215439 ⎘
Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range; Constructional details of gas laser discharge tubes Electrodes, e.g. special shape, configuration or composition
Sub-classes:LASER CHAMBER, DISCHARGE-EXCITATION-TYPE GAS LASER DEVICE, AND ELECTRONIC DEVICE MANUFACTURING METHOD
#2LASER APPARATUS AND METHOD FOR MANUFACTURING ELECTRONIC DEVICE
#3GAS LASER DEVICE AND ELECTRONIC DEVICE MANUFACTURING METHOD
#4LASER CHAMBER DEVICE, GAS LASER APPARATUS, AND ELECTRONIC DEVICE MANUFACTURING METHOD
#5CHAMBER APPARATUS FOR LASER, GAS LASER APPARATUS, AND ELECTRONIC DEVICE MANUFACTURING METHOD
#6LASER APPARATUS AND ELECTRONIC DEVICE MANUFACTURING METHOD
#7GAS LASER DEVICE AND ELECTRONIC DEVICE MANUFACTURING METHOD
#8GAS LASER APPARATUS, GAS LASER APPARATUS MAINTENANCE METHOD, AND ELECTRONIC DEVICE MANUFACTURING METHOD
#9GAS LASER DEVICE AND ELECTRONIC DEVICE MANUFACTURING METHOD
#10Light emitting sealed body and light source device
#11GAS LASER APPARATUS AND ELECTRONIC DEVICE MANUFACTURING METHOD
#12CHAMBER DEVICE, GAS LASER DEVICE, AND ELECTRONIC DEVICE MANUFACTURING METHOD
#13Laser system, learning device, and inference device
#14Radio Frequency Slab Laser
#15Laser device and electronic device manufacturing method
#16Light emitting unit and light source device
#17Light emitting sealed body and light source device
#18Laser apparatus and electronic device manufacturing method
#19High-voltage pulse generator, gas laser apparatus, and method for manufacturing electronic device
#20GAS LASER APPARATUS, LASER BEAM EMITTING METHOD OF GAS LASER APPARATUS, AND ELECTRONIC DEVICE MANUFACTURING METHOD
#21LASER SYSTEM AND ELECTRONIC DEVICE MANUFACTURING METHOD
#22Radio-frequency excited gas laser
#23Compact coaxial laser
#24Apparatus for tuning discharge performance in a laser chamber
#25ENHANCED WAVEGUIDE SURFACE IN GAS LASERS
#26Optical element moving apparatus, narrowed-line laser apparatus, and method for manufacturing electronic device
#27Laser radiation system
#28Excimer laser apparatus and method for manufacturing electronic device
#29Laser device and line narrow optics
#30Laser system
#31Gas laser apparatus and magnetic bearing control method
#32Solid-state laser system and wavelength conversion system
#33Lasers with setback aperture
#34HIGH-VOLTAGE PULSE GENERATOR AND GAS LASER APPARATUS
#35Laser apparatus
#36Polarisation and mode selection technique for a laser
#37Multilayer electrode assembly
#38Laser apparatus
#39Energy controller for excimer-laser silicon crystallization
#40Line narrowed laser apparatus
#41Laser machining device
#42Excimer laser apparatus
#43EXCIMER LASER SYSTEMS WITH A RING CAVITY STRUCTURE
#44Lithographic apparatus
#45Laser unit
#46Excimer laser device
#47Excimer laser apparatus and excimer laser system
#48Laser device and line narrow optics
#49Device for generating a laser radiation and associated fabrication method
#50Laser crystallization device
#51Excimer laser chamber device
#52LASER DEVICE
#53HIGH-VOLTAGE PULSE GENERATOR AND GAS LASER APPARATUS
#54Discharge excitation gas laser apparatus
#55Narrow band laser apparatus
#56Gas laser
#57Gas Flow Laser
#58Laser chamber
#59Gas laser device and control method therefor
#60Laser chamber
#61Excimer laser apparatus and excimer laser system
#62Gas laser oscillation apparatus of orthogonal excitation type
#63Flat-folded ceramic slab lasers
#64Laser apparatus
#65Laser unit and extreme ultraviolet light generating system
#66Gas laser device
#67Gas laser device
#68Flow guide device for dual-electrode discharge cavity, dual electrode discharge cavity utilize the same and excimer laser
#69FABRICATION OF CAPACITIVE DISCHARGE ELECTRODES FOR A RING LASER GYROSCOPE
#70Diffusion cooled gas laser arrangement and method for setting the discharge distribution in the case of diffusion cooled gas laser arrangement
#71Laser chamber and discharge excitation gas laser apparatus
#72Air-cooled gas lasers with heat transfer resonator optics and associated systems and methods
#73Air-cooled gas lasers and associated systems and methods
#74Air-cooled gas lasers with heat transfer assembly and associated systems and methods
#75Laser apparatus
#76Laser apparatus and method of controlling laser apparatus
#77Laser tube with baffles
#78Optical device, and laser chamber and gas laser apparatus using the same
#79Nanolaser generator using graphene electrode and method for manufacturing the same
#80Waveguide COlaser with multiply folded resonator
#81PRE-IRRADIATION IN GAS DISCHARGE LASING DEVICES USING MULTIPLE PRE-IRRADIATION DISCHARGES PER ELECTRICAL FEED-THROUGH
#82Gas laser device
#83Waveguide COlaser with mutiply folded resonator
#84Stripline laser
#85Extendable electrode for gas discharge laser
#86Ceramic slab, free-space and waveguide lasers
#87RF-excited laser assembly
#88EXCIMER LASER DEVICE
#89Extendable electrode for gas discharge laser
#90Radio frequency excited gas laser source
#91Particle damage protection for high power COslab laser mirrors
#92Mode selection technique for a laser
#93Gas-discharge laser
#94Laser having distributed inductances
#95RF shielded, series inductor, high RF power impedance matching interconnector for COslab laser
#96Plasma shunting apparatus and method for ring laser gyroscope
#97High power low inductance RF hermetic sealed feed-through for slab CO2 lasers
#98Excimer laser device operable at high repetition rate and having high band-narrowing efficiency
#99Method and arrangement for the excitation of a gas laser arrangement
#100Excimer laser device
#101Anodes for fluorine gas discharge lasers
#102TRIGGERED SPARK GAP
#103Chamber for a high energy excimer laser source
#104Gas slab laser
#105Extendable electrode for gas discharge laser
#106Gas discharge laser light source beam delivery unit
#107Cathodes for fluorine gas discharge lasers
#108Capillary discharge x-ray laser
#109Timing control for two-chamber gas discharge laser system
#110Gas discharge laser output light beam parameter control
#111Alumina tube
#112Very high repetition rate narrow band gas discharge laser system
#113Excimer laser with electron emitters
#114Very narrow band, two chamber, high rep-rate gas discharge laser system
#115Discharge excitation type pulse laser apparatus
#116Laser gas replenishment method
#117Very narrow band, two chamber, high rep-rate gas discharge laser system
#118Very high repetition rate narrow band gas discharge laser system
#119COslab laser
#120Dielectric coupled COslab laser
#121Gas discharge MOPA laser spectral analysis module
#122Pre-ionizer for RF-energized gas laser
#123Multi-path laser system
#124Laser spectral engineering for lithographic process
#125System and method for segmented electrode with temporal voltage shifting
#126Gas discharge MOPA laser spectral analysis module
#127Laser spectral engineering for lithographic process
#128Optical elements with protective undercoating
#129Timing control for two-chamber gas discharge laser system
#130Discharge laser with porous insulating layer covering anode discharge surface
#131Radio frequency laser