUBSTRATE

#6
20230197475
2023-06-22

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND STORAGE MEDIUM

#7
20230063281
2023-03-02

Rotational indexer with additional rotational axes

#8
20220336245
2022-10-20

Transport system

#9
20220102185
2022-03-31

Semiconductor manufacturing apparatus including bonding head

#10
20210118715
2021-04-22

Rotational indexer with additional rotational axes

#11
20210090925
2021-03-25

Device for self-assembling semiconductor light-emitting diodes

#12
20200251364
2020-08-06

SOT Deform Lead-retract Removal Track

#13
20200020558
2020-01-16

Wafer handling equipment and method thereof

#14
20190393066
2019-12-26

Micro device transferring method and micro device transferring apparatus

#15
20190378741
2019-12-12

Chip bonding device

#16
20190311921
2019-10-10

A PROCESSING APPARATUS AND A METHOD FOR CORRECTING A PARAMETER VARIATION ACROSS A SUBSTRATE

#17
20190096729
2019-03-28

SUBSTRATE INVERTING DEVICE, SUBSTRATE PROCESSING APPARATUS, AND SUBSTRATE CATCH-AND-HOLD DEVICE

#18
20190067075
2019-02-28

Substrate gripping hand and substrate transfer apparatus

#19
20180144966
2018-05-24

Exchange and flip chamber design for heterojunction solar cell formation

#20
20180090359
2018-03-29

Substrate arrangement apparatus and substrate arrangement method

#21
20180033666
2018-02-01

Teaching jig, substrate processing apparatus, and teaching method

#22
20170186640
2017-06-29

Positioning device for glass substrate

#23
20160369938
2016-12-22

Table device and conveyance device

#24
20160329228
2016-11-10

CASSETTE POSITIONING DEVICE AND SEMICONDUCTOR PROCESSING APPARATUS

#25
20140320840
2014-10-30

Exposure apparatus and exposure method

#26
20140311532
2014-10-23

Substrate processing apparatus and processed substrate manufacturing method

#27
20140259633
2014-09-18

Apparatus for assembly of microelectronic devices

#28
20120000426
2012-01-05

INTEGRATED GEARBOX AND ROTARY FEEDTHROUGH SYSTEM FOR A VACUUM CHAMBER STRUCTURE

#29
15867599
2018-10-23

Rotational indexer with additional rotational axes