Acoustic wave device, wafer, and method of manufacturing wafer

Sensor Having A Piezoelectric Element

Method for manufacturing a film on a flexible sheet

SEMICONDUCTOR SUBSTRATE WITH OXIDE SINGLE CRYSTAL HETEROSTRUCTURES, MANUFACTURING METHOD THEREOF AND ELECTRONIC DEVICE USING THE SAME

Liquid discharge head and method for manufacturing the same

Method for manufacturing a film on a support having a non-flat surface

Hybrid structure and a method for manufacturing the same

Piezoelectric Element for Untact Haptic and Method for Manufacturing the Same

PIEZOELECTRIC ELEMENT AND METHOD FOR PRODUCING THE SAME

DIFFUSION BONDING OF PIEZOELECTRIC CRYSTAL TO METAL WEAR PLATE

Manufacturing method of disk-drive suspension and manufacturing apparatus of disk-drive suspension

Method of manufacturing disk drive suspension and manufacturing apparatus of the same

MANUFACTURING PROCESS FOR ULTRASONIC ATOMIZATION PIECE

Attachment System For Attaching a Sensor to a Substrate, Method of Attaching a Sensor to a Substrate

Piezoelectric element, liquid ejection head, and liquid ejection apparatus

PIEZOELECTRIC DEVICE AND METHOD OF MANUFACTURING THE SAME

INTERVENTIONAL DEVICE WITH AN ULTRASOUND TRANSDUCER

Printing components to substrate posts

RESONATOR AND FABRICATION METHOD THEREOF

NANO-SCALE SINGLE CRYSTAL THIN FILM

Method for manufacturing a substrate for a radiofrequency filter

Vibration detection element and method for manufacturing the same

Integration techniques for micromachined pMUT arrays and electronics using thermocompression bonding, eutectic bonding, and solder bonding

INTEGRATION TECHNIQUES FOR MICROMACHINED pMUT ARRAYS AND ELECTRONICS USING SOLID LIQUID INTERDIFFUSION (SLID)

Integration techniques for micromachined pMUT arrays and electronics using thermocompression bonding, eutectic bonding, and solder bonding

Method for manufacturing a substrate for a radiofrequency device

Joined body of piezoelectric material substrate and support substrate

Heterostructure and method of fabrication

Layered sensor having multiple laterally adjacent substrates in a single layer

Method for packaging an electronic component in a package with an organic back end

Method for transferring a piezoelectric layer onto a support substrate

PIEZOELECTRIC TRANSDUCER ARRAY FABRICATION

PIEZOELECTRIC FILM CAVITY STRUCTURE FOR A BULK ACOUSTIC WAVE (BAW) RESONATOR AND METHOD THEREFOR

Method for manufacturing a film on a flexible sheet

Piezoelectric device, vibration structure and piezoelectric sensor

Method for manufacturing a film on a support having a non-flat surface

Heterostructure and method of fabrication

ULTRASOUND DEVICE WITH PIEZOELECTRIC MICROMACHINED ULTRASONIC TRANSDUCERS

Sound producing device and method of manufacturing sound producing device

CAVITY STRUCTURES

Printing components to substrate posts

MODULE STRUCTURES WITH COMPONENT ON SUBSTRATE POST

Method and apparatus for manufacturing semiconductor device

Piezoelectric micromachined ultrasound transducer device with multi-layer etched isolation trench

Ultrasound transducer and method for wafer level back face attachment

Elastic wave element and method for manufacturing same

Substrate laminated body and method of manufacturing substrate laminated body

Electronic devices formed in a cavity between substrates

Method of manufacturing an integrated capacitor structure using a donor substrate for transferring layers to a receiver substrate

RESILIENT WAVE-SHAPED ENERGY-GENERATING DEVICE

Manufacturing method for electronic component

STRETCHABLE ULTRASONIC TRANSDUCER DEVICES

PHYSICAL QUANTITY SENSOR

Methods of manufacturing RF filters

Piezoelectric micromachined ultrasound transducer device with piezoelectric barrier layer

MICROFABRICATED DEVICE WITH PIEZOELECTRIC SUBSTRATE AND METHOD OF MANUFACTURE

MEMS device, liquid ejecting head, liquid ejecting apparatus, and manufacturing method of MEMS device

Surface acoustic wave devices using beryllium conductors

Method of manufacturing an oscillator

Method of manufacturing substrate for acoustic wave device

Multilayer piezoelectric element, piezoelectric vibration apparatus, and electronic device

Bonded body and elastic wave element

Bonding method

Bonding method

Thin-film structural body and method for fabricating thereof

Piezoelectric actuator and piezoelectric actuating plate thereof

Method for manufacturing a hybrid structure

PIEZOELECTRIC DEVICE, LIQUID EJECTING HEAD, AND LIQUID EJECTING APPARATUS

SENSOR DEVICE, FORCE DETECTION DEVICE, AND ROBOT

Sensor device, force detection device, and robot

Multi-element bending transducers and related methods and devices

Transducer laminate

Ultrasound transducer and method for wafer level back face attachment

EXPLOSION PROOF PIEZOELECTRIC ULTRASONIC DETECTOR

Electronic devices formed in a cavity between substrates and including a via

METHODS OF MANUFACTURING ELECTRONIC DEVICES TO PREVENT WATER INGRESS DURING MANUFACTURE

Heterostructure and method of fabrication

Methods of manufacturing electronic devices formed in a cavity

Methods of manufacturing electronic devices formed in a cavity and including a via

Laminate structure, piezoelectric element, and method of manufacturing piezoelectric element

Microelectronic structures with suspended lithium-based thin films

Vibrator, ultrasonic motor, and optical device

Acoustic wave device and method of fabricating the same

Magnetoelectric macro fiber composite fabricated using low temperature transient liquid phase bonding

Piezoelectric element and piezoelectric sensor

Fluidic assembly process using piezoelectric plates

Piezoelectric vibration component and application method

PIEZOELECTRIC DEVICE

Method for bonding wafers

Piezoelectric device and manufacturing method therefor

Micro electro mechanical system, semiconductor device, and manufacturing method thereof

Method for manufacturing piezoelectric device

Method for manufacturing piezoelectric device

Method for producing piezoelectric device

Piezoelectric device and method for manufacturing piezoelectric device

Ultrasonic flow-meter for measuring the flow-rate of a chemical-solution using an electromechanical transformation device

Ultrasonic flow meter with electrically conductive layer and an electrode having a roughened surface therebetween

Bimorph-type piezoelectric film

Ultrasonic device, piezoelectric device, ultrasonic measurement apparatus, and electronic instrument

Scanner unit, optical fiber scanner, illumination apparatus, and observation apparatus

PIEZOELECTRIC DEVICE AND BASE

Method for manufacturing fingerprint identification modules

Piezoelectric sensor including a sensor unit having a first adhesive layer with different properties than a second adhesive layer

Integrated compliant boundary for piezoelectric bimorph actuator

Supporting substrate for composite substrate and composite substrate

ULTRASONIC TRANSDUCER AND MANUFACTURING METHOD THEREFOR

Micro electro mechanical system, semiconductor device, and manufacturing method thereof

INTEGRATED REFERENCE VACUUM PRESSURE SENSOR WITH ATOMIC LAYER DEPOSITION COATED INPUT PORT

One up, one down connection structure for piezoelectric device in tire patch

Method of forming a piezoelectric actuator

Piezoelectric element unit and driving device

Vibrator and electronic device including the same

Method, apparatus and system for a transferable micromachined piezoelectric transducer array

Actuator mounting method and method for producing an ice protection device as well as mounting device

Method for forming a suspended lithium-based membrane semiconductor structure

Piezoelectric actuator array

PIEZOELECTRIC DEVICE AND METHOD OF FABRICATING THE SAME

Composite substrate

Method and apparatus for electrical gap setting for a piezoelectric pressure sensor

Piezoelectric actuator, ink jet head, and method for producing piezoelectric actuator

Piezoelectric device, ultrasound probe, droplet discharge device, and piezoelectric device fabrication method

Piezoelectric film transfer for acoustic resonators and filters

Micro electro mechanical system, semiconductor device, and manufacturing method thereof

Piezoelectric device

Piezoelectric device and method for manufacturing piezoelectric device

Method for manufacturing a high-temperature ultrasonic transducer using a lithium niobate crystal brazed with gold and indium

Piezoelectric component and method for producing a piezoelectric component

Piezoelectric device

Electronic device and method of manufacturing the same

Piezoelectric bulk wave device, and method of manufacturing the piezoelectric bulk wave device

Piezoelectric device and method for manufacturing piezoelectric device

Piezoelectric device and method for producing piezoelectric device

Adhesive transfer

Piezoelectric device

Piezoelectric device having first and second non-metal electroconductive intermediate films

Method of fabricating acoustic wave device

Bonding method for bonding metal plate and piezoelectric body

Device and method for manufacturing the same

Method for implanting a piezoelectric material

Method for manufacturing a bending transducer, a micro pump and a micro valve, micro pump and micro valve

Method for manufacturing ferroelectric device

WIRE BOND FREE CONNECTION OF HIGH FREQUENCY PIEZOELECTRIC ULTRASOUND TRANSDUCER ARRAYS

Piezoelectric ultrasonic transducer apparatus

Fluid ejection device

ULTRASONIC SENSOR

Method for manufacturing electronic component

Fabrication of electronic and photonic systems on flexible substrates by layer transfer method

Composite substrate and manufacturing method thereof

ELECTROMECHANICAL CONVERSION ELEMENT AND DRIVE DEVICE

OSCILLATOR, VIBRATION ACTUATOR, LENS BARREL, CAMERA, BONDED PRODUCT AND BONDING METHOD

Method for manufacturing piezoelectric device

Piezoelectric device and method for manufacturing piezoelectric device

Electromechanical conversion element and actuator

Composite substrate and method for manufacturing the composite substrate

Composite substrate and method for manufacturing the same

Structure for bonding metal plate and piezoelectric body and bonding method

Composite substrate manufacturing method and composite substrate

Device utilizing piezoelectric element

Electronic device

Method for manufacturing at least one mechanical-electrical energy conversion system

Piezoelectric actuator of a multilayer design and method for fastening an outer electrode in a piezoelectric actuator

PIEZOELECTRIC DEVICE AND MANUFACTURING METHOD THEREOF

Actuator, actuator structure and method of manufacturing actuator

Removing piezoelectric material using electromagnetic radiation

Electromechanical transducer and method for manufacturing the same

METHOD AND APPARATUS FOR SUBSTRATE BONDING

METHOD OF FILING ADHESIVE AND METHOD OF MANUFACTURING HEAD SUSPENSION

Method for transferring a thin layer by proton exchange

Piezoelectric actuator and manufacturing method thereof, liquid ejecting head, and image forming apparatus

PIEZOELECTRIC ELEMENT AND METHOD OF MANUFACTURING THE SAME

METHOD FOR MANUFACTURING PIEZOELECTRIC DEVICE

Composite substrate and method for forming metal pattern

Composite substrate and manufacturing method thereof

Method for manufacturing piezoelectric element

Bonding tool and method

Method for manufacturing piezoelectric device

Method for manufacturing piezoelectric device

Bonding on silicon substrate having a groove

Process of manufacturing a piezoelectric actuator for tunable electronic components on a carrier substrate

Electronic component and method for manufacturing electronic component

Piezoelectric actuators

RUGGED PIEZOELECTRIC ACTUATORS AND METHODS OF FABRICATING SAME

Micro electro mechanical system, semiconductor device, and manufacturing method thereof

METHOD AND MECHANISM OF PZT MICRO-ACTUATOR ATTACHMENT FOR THE HARD DISK DRIVER ARM

Smart donor rolls using individually addressable piezoelectric actuators

SELF-ACTIVATED NANOSCALE PIEZOELECTRIC MOTION SENSOR

Piezoelectric microspeaker using microelectromechanical systems and method of manufacturing the same

Piezoelectric substance element, piezoelectric substance film manufacturing method, liquid discharge head and liquid discharge apparatus

Oscillating element, manufacturing method of oscillating element, optical scanning device, image forming device and image display device

Methods to make piezoelectric ceramic thick film array and single elements with a reusable single layer substrate structure

Functional film containing structure and method of manufacturing functional film

Method for Manufacturing Liquid Ejecting Head, and Liquid Ejecting Head

FUNCTIONAL FILM CONTAINING STRUCTURE AND METHOD OF MANUFACTURING FUNCTIONAL FILM

Fabrication of piezoelectric single crystalline thin layer on silicon wafer

Driving device

Method of forming an array of piezoelectric actuators on a membrane

Method for forming ceramic thick film element arrays with fine feature size, high-precision definition, and/or high aspect ratios

Bonding method for laminated piezoelectric element

Laminated piezoelectric element including adhesive layers having small thickness and high adhesive strength

Bonding method for laminated piezoelectric element

Structure for Functional Film Pattern Formation and Method of Manufacturing Functional Film

Functional Film Containing Structure And Method Of Manufacturing Functional Film

Forming piezoelectric actuators

Method for forming a MEMS

Piezoelectric actuator and manufacturing method thereof, liquid ejecting head, and image forming apparatus

Methods of manufacture of a transducer devices actuators

Micro electro mechanical system, semiconductor device, and manufacturing method thereof

Piezoelectric/electrostrictive film and method for producing the same

Piezo actuator for cooling

Method and mechanism of PZT micro-actuator attachment for the hard disk driver arm

Piezoelectric actuator, liquid transporting apparatus and method of producing piezoelectric actuator

Methods for making large dimension, flexible piezoelectric ceramic tapes

Method for preparing film structure comprising ferroelectric single crystal layer

System and method for constructing and operating a high performance piezoelectric actuator

Method for forming ceramic thick film element arrays

Method for forming ceramic thick film element arrays with fine feature size, high-precision definition, and/or high aspect ratios

Forming piezoelectric actuators

Forming piezoelectric actuators

Fabrication of electronic and photonic systems on flexible substrates by layer transfer method

Indium or tin bonded acoustic transducer systems

Method of fabricating an array of multi-electroded piezoelectric transducers for piezoelectric diaphragm structures

Methods for making thick film elements

Poling system for piezoelectric diaphragm structures

Piezoelectric ceramic thick film element, array of elements, and devices

Bimorph MEMS devices

Method of producing a micro-actuator

Layered piezoelectric element realizing stable operating characteristic for high quality image recording

Crystal oscillator and method for fabricating the same

Hybrid semiconductor-piezoacoustic radiofrequency device