LASER CHAMBER, GAS LASER APPARATUS, AND ELECTRONIC DEVICE MANUFACTURING METHOD

GAS LASER APPARATUS AND ELECTRONIC DEVICE MANUFACTURING METHOD

LASER CHAMBER APPARATUS, GAS LASER APPARATUS, AND ELECTRONIC DEVICE MANUFACTURING METHOD

GAS LASER DEVICE AND ELECTRONIC DEVICE MANUFACTURING METHOD

CHAMBER FOR GAS LASER DEVICE, GAS LASER DEVICE, AND ELECTRONIC DEVICE MANUFACTURING METHOD

CHAMBER OF GAS LASER APPARATUS AND ELECTRONIC DEVICE MANUFACTURING METHOD

CHAMBER FOR GAS LASER DEVICE, GAS LASER DEVICE, AND ELECTRONIC DEVICE MANUFACTURING METHOD

Capacitor cooling structure and laser apparatus

Laser oscillator

Gas laser oscillator having auxiliary electrodes

Laser chamber

Laser chamber

Preliminary ionization discharge device and laser apparatus

Gas laser oscillator capable of estimating sealability of gas container

Gas laser oscillator controlling adjusted level of laser power supply

Slab gas laser with pre-ionizing cell

Single cavity dual-electrode discharge cavity and excimer laser

Electrodes for generating a stable discharge in gas laser systems

Electromagnetically pumped alkali metal vapor cell system

Gas-discharge laser

High pulse repetition rate gas discharge laser

Pre-ionizer for pulsed gas-discharge laser

Electrically excited gas discharge laser for generating high-repetition frequency light pulses and method for the production thereof

Electrodes for generating a stable discharge in gas laser system

Laser device for exposure device

Pre-ionizer for pulsed gas-discharge laser

Method for operating a vacuum plasma process system

TRIGGERED SPARK GAP

Thermal-expansion tolerant, preionizer electrode for a gas discharge laser

Acoustic shock-wave damping in pulsed gas-laser discharge

High pulse repetition rate gas discharge laser

Alumina tube

Gas discharge laser chamber improvements

High power diode utilizing secondary emission

Pre-ionizer for RF-energized gas laser