Piezoelectric film and piezoelectric device including the same, and liquid discharge apparatus

Perovskite-type oxide film, piezoelectric thin-film device and liquid ejecting device using perovskite-type oxide film, as well as production process and evaluation method for perovskite-type oxide film

Piezoelectric device, angular velocity sensor, electronic apparatus, and production method of a piezoelectric device

Patterned inorganic film, piezoelectric device, and process for producing the same

Film depositing apparatus, a film depositing method, a piezoelectric film, and a liquid ejecting apparatus

Method for Forming Multilayer Film and Apparatus for Forming Multilayer Film

RECESS-PROTRUSION STRUCTURE BODY, PROCESS FOR PRODUCING THE SAME, PIEZOELECTRIC DEVICE, AND INK JET RECORDING HEAD

FILM FORMING METHOD AND FILM FORMING APPARATUS

Piezoelectric-coated carbon nanotube generators

Piezoelectric film poling method

Piezoelectric thin film elemental device, sensor and actuator

Multilayer Film Forming Method and Multilayer Film Forming Apparatus

Piezoelectric substance, piezoelectric element, and liquid discharge head and liquid discharge apparatus using piezoelectric element

Process for producing a piezoelectric film, film forming apparatus, and piezoelectric film

Piezoelectric thin film element including upper and lower electrodes, and an actuator and a sensor fabricated by using the same

Perovskite oxide, process for producing the perovskite oxide, and piezoelectric device

Micro movable device and method of making the same using wet etching

Piezoelectric element substrate, liquid droplet ejecting head, liquid droplet ejecting device, and piezoelectric element substrate manufacturing method

Piezoelectric thin film device

Piezoelectric thin film device

PIEZOELECTRIC DEVICE, PROCESS FOR PRODUCING THE PIEZOELECTRIC DEVICE, AND INKJET RECORDING HEAD

Dielectric film structure, piezoelectric actuator using dielectric element film structure and ink jet head

Piezoelectric substance element, piezoelectric substance film manufacturing method, liquid discharge head and liquid discharge apparatus

PEROVSKITE OXIDE, FERROELECTRIC FILM AND FERROELECTRIC DEVICE CONTAINING THE PEROVSKITE OXIDE

FERROELECTRIC OXIDE, PROCESS FOR PRODUCING THE SAME, PIEZOELECTRIC BODY, AND PIEZOELECTRIC DEVICE

Substrate with a piezoelectric thin film

Piezoelectric actuator and liquid discharge head using the same

Piezoelectric device and liquid-ejecting head

METHOD OF MANUFACTURING PIEZOELECTRIC ACTUATOR, LIQUID EJECTION HEAD AND IMAGE FORMING APPARATUS

Piezoelectric element

Piezoelectric device, and liquid discharge device using the piezoelectric device

Process for manufacting a piezoelectric device

PIEZOELECTRIC DEVICE, LIQUID DROPLET EJECTING HEAD USING THE SAME, AND PROCESS FOR PRODUCING THE SAME

PEROVSKITE TYPE OXIDE, FERROELECTRIC FILM, PROCESS FOR PRODUCING SAME, FERROELECTRIC DEVICE, AND LIQUID DISCHARGE APPARATUS

PROCESS FOR FORMING A FERROELECTRIC FILM, FERROELECTRIC FILM, FERROELECTRIC DEVICE, AND LIQUID DISCHARGE APPARATUS

PROCESS FOR FORMING A FERROELECTRIC FILM, FERROELECTRIC FILM, FERROELECTRIC DEVICE, AND LIQUID DISCHARGE APPARATUS

Process for forming a ferroelectric film, ferroelectric film, ferroelectric device, and liquid discharge apparatus

Sputtering method and apparatus

Piezoelectric device, piezoelectric actuator, and liquid discharge device having piezoelectric films

Potassium niobate deposited body and method for manufacturing the same, piezoelectric thin film resonator, frequency filter, oscillator, electronic circuit, and electronic apparatus

Piezoelectric thin film, piezoelectric material, and fabrication method of piezoelectric thin film and piezoelectric material, and piezoelectric resonator, actuator element, and physical sensor using piezoelectric thin film

Ultrasound Transducers

Piezoelectric device, process for producing the piezoelectric device, and liquid discharge device

Piezoelectric body, piezoelectric device, and liquid discharge apparatus

Patterned inorganic film formed of an inorganic material on a metal film having a surface which includes a plurality of surface-oxidized areas, piezoelectric device having the patterned inorganic film, and process for producing the inorganic film

Method for producing piezoelectric actuator

Ferroelectric film, process for producing the same, ferroelectric device, and liquid discharge device

Piezoelectric actuator, liquid ejection head, image forming apparatus, and method of manufacturing piezoelectric actuator

PIEZOELECTRIC ELEMENT AND METHOD FOR MANUACTURING PIEZOELECTRIC ELEMENT

PIEZOELECTRIC DEVICE, PROCESS FOR PRODUCING THE SAME, AND LIQUID DISCHARGE DEVICE

Piezoelectric member, piezoelectric element, and liquid discharge head and liquid discharge apparatus utilizing piezoelectric element

Piezoelectric thin film device and piezoelectric thin film device manufacturing method, and inkjet head and inkjet recording apparatus

Piezoelectric Thin Film Resonator

Magnetic head support, manufacturing methods therefor, and magnetic disk device

Piezoelectric body and liquid discharge head

Process for forming a film, piezoelectric film, piezoelectric device, and liquid discharge apparatus

Process for forming a film, piezoelectric film, and piezoelectric device

Film-forming system, film-forming method, insulating film, dielectric film, piezoelectric film, ferroelectric film, piezoelectric element and liquid discharge system

Piezoelectric film, process of manufacturing the same and piezoelectric element

Perovskite oxide, process for producing the perovskite oxide, piezoelectric body, piezoelectric device, and liquid discharge device

Piezoelectric thin film device and method for manufacturing the same

Piezoelectric thin film device and method for manufacturing the same

PIEZOELECTRIC THIN FILM ELEMENT, INK JET HEAD, AND INK JET TYPE RECORDING APPARATUS

Piezoelectric element, ink jet head and producing method for piezoelectric element

Epitaxial oxide film, piezoelectric film, piezoelectric film element, liquid discharge head using the piezoelectric film element, and liquid discharge apparatus

Piezoelectric devices, process for producing the piezoelectric device, and inkjet recording head

Piezoelectric element and manufacturing method thereof, electronic device, ink jet device

FILM FORMING METHOD AND OXIDE THIN FILM ELEMENT

ZnO film with C-axis orientation

Recess-protrusion structure body, process for producing the same, piezoelectric device, and ink jet type recording head

Method for forming perovskite type oxide thin film, piezoelectric element, liquid discharge head, and liquid discharge apparatus

Piezoelectric substance, piezoelectric substance element, liquid discharge head, liquid discharge device and method for producing piezoelectric substance

Perovskite type oxide material, piezoelectric element, liquid discharge head and liquid discharge apparatus using the same, and method of producing perovskite type oxide material

Wurtzite thin film, laminate containing wurtzite crystalline layer and their manufacturing methods

Piezoelectric substance, piezoelectric element, liquid discharge head using piezoelectric element, liquid discharge apparatus, and production method of piezoelectric element

Piezoelectric substance and manufacturing method thereof, piezoelectric element and liquid discharge head using such piezoelectric element and liquid discharge apparatus

Insulating target material, method of manufacturing insulating target material, insulating complex oxide film, and device

Piezoelectric thin film element

Structure of piezoelectric element and liquid discharge recording head, and method of manufacture therefor

Semiconductor device and manufacturing method thereof

Method of manufacturing ferroelectric layer and method of manufacturing electronic instrument

Piezoelectric element

Micro movable device and method of making the same using wet etching

Potassium niobate deposited body and method for manufacturing the same, piezoelectric thin film resonator, frequency filter, oscillator, electronic circuit, and electronic apparatus

Piezoelectric element and method for manufacturing piezoelectric element

Potassium niobate deposited body and method for manufacturing the same, surface acoustic wave element, frequency filter, oscillator, electronic circuit, and electronic apparatus

Piezoelectric element, ink jet head, angular velocity sensor, method for manufacturing the same, and ink jet recording apparatus

Dielectric film structure, piezoelectric actuator using dielectric element film structure and ink jet head

Piezoelectric element, inkjet head, angular velocity sensor, methods for manufacturing them and inkjet recording device

Electronic component having micro-electrical mechanical system

Piezoelectric element, ink-jet head with same, and their manufacturing methods

Piezoelectric element, ink jet head, angular velocity sensor, method for manufacturing the same, and ink jet recording apparatus

Piezoelectric device, its manufacturing method, and touch panel device

Piezoelectric element and method for manufacturing

Method for manufacturing a ferroelectric member element structure

Method of manufacturing piezoelectric thin film device and piezoelectric thin film device

Piezoelectric member element and liquid discharge head comprising element thereof

Piezoelectric element

Piezoelectric element, ink jet head, angular velocity sensor, method for manufacturing the same, and ink jet recording apparatus

Piezoelectric device comprising ultrahighly-oriented aluminum nitride thin film and its manufacturing method

Dielectric element, piezoelectric element, ink jet head and ink jet recording apparatus and manufacturing method of same

Piezoelectric element, ink jet head, angular velocity sensor, and ink jet recording apparatus

Electronic component having micro-electrical mechanical system

Thin-film lamination, and actuator device, filter device, ferroelectric memory, and optical deflection device employing the thin -film lamination

Dielectric member, piezoelectric member, ink jet head, ink jet recording apparatus and producing method for ink jet recording apparatus

Thin-film piezoelectric element and method of making same

Electronic device and method of fabricating the same

Component for fabricating an electronic device and method of fabricating an electronic device

Dielectric element, piezoelectric element, ink jet head and ink jet recording apparatus and manufacturing method of same

Piezoelectric thin film device and method for manufacturing the same

Dielectric element, piezoelectric element, ink jet head and method for producing the same head

Method of manufacturing an electronic component

Substrate for electronic devices, manufacturing method therefor, and electronic device

Piezoelectric element and method for manufacturing the same, and ink jet head and ink jet recording apparatus using the piezoelectric element

Method for manufacturing a piezoelectric device

Flextensional transducer and method of forming flextensional transducer

Method for manufacturing a piezoelectric device

Piezoelectric element, method for fabricating the same, inkjet head, method for fabricating the same, and inkjet recording apparatus

Piezoelectric film element, method of manufacturing the same, and liquid discharge head

Piezoelectric element, fabrication method for the same, and inkjet head, inkjet recording apparatus and angular velocity sensor including the same

Dielectric thin film element, piezoelectric actuator and liquid discharge head, and method for manufacturing the same

Piezoelectric device, liquid jetting head, ferroelectric device, electronic device and methods for manufacturing these devices

Substrate for electronic device, method for manufacturing substrate for electronic device, and electronic device

Ferroelectric thin film element and its manufacturing method, thin film capacitor and piezoelectric actuator using same

Ink jet recording head and ink jet printer with piezoelectric element