207457 ⎘
Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof; Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof; Manufacture of specific parts of devices defined in group; Making of isolation regions between components between components manufactured in an active substrate comprising AB compounds
Monolithic integration of enhancement mode and depletion mode field effect transistors
#2Monolithic integration of enhancement mode and depletion mode field effect transistors
#3Semiconductor integrated circuit device and method of fabricating the same
#4METHOD FOR FORMING TRENCH ISOLATION USING GAS CLUSTER ION BEAM PROCESSING