Thin film semiconductor device, polycrystalline semiconductor thin film production process and production apparatus

SEMICONDUCTOR DEVICE, ANNEALING METHOD, ANNEALING APPARATUS AND DISPLAY APPARATUS

Laser irradiation apparatus and manufacturing method of semiconductor device

Semiconductor device and manufacturing method thereof

System and method for compensating for thermal expansion of lithography apparatus or substrate

Manufacturing method of a display device

Semiconductor device and semiconductor device production system

Polysilicon thin film fabrication method

Semiconductor apparatus having semiconductor circuits made of semiconductor devices, and method of manufacture thereof

Method of semiconductor thin film crystallization and semiconductor device fabrication

Light-emitting device

Mask for sequential lateral solidification (SLS) process and a method thereof

Method for manufacturing a thin-film transistor

Laser irradiation method, laser irradiation apparatus, and semiconductor device

Semiconductor device and method for manufacturing the same

Semiconductor device and method of fabricating same

Semiconductor device and semiconductor display device

Thin film transistor having an island like semiconductor layer on an insulator

Sequential lateral solidification mask

Array substrate, method of manufacturing the same and method of crystallizing silicon

Display device

Thin film transistor, circuit apparatus and liquid crystal display

Enhancing the width of polycrystalline grains with mask

Processes and systems for laser crystallization processing of film regions on a substrate utilizing a line-type beam, and structures of such film regions

Method and system for facilitating bi-directional growth

Method and system for producing crystalline thin films with a uniform crystalline orientation

Methods of fabricating crystalline silicon film and thin film transistors

Laser irradiation apparatus

Liquid crystal display device including thin film transistors having different paracitic capacitance

Semiconductor device, liquid crystal display panel, electronic device, and method of manufacturing semiconductor device

Thin film transistor having a channel region that includes a plurality of connecting channel regions

Display device

Liquid crystal display

Thin-film transistor circuit and a semiconductor display using the same

Sequential lateral solidification mask

Integrated circuit device and method for manufacturing integrated circuit device

Phase shifter for laser annealing

Semiconductor thin film manufacturing method, electronic device, and liquid crystal display device

Polycrystalline silicon film containing Ni

Image display device and method for manufacturing the same

Metal-induced crystallization of amorphous silicon, polycrystalline silicon thin films produced thereby and thin film transistors produced therefrom

Semiconductor device having semiconductor circuit formed by semiconductor elements and method for manufacturing the same

Semiconductor thin film, semiconductor device and manufacturing method thereof

Line scan sequential lateral solidification of thin films

Semiconductor device and method of fabricating thereof

Thin-film transistor

LTPS display panel and manufacturing process thereof

Method for fabricating organic electroluminescent devices

Apparatus and method for laser radiation

Liquid crystal display device and display device

Laser irradiation method and laser irradiation device and method of manufacturing semiconductor device

Laser irradiation method and method of manufacturing semiconductor device

Laser annealing method and laser annealing device

Liquid crystal display device and method for fabrication thereof

Thin film transistor, thin film transistor panel, and method of manufacturing the same

Semiconductor device forming method

Drive circuit of active matrix device and manufacturing method thereof

Method of fabricating polycrystalline silicon thin film for improving crystallization characteristics and method of fabricating liquid crystal display device using the same

Providing driving current arrangement for OLED device

Method for producing a semiconductor device including crystallizing an amphorous semiconductor film

Thin film transistor and method of fabricating the same

Method of forming copper wiring layer

Crystallized film and process for production thereof

Semiconductor device

Method of fabricating a polycrystalline silicon thin film transistor

Semiconductor structure having multilayer of polysilicon and display panel applied with the same

Thin film transistor array panel

Driving transistor and organic light emitting diode display having the same

Method of forming channel region of TFT composed of single crystal Si

Thin film transistor (TFT) array panel with TFTs having varying leakage currents

Method of annealing polycrystalline silicon using solid-state laser and devices built thereon

Heating treatment device, heating treatment method and fabrication method of semiconductor device

Electro-optical device and semiconductor circuit

Method of manufacturing an active matrix substrate and an image display device using the same

Thin film transistor array panel

Method for manufacturing a semiconductor device

Method for selective laser crystallization and display panel fabricated by using the same

Method of polycrystallization, method of manufacturing polysilicon thin film transistor, and laser irradiation device therefor

Method of fabricating polycrystalline silicon

Thin film transistor and method of fabricating the same

Semiconductor device including a TFT having large-grain polycrystalline active layer, LCD employing the same and method of fabricating them

Method of fabricating a thin film transistor using dual or multiple gates

Thin film transistor manufacturing method and organic electroluminescent display device

Organic electroluminescence display

Thin film transistor array panel

Systems and methods for creating crystallographic-orientation controlled poly-silicon films

Method for fabricating a semiconductor device

Method for crystallizing silicon using a ramp shaped laser beam

Thin film pattern substrate, method for manufacturing device, electro-optic device, and electronic apparatus

Display device and method for manufacturing the same

Providing driving current arrangement for OLED device

Laser crystallization and selective patterning using multiple beamlets

Method for forming polycrystalline silicon thin film transistor

Method for manufacturing a semiconductor device

Method of fabricating thin film transistor

Light irradiation apparatus, crystallization apparatus, crystallization method, semiconductor device and light modulation element

Image display having a capacitance varying unit and method of driving same

SEMICONDUCTOR DEVICE AND METHOD OF FABRICATING A LOW TEMPERATURE POLY-SILICON LAYER

Single-shot semiconductor processing system and method having various irradiation patterns

Fabrication method of thin film transistor

Thin film transistor, method of manufacturing thin film transistor, and display device

Process and system for laser crystallization processing of film regions on a substrate to minimize edge areas, and a structure of such film regions

Active matrix display device with active element including a semiconductor film formed of an aggregate of single crystals each extending in the same direction

Crystalline semiconductor film, method of manufacturing the same, and semiconductor device

Method of fabricating a poly-crystalline silicon thin film and method of fabricating a semiconductor device using the same

Method for manufacturing polysilicon layer and method for manufacturing thin film transistor thereby

STRUCTURE OF LTPS-TFT AND METHOD OF FABRICATING CHANNEL LAYER THEREOF

Thin film transistor with low angle grain boundaries in a channel layer

Method of manufacturing semiconductor device having a circuit including thin film transistors

Method of manufacturing display device

Systems and methods for implementing an interaction between a laser shaped as a line beam and a film deposited on a substrate

Laser anneal method of a semiconductor layer

Light emitting display and fabrication method thereof

Polycrystalline silicon thin film, fabrication method thereof, and thin film transistor without directional dependency on active channels fabricated using the same

Thin film transistor with improved junction region

Pixel circuit and display device having improved transistor structure

Crystallizing method, thin-film transistor manufacturing method, thin-film transistor, and display device

Laser irradiation method, laser irradiation apparatus, and semiconductor device

Thin film semiconductor device

Methods for producing uniform large-grained and grain boundary location manipulated polycrystalline thin film semiconductors using sequential lateral solidification

AMOLED circuit layout

Method for manufacturing a display device including irradiating overlapping regions

Semiconductor device, method of making the same and liquid crystal display device

[STRUCTURE OF LTPS-TFT AND METHOD OF FABRICATING CHANNEL LAYER THEREOF]

Reactor having a movable shutter

Method for manufacturing a polycrystalline semiconductor film, apparatus thereof, and image display panel

Planar display structure and producing process of the same

Thin-film transistor formed on insulating substrate

Process and system for laser crystallization processing of film regions on a substrate to provide substantial uniformity, and a structure of such film regions

Thin film transistor, semiconductor device, and method for manufacturing the same

Light irradiation apparatus, light irradiation method, crystallization apparatus, crystallization method, device, and light modulation element

Method of forming single crystal silicon thin film using sequential lateral solidification (SLS)

Laser annealing apparatus and annealing method of semiconductor thin film using the same

Light emitting device

Semiconductor device

Thin film transistor, circuit device and liquid crystal display

Display device and method of manufacturing the same

Polysilicon thin film transistor array panel and manufacturing method thereof

Laser annealing method

Laser mask and method of crystallization using the same

Semiconductor device with modified mobility and thin film transistor having the same

Method of forming poly-silicon crystallization

Semiconductor device

Thin film semiconductor device, production process and information displays

Semiconductor device and method of manufacturing the same

Semiconductor device provided with semiconductor circuit made of semiconductor element and method of fabricating the same

Method for crystallizing amorphous silicon film

Semiconductor device having thin film transistor with position controlled channel formation region

Method of forming a polycrystalline silicon layer

Method of forming a polycrystalline silicon layer

Flat panel display with thin film transistor

Method of manufacturing a TFT with laser irradiation

Thin film semiconductor device and its substrate sheet as well as the method for production thereof

Fabrication method for polycrystalline silicon thin film and display device fabricated using the same

Method of controlling polysilicon crystallization

EL display device, driving method thereof, and electronic equipment provided with the EL display device

EL display device, driving method thereof, and electronic equipment provided with the EL display device

Display panel and method for manufacturing the same

Method of fabricating crystalline silicon and switching device using crystalline silicon

Luminance adjusting display apparatus

Transistor substrate, display device, and method of manufacturing transistor substrate and display device

Method of manufacturing semiconductor device

Semiconductor device and method of fabricating same

Thin film transistor array substrate and photolithography process and design of the mask thereof

Flat panel display device comprising polysilicon thin film transistor and method of manufacturing the same

Thin film transistor formed on a transparent substrate

Liquid crystal display device and method for manufacturing the same