208965 ⎘
Piezo-electric devices in general; Electrostrictive devices in general; Magnetostrictive devices in general; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof; Piezo-electric or electrostrictive devices with electrical input and mechanical output, e.g. actuators, vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders Beam type
Sub-classes:PIEZOELECTRIC DEVICE
#2Vibrator and oscillator
#3Device and method for coating surfaces
#4Piezoelectric actuators with increased deformation
#5Coupled MEMS resonator
#6IN-PLANE VIBRATION STRUCTURE
#7Microelectromechanical system (MEMS) scanner having a torsional beam flexure with variable width
#8Piezoelectric transducer
#9Multi-layer microactuators for hard disk drive suspensions
#10Control method for piezoelectric driving device, piezoelectric driving device, and robot
#11Transducers with improved impedance matching
#12Coupled MEMS resonator
#13Portable electronic device using a tactile vibrator
#14Light scanning apparatus
#15Haptic structure for providing localized haptic output
#16Inductor/core assemblies for integrated circuits
#17Micro-electro-mechanical actuator device of piezoelectric type and apparatus integrating the micro-electro-mechanical actuator device
#18Piezoelectric vacuum transistor
#19Acoustic transducer and related fabrication and packaging techniques
#20Vibration device and method of manufacturing the same
#21Optical scanning device and method for producing optical scanning device
#22Multi-layer microactuators for hard disk drive suspensions
#23MONOLITHIC PZT ACTUATOR, STAGE, AND METHOD FOR MAKING
#24Apparatus for producing haptic feedback and electronic device
#25Piezoelectric mirror system
#26Optical scanning device and head-up display
#27Inertial measurement unit calibration stage, method, and applications
#28Device and method for coating surfaces
#29Bi-directional actuator
#30Actuator or sensor device based on an electroactive or photoactive polymer
#31Piezoelectric vacuum transistor
#32Transducers with improved impedance matching
#33VIBRATOR
#34Haptic structure for providing localized haptic output
#35Suspension having a stacked D33 mode PZT actuator with constraint layer
#36Device housing with vibrator component
#37Electric connection flexures
#38Capacitive RF MEMS intended for high-power applications
#39Multi-layer shear mode PZT microactuator for a disk drive suspension, and method of manufacturing same
#40Pop-Up Laminate Structure Including Miniature Optical Components
#41Piezoelectric vibrator element, and piezoelectric vibrator
#42Piezoelectric vibrator element, and piezoelectric vibrator
#43Mirror driving device and driving method thereof
#44Mirror driving device and driving method thereof
#45Piezoelectric element and piezoelectric actuator
#46Piezoelectric element, ultrasonic probe, ultrasonic measurement device, and manufacturing method of piezoelectric element
#47Piezoelectric element, ultrasonic probe, ultrasonic measurement device, and manufacturing method of piezoelectric element
#48Piezoelectric nanoelectromechanical relays
#49HIGH VOLTAGE MEMS, AND A PORTABLE ULTRASOUND DEVICE COMPRISING SUCH A MEMS
#50Piezoelectric element and piezoelectric actuator
#51Piezoelectric element and electronic component including the same
#52PIEZOELECTRIC SWITCH WITH LATERAL MOVING BEAMS
#53Vibrator equipped with piezoelectric element
#54Method and apparatus for dynamic-tuning
#55Vibration device
#56Thermal piezoelectric apparatus
#57Vibrating element, angular velocity sensor, electronic apparatus, and moving object
#58Monolithic PZT actuator, stage, and method for making
#59Bender bar transducer having stacked encapsulated actuators
#60Portable electronic device using a tactile vibrator
#61Vibrator equipped with piezoelectric element
#62Reducing ion migration in a hard disk drive microactuator flexure assembly
#63Vibrator
#64Piezoelectric vibration device for mobile terminal
#65Mirror drive device and driving method thereof
#66PIEZOELECTRIC ACTUATOR AND APPARATUS FOR GENERATING VIBRATIONS INCLUDING THE SAME
#67Piezoelectric element
#68ACTUATOR
#69Symmetric dual piezoelectric stack microelectromechanical piezoelectric devices
#70Vibration generating apparatus
#71Vibration generating apparatus
#72Piezoelectric actuator, liquid ejecting head, and method of manufacturing piezoelectric actuator
#73Vibrator and electronic device including the same
#74Vibration generating apparatus
#75Piezoelectric vibration module
#76Vibrator
#77Piezoelectric element, piezoelectric vibration module, and methods of manufacturing the same
#78PIEZOELECTRIC MOTOR, ROBOT HAND, ROBOT, FINGER ASSIST APPARATUS, ELECTRONIC COMPONENT CONVEYING APPARATUS, ELECTRONIC COMPONENT INSPECTING APPARATUS, LIQUID FEED PUMP, PRINTING APPARATUS, ELECTRONIC TIMEPIECE, AND PROJECTING APPARATUS
#79Piezoelectric device and process for producing piezoelectric device
#80Junctionless nano-electro-mechanical resonant transistor
#81Vibration module based on piezoelectric device
#82Actuator, optical reflecting element, and image forming device using optical reflecting element
#83Electroactive polymer structures printed with varying compositions of ions
#84Mirror drive device and driving method thereof
#85Electromechanical polymer-based linear resonant actuator
#86Electric device and method of manufacturing the same
#87Vibration generating apparatus
#88Vibration generating apparatus and electronic apparatus including the same
#89Piezoelectric element and electronic component including the same
#90Piezoelectric vibrating device
#91Piezoelectric vibrator
#92Piezo vibration module
#93Angular velocity sensor and detection element used therein
#94Apparatus integrating microelectromechanical system device with circuit chip and methods for fabricating the same
#95Method for manufacturing a micromechanical system comprising a removal of sacrificial material through a hole in a margin region
#96Apparatus for generating vibrations
#97Electronic device
#98Actuator using electro-active polymer and electronic device therewith
#99Actuator and method for driving the same
#100Piezoelectric active cooling device
#101PIEZOELECTRIC VIBRATION MODULE
#102Piezoelectric vibration module
#103Piezoelectric vibration module
#104Method of controlled pulse driving of a stacked PZT bender bar for dipole acoustic radiation
#105Piezoelectric actuator interface and method
#106Electric device and method of manufacturing the same
#107Haptic feedback device and portable electronic device
#108Piezoelectric actuator with coplanar electrodes
#109Flow Rate Accuracy of a Fluidic Delivery System
#110Piezoelectric actuator, variable capacitor, and optical deflection device
#111Haptic feedback apparatus
#112PIEZOELECTRIC VIBRATION MODULE AND TOUCH SCREEN USING THE SAME
#113Two-dimensional scanning and reflecting device
#114PIEZOELECTRIC VIBRATION DEVICE HAVING STRUCTURE INCLUDING SELF-AMPLIFICATION FUNCTION OF VIBRATION AND ELECTRIC/ELECTRONIC DEVICE USING SAME AS VIBRATING MEANS
#115Piezoelectric acceleration sensor
#116Foreign substance removal unit and optical apparatus including foreign substance removal unit
#117Architecture for piezoelectric MEMS devices
#118Methods of manufacture MEMS devices
#119HAPTIC DRIVING ASSEMBLY AND ELECTRONIC DEVICE USING THE SAME
#120HAPTIC DRIVING ASSEMBLY AND ELECTRONIC DEVICE USING THE SAME
#121High speed optical scanning mirror system using piezoelectric benders
#122Method for manufacturing piezoelectric element
#123Piezo based inertia actuator for high definition haptic feedback
#124TRANSDUCER HAVING AN IMPROVED ELECTRIC FIELD
#125CREATING AN IMPROVED PIEZOELECTRIC LAYER FOR TRANSDUCERS
#126Apparatus integrating microelectromechanical system device with circuit chip and methods for fabricating the same
#127Method of manufacturing electroactive polymer transducers for sensory feedback applications
#128Actuator module, haptic feedback device and electronic device
#129Electromechanical transducer device and method of forming a electromechanical transducer device
#130Electromechanical transducer device and method of forming a electromechanical transducer device
#131Electroactive polymer transducers for sensory feedback applications
#132Display apparatus with touch panel and piezoelectric actuator
#133Vibration actuator module having smaller elastic modulus than vibrated body
#134Micro Electromechanical Device With Stress and Stress Gradient Compensation
#135MEMS PIEZOELECTRIC ACTUATORS
#136MEMS devices and methods of manufacture thereof
#137Method for fabricating electroactive polymer transducer
#138Deflecting mirror for deflecting and scanning light beam
#139Method for manufacturing piezoelectric device
#140Process of manufacturing a piezoelectric actuator for tunable electronic components on a carrier substrate
#141Piezoelectric device, angular velocity sensor, electronic apparatus, and production method of a piezoelectric device
#142Large force and displacement piezoelectric MEMS lateral actuation
#143Electronic apparatus with a micro-electromechanical switch made of a piezoeletric material
#144MEMS devices and methods of manufacture thereof
#145Micromechanical actuators comprising semiconductors on a group III nitride basis
#146Flow rate accuracy of a fluidic delivery system
#147PIEZOELECTRIC ACTUATOR, ACOUSTIC COMPONENT, AND ELECTRONIC DEVICE
#148MEMS piezoelectric switch
#149Electroactive polymer transducers for sensory feedback applications
#150Variable focus device
#151Piezoelectric actuator and electronics device using the same
#152Piezoelectric-driven MEMS device and method for manufacturing the same
#153Substrate supporting vibration structure, input device having haptic function, and electronic device
#154Enhanced displacement piezoelectric motor
#155Piezoelectric bimorph beam manufacturing method
#156Thin film piezoelectric actuator
#157Piezoelectric ultrasonic motor for 2-dimensional positioning
#158Device with beam structure, and semiconductor device
#159Micro electromechanical device with stress and stress gradient compensation
#160Enhanced amplitude piezoelectric motor apparatus and method
#161Energy efficient vibration driven motor
#162Piezoelectric-driven MEMS device and method for manufacturing the same
#163Thin film piezoelectric actuator
#164Piezoelectric film device, and driving method of the same