LASER CHAMBER, DISCHARGE ELECTRODE, AND ELECTRONIC DEVICE MANUFACTURING METHOD

CHAMBER DEVICE OF GAS LASER APPARATUS, GAS LASER APPARATUS, AND ELECTRONIC DEVICE MANUFACTURING METHOD

CHAMBER APPARATUS FOR LASER, GAS LASER APPARATUS, AND ELECTRONIC DEVICE MANUFACTURING METHOD

LASER CHAMBER, GAS LASER DEVICE, AND ELECTRONIC DEVICE MANUFACTURING METHOD

CHAMBER OF GAS LASER APPARATUS, GAS LASER APPARATUS, AND ELECTRONIC DEVICE MANUFACTURING METHOD

LASER CHAMBER, GAS LASER APPARATUS, AND METHOD FOR MANUFACTURING ELECTRONIC DEVICES

APPARATUS FOR AND METHOD OF CONDITIONING LASER ELECTRODES

ELECTRODE WITH ENGINEERED SURFACE FOR IMPROVED ENERGY PERFORMANCE

DISCHARGE ELECTRODES, MANUFACTURING METHOD OF ANODE, AND ELECTRONIC DEVICE MANUFACTURING METHOD

DISCHARGE ELECTRODE, METHOD OF MANUFACTURING DISCHARGE ELECTRODE, AND ELECTRONIC DEVICE MANUFACTURING METHOD

Absorbing Optical Switch for High Fluence Laser Pulse

Positive high-voltage laser having super-long discharge tube

Electromagnetic shield for a sealing mechanism of a laser chamber

DISCHARGE ELECTRODE, METHOD FOR MANUFACTURING ANODE, AND METHOD FOR MANUFACTURING ELECTRONIC DEVICES

UNDERCUT ELECTRODES FOR A GAS DISCHARGE LASER CHAMBER

Electrode for a discharge chamber

Plasma heating apparatus, system and method

Electrode for a discharge chamber

Optical resonators that utilize plasma confinement of a laser gain media

Erosion resistant electrodes for use in generating gas discharge laser

Laser chamber

Electrode of metallic material, and gyrolaser comprising at least one such electrode

Apparatus for generating laser radiation

Dielectric barrier discharge excimer light source

Dielectric barrier discharge excimer light source

Dielectric barrier diescharge excimer light source

Anodes for fluorine gas discharge lasers

Dielectric Barrier Discharge Excimer Light Source

Cathodes for fluorine gas discharge lasers

High power diode utilizing secondary emission

Discharge laser with porous insulating layer covering anode discharge surface