208914 ⎘
Devices using superconductivity; Processes or apparatus peculiar to the manufacture or treatment thereof or of parts thereof; Processes or apparatus peculiar to the manufacture or treatment of devices provided for in or of parts thereof the superconducting material comprising copper oxide; Processes for depositing or forming superconductor layers by thermal spraying, e.g. plasma deposition
Deposition methodology for superconductor interconnects
#2Apparatus For Fabricating High Temperature Superconducting Film And High Temperature Superconducting Film Fabricated Through Auxiliary Cluster Beam Spraying
#3Method and apparatus for fabricating high temperature superconducting film through auxiliary cluster beam spraying, and high temperature superconducting film fabricated using the method