220391 ⎘
Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezo-electric or electrostrictive resonators or networks the resonators or networks being of the membrane type
METHOD OF MANUFACTURE FOR SINGLE CRYSTAL CAPACITOR DIELECTRIC FOR A RESONANCE CIRCUIT
#2BULK ACOUSTIC WAVE FILTER
#3ELECTROMECHANICAL MICROSYSTEM IN THE FORM OF A PIEZOELECTRIC RESONANT MEMBRANE BASED ON AN ALPHA QUARTZ LAYER, AND PROCESS FOR THE MANUFACTURING THEREOF
#4ELASTIC WAVE DEVICE AND METHOD FOR MANUFACTURING THE SAME
#5METHOD OF MAKING A PIEZOELECTRIC DEVICE
#6TUNING ACOUSTIC RESONATORS WITH BACK-SIDE COATING
#7DEVICES AND METHODS RELATED TO GRADIENT RAISED FRAMES IN FILM BULK ACOUSTIC RESONATORS
#8TRANSVERSELY-EXCITED FILM BULK ACOUSTIC RESONATOR WITH CONTROLLED CONDUCTOR SIDEWALL ANGLES
#9SEALED-CAVITY BULK ACOUSTIC-WAVE RESONATOR AND METHOD FOR MANUFACTURING
#10BULK ACOUSTIC WAVE RESONATOR, MANUFACTURING METHOD THEREOF AND ELECTRONIC DEVICE
#11TRANSVERSELY-EXCITED FILM BULK ACOUSTIC RESONATORS WITH THREE-LAYER ELECTRODES
#12EPITAXIAL GROWTH OF ALUMINUM ON ALUMINUM-NITRIDE COMPOUNDS
#13ACOUSTIC RESONATOR
#14TRANSVERSELY-EXCITED FILM BULK ACOUSTIC RESONATORS WITH SOLIDLY MOUNTED RESONATOR (SMR) PEDESTALS
#15BULK ACOUSTIC WAVE RESONATOR AND METHOD FOR MANUFACTURING THE SAME
#16TRANSVERSELY-EXCITED FILM BULK ACOUSTIC RESONATOR WITH BURIED OXIDE STRIP ACOUSTIC CONFINEMENT STRUCTURES
#17TRANSVERSELY-EXCITED FILM BULK ACOUSTIC RESONATOR WITH A CAVITY HAVING ROUND END ZONES
#18BULK ACOUSTIC WAVE RESONATOR, MANUFACTURING METHOD THEREOF AND ELECTRONIC DEVICE
#19FILTERS USING TRANSVERSLY-EXCITED FILM BULK ACOUSTIC RESONATORS WITH FREQUENCY-SETTING DIELECTRIC LAYERS
#20TRANSVERSELY-EXCITED FILM BULK ACOUSTIC RESONATORS WITH MULTIPLE PIEZOELECTRIC MEMBRANE THICKNESSES ON THE SAME CHIP
#21FILTER USING TRANSVERSELY-EXCITED FILM BULK ACOUSTIC RESONATORS WITH DIVIDED FREQUENCY-SETTING DIELECTRIC LAYERS
#22BULK ACOUSTIC WAVE RESONATOR, MANUFACTURING METHOD THEREOF AND ELECTRONIC DEVICE
#23TRANSVERSELY-EXCITED FILM BULK ACOUSTIC RESONATOR PACKAGE
#24Methods related to gradient raised frames in film bulk acoustic resonators
#25TRANSVERSELY-EXCITED FILM BULK ACOUSTIC RESONATOR WITH A BACK-SIDE DIELECTRIC LAYER
#26TRANSVERSELY-EXCITED FILM BULK ACOUSTIC RESONATOR
#27TRANSVERSELY-EXCITED FILM BULK ACOUSTIC RESONATOR FILTERS WITH SUB-RESONATORS HAVING DIFFERENT MARK AND PITCH
#28BULK ACOUSTIC WAVE RESONATOR DEVICE AND METHOD OF MANUFACTURING THEREOF
#29SEMICONDUCTOR STRUCTURE AND METHOD FOR PREPARING SEMICONDUCTOR STRUCTURE, FILM BULK ACOUSTIC RESONATOR AND METHOD FOR PREPARING FILM BULK ACOUSTIC RESONATOR
#30MULTIPLE MEMBRANE THICKNESS WAFERS USING LAYER TRANSFER ACOUSTIC RESONATORS AND METHOD OF MANUFACTURING SAME
#31Transversely-excited film bulk acoustic resonator with periodic etched holes
#32XBAR resonators with non-rectangular diaphragms
#33ACOUSTIC WAVE DEVICE AND METHOD OF MANUFACTURING THE SAME
#34Vibrator Element
#35Vibrator Element
#36ACOUSTIC WAVE RESONATOR BACK END SILICON DIOXIDE VIA FORMATION
#37Multi-port filter using transversely-excited film bulk acoustic resonators
#38BULK ACOUSTIC WAVE (BAW) DEVICE WITH OPPOSITELY POLARIZED PIEZOELECTRIC LAYERS FOR HIGHER ORDER RESONANCE AND METHOD OF MANUFACTURE
#39PACKAGING STRUCTURE OF FILM BULK ACOUSTIC RESONATOR
#40ELASTIC WAVE DEVICE AND METHOD FOR MANUFACTURING THE SAME
#41ACOUSTIC WAVE DEVICE AND METHOD OF MANUFACTURING ACOUSTIC WAVE DEVICE
#42TRANSVERSELY-EXCITED FILM BULK ACOUSTIC RESONATOR MATRIX FILTERS
#43Filters using transversly-excited film bulk acoustic resonators with frequency-setting dielectric layers
#44Transversely-excited film bulk acoustic resonator
#45Decoupled transversely-excited film bulk acoustic resonators
#46Transversely-excited acoustic resonator with Z-cut lithium niobate plate
#47Front end modules for Wi-Fi acoustic wave resonator RF filter circuits
#48ACOUSTIC WAVE DEVICE
#49TRANSVERSELY-EXCITED FILM BULK ACOUSTIC RESONATOR WITH REDUCED SPURIOUS MODES
#50Resonator and Preparation Method for Resonator
#51Transversely-excited film bulk acoustic resonator with recessed rotated-Y-X cut lithium niobate
#52LATERAL FIELD EXCITATION ACOUSTIC RESONATOR
#53ACOUSTIC WAVE DEVICE
#54TUNING ACOUSTIC RESONATORS WITH BACK-SIDE COATING
#55METHODS OF FORMING SINGLE CRYSTAL PIEZOELECTRIC LAYERS USING LOW TEMPERATURE EPITAXY AND RELATED SINGLE CRYSTALLINE PIEZOELECTRIC RESONATOR FILMS
#56Cavity structure of bulk acoustic resonator, and manufacturing process
#57ACOUSTIC WAVE DEVICE AND METHOD OF MANUFACTURING ACOUSTIC WAVE DEVICE
#58Transversely-excited film bulk acoustic resonator package and method
#59BULK ACOUSTIC WAVE RESONATOR AND FABRICATION METHOD THEREFOR
#60DIELECTRIC COATED TRANSVERSELY-EXCITED FILM BULK ACOUSTIC RESONATOR (XBAR) FOR COUPLING OPTIMIZATION
#61FBAR Filter with Trap Rich Layer
#62Bulk acoustic wave resonator with stacked piezoelectric layers
#63FILM BULK ACOUSTIC WAVE RESONATORS AND FILTERS WITH PERIPHERAL FILM FRAME
#64Bulk acoustic wave resonator and bulk acoustic wave filter
#65ACOUSTIC WAVE DEVICE, FILTER, MULTIPLEXER, AND MANUFACTURING METHOD OF ACOUSTIC WAVE DEVICE
#66ACOUSTIC RESONATOR PACKAGE
#67Transversely-excited film bulk acoustic resonator with controlled conductor sidewall angles
#68Elastic wave device and method for manufacturing the same
#69Method of manufacturing integrated circuit configured with two or more single crystal acoustic resonator devices
#70METHOD OF MANUFACTURE FOR SINGLE CRYSTAL CAPACITOR DIELECTRIC FOR A RESONANCE CIRCUIT
#71Transversely-excited film bulk acoustic resonators with piezoelectric diaphragm supported by piezoelectric substrate
#72FILTER DEVICE
#73Acoustic wave resonator RF filter circuit and system
#74Acoustic wave resonator RF filter circuit and system
#75SURFACE ACOUSTIC WAVE DEVICE WITH HIGH ELECTROMECHANICAL COUPLING COEFFICIENT BASED ON DOUBLE-LAYER ELECTRODES AND PREPARATION METHOD THEREOF
#76Transversely-excited film bulk acoustic resonators with piezoelectric diaphragm supported by piezoelectric substrate
#77Epitaxial growth of aluminum on aluminum-nitride compounds
#78TRANSVERSELY-EXCITED FILM BULK ACOUSTIC RESONATOR FABRICATION USING A PIEZOELECTRIC PLATE, SILICON SUBSTRATE AND HANDLE WAFER SANDWICH
#79Transversely-excited film bulk acoustic resonator with buried oxide strip acoustic confinement structures
#80Transversely-excited film bulk acoustic resonator with buried oxide strip acoustic confinement structures
#81Transversely-excited film bulk acoustic resonator with oxide strip acoustic confinement structures
#82METHODS OF FORMING GROUP III PIEZOELECTRIC THIN FILMS VIA SPUTTERING
#83Transversely-excited film bulk acoustic resonators with solidly mounted resonator (SMR) pedestals
#84Transversely-excited film bulk acoustic resonators with solidly mounted resonator (SMR) pedestals
#85SOLID REFLECTION-TYPE BULK ACOUSTIC RESONATOR AND PREPARATION METHOD THEREOF
#86Front end module for 6.1 GHz wi-fi acoustic wave resonator RF filter circuit
#87Transversely-excited film bulk acoustic resonator matrix filters
#88WAFER SCALE PACKAGING
#89Filter using transversely-excited film bulk acoustic resonators with divided frequency-setting dielectric layers
#90PIEZOELECTRIC ELEMENT
#91Symmetric transversely-excited film bulk acoustic resonators with reduced spurious modes
#92Transversely-excited film bulk acoustic resonators with multiple piezoelectric membrane thicknesses on the same chip
#93Transversely-excited film bulk acoustic resonators with multiple piezoelectric membrane thicknesses on the same chip
#94Decoupled transversely-excited film bulk acoustic resonators
#95Strain compensated rare earth group III-nitride heterostructures
#96Transversely-excited film bulk acoustic resonator with periodic etched holes
#97Filter using lithium niobate and lithium tantalate transversely-excited film bulk acoustic resonators
#98Rotation in XY plane to suppress spurious modes in XBAR devices
#99Transversely-excited film bulk acoustic resonator with etched conductor patterns
#100Method of fabricating layers of single-crystal material
#101Transversely-excited film bulk acoustic resonator with low thermal impedance
#102Transversely-excited film bulk acoustic resonator with low thermal impedance
#103Transversely-excited film bulk acoustic resonator with low thermal impedance
#104Transversely-excited film bulk acoustic resonators with piezoelectric diaphragm supported by piezoelectric substrate
#105Transversely-excited film bulk acoustic resonator matrix filters
#106Front end modules for 5.6 GHz and 6.6 GHz Wi-Fi acoustic wave resonator RF filter circuits
#107Substrate processing and membrane release of transversely-excited film bulk acoustic resonator using a sacrificial tub
#108Transversely-excited film bulk acoustic resonator filters with sub-resonators having different mark and pitch
#109Method for preparing film bulk acoustic wave device by using film transfer technology
#110Transversely-excited film bulk acoustic resonator package and method
#111Method of fabricating transversely-excited film bulk acoustic resonator
#112Transversely-excited film bulk acoustic resonators with piezoelectric diaphragm supported by piezoelectric substrate
#113Method for making transversely-excited film bulk acoustic resonators with piezoelectric diaphragm supported by piezoelectric substrate
#114Filter using lithium niobate and lithium tantalate transversely-excited film bulk acoustic resonators
#115Filter using lithium niobate and rotated lithium tantalate transversely-excited film bulk acoustic resonators
#116Transversely-excited film bulk acoustic resonators with three-layer electrodes
#117Transversely-excited film bulk acoustic resonator
#118Bandpass filter with frequency separation between shunt and series resonators set by dielectric layer thickness
#119Transversely-excited film bulk acoustic resonator with etched conductor patterns
#120Transversely-excited film bulk acoustic resonator with etched conductor patterns
#121Method of manufacturing quartz crystal element
#122Transversely-excited film bulk acoustic resonator with reduced spurious modes
#123Transversely-excited film bulk acoustic resonator with reduced spurious modes
#124Transversely-excited film bulk acoustic resonator with reduced spurious modes
#125POLARITY PATTERNED PIEZOELECTRIC FILM
#126Transversely-excited film bulk acoustic resonator with a cavity having round end zones
#127Solidly-mounted transversely-excited film bulk acoustic resonator with recessed interdigital transducer fingers using rotated y-x cut lithium niobate
#128Split-ladder band N77 filter using transversely-excited film bulk acoustic resonators
#129Transversely-excited film bulk acoustic resonator with reduced spurious modes
#130Filters using transversly-excited film bulk acoustic resonators with frequency-setting dielectric layers
#131Fabricating method of film bulk acoustic resonator
#132Transversely-excited film bulk acoustic resonator with a bonding layer and an etch-stop layer
#133Transversely-excited film bulk acoustic resonator with a back-side dielectric layer and an etch-stop layer
#134Transversely-excited film bulk acoustic resonator with thermally conductive etch-stop layer
#135METHOD FOR MANUFACTURING AN ELECTRO-ACOUSTIC RESONATOR AND ELECTRO-ACOUSTIC RESONATOR DEVICE
#136Packaging method and packaging structure of film bulk acoustic resonator
#137Front end module for 6.1 GHz Wi-Fi acoustic wave resonator RF filter circuit
#138Transversely-excited film bulk acoustic resonator with periodic etched holes
#139Piezoelectric device
#140Filter using transversely-excited film bulk acoustic resonators with multiple frequency setting layers
#141Filter using transversely-excited film bulk acoustic resonators with two frequency setting layers
#142XBAR resonators with non-rectangular diaphragms
#143XBAR resonators with non-rectangular diaphragms
#144Transversly-excited film bulk acoustic resonators and filters
#145Transversely-excited film bulk acoustic filter using pitch to establish frequency separation between resonators
#146Wide bandwidth temperature-compensated transversely-excited film bulk acoustic resonator
#147Gradient raised frames n film bulk acoustic resonators
#148Bulk-acoustic wave resonator
#149Symmetric transversely-excited film bulk acoustic resonators with reduced spurious modes
#150Multi-port filter using transversely-excited film bulk acoustic resonators
#151Filter using transversely-excited film bulk acoustic resonators with divided frequency-setting dielectric layers
#152Bulk acoustic wave resonator device and method of manufacturing thereof
#153Transversely-excited film bulk acoustic resonator package and method
#154Filter using transversely-excited film bulk acoustic resonators with divided frequency-setting dielectric layers
#155Transversely-excited film bulk acoustic resonator with reduced spurious modes
#156Transversely-excited film bulk acoustic resonator and filter with a uniform-thickness dielectric overlayer
#157Method for packaging an electronic component in a package with an organic back end
#158TRANSVERSELY-EXCITED FILM BULK ACOUSTIC RESONATOR WITH ETCHED CONDUCTOR PATTERNS
#159Transversely-excited film bulk acoustic resonator with a cavity having a curved perimeter
#160TRANSVERSELY-EXCITED FILM BULK ACOUSTIC RESONATOR WITH ETCHED CONDUCTOR PATTERNS
#161METHOD FOR MANUFACTURING RESONATOR
#162Acoustic wave resonator
#163Acoustic wave resonator
#164Solidly-mounted transversely excited film bulk acoustic resonator using rotated Y-X cut lithium niobate
#165Transversely-excited film bulk acoustic resonator with etch-stop layer
#166Transversely-excited film bulk acoustic resonator with periodic etched holes
#167Filter using transversely-excited film bulk acoustic resonators with multiple frequency setting layers
#168Transversely-excited film bulk acoustic resonator
#169Front end module for 6.5 GHz Wi-Fi acoustic wave resonator RF filter circuit
#170Front end module for 5.5 GHz Wi-Fi acoustic wave resonator RF filter circuit
#171Film bulk acoustic resonator (FBAR) devices for high frequency RF filters
#172Rotation in XY plane to suppress spurious modes in XBAR devices
#173Thin-film bulk acoustic resonator and semiconductor apparatus comprising the same
#174Front end module for 5.2 GHz Wi-Fi acoustic wave resonator RF filter circuit
#175Methods of forming group III-nitride single crystal piezoelectric thin films using ordered deposition and stress neutral template layers
#176XBAR resonators with non-rectangular diaphragms
#177Acoustic resonator
#178Transversely excited film bulk acoustic resonator using rotated Y-X cut lithium niobate
#179Bulk-acoustic resonator module
#180Method and structure for single crystal acoustic resonator devices using thermal recrystallization
#181Methods of forming doped crystalline piezoelectric thin films via MOCVD and related doped crystalline piezoelectric thin films
#182Bandpass filter with frequency separation between shunt and series resonators set by dielectric layer thickness
#183Bulk-acoustic wave resonator and method for manufacturing the same
#184Method of manufacture for single crystal capacitor dielectric for a resonance circuit
#185Elastic wave device and method for manufacturing the same
#186Acoustic resonator and method of manufacturing the same
#187Bulk-acoustic wave resonator
#188Methods of forming group III piezoelectric thin films via sputtering
#189Acoustic resonator and acoustic resonator filter including the same
#190Acoustic wave device, high frequency front end circuit, communication apparatus, and manufacturing method for acoustic wave device
#191Transversely-excited film bulk acoustic resonator
#192Transversely-excited film bulk acoustic resonator
#193Method of forming an integrated resonator with a mass bias
#194Wafer scale packaging
#195Acoustic resonator package and method of fabricating the same
#196Bulk acoustic wave resonator and method of manufacturing the same
#1975G 3.5-3.6GHZ BAND ACOUSTIC WAVE RESONATOR RF FILTER CIRCUIT
#198Microelectronic devices having vertical piezoelectric membranes for integrated RF filters
#1995G n79 Wi-Fi acoustic triplexer circuit
#200Method for fabricating single crystal piezoelectric RF resonators and filters with improved cavity definition
#2015.5 GHz Wi-fi 5G coexistence acoustic wave resonator RF filter circuit
#202Communication filter for LTE band 41
#203Method of manufacturing integrated circuit configured with two or more single crystal acoustic resonator devices
#204Method of manufacture for single crystal acoustic resonator devices using micro-vias
#205Wireless communication infrastructure system configured with a single crystal piezo resonator and filter structure
#2065G band n79 acoustic wave resonator RF filter circuit
#207Bulk-acoustic wave resonator
#208Front end module for 5.2 GHz Wi-Fi acoustic wave resonator RF filter circuit
#209Front end module for 5.6 GHz Wi-Fi acoustic wave resonator RF filter circuit
#2105.2 GHz Wi-Fi coexistence acoustic wave resonator RF filter circuit
#211Techniques for integrating three-dimensional islands for radio frequency (RF) circuits
#212Acoustic resonator and method for manufacturing the same
#213Acoustic resonator and method for fabricating the same
#214Method and structure for single crystal acoustic resonator devices using thermal recrystallization
#215Film bulk acoustic resonator (FBAR) devices for high frequency RF filters
#2165.6 GHz Wi-Fi acoustic wave resonator RF filter circuit
#2175.2 GHz Wi-Fi acoustic wave resonator RF filter circuit
#218Single crystal piezoelectric RF resonators and filters
#219Acoustic wave resonator
#220Acoustic resonator and method of manufacturing the same
#221Acoustic resonator and method of manufacturing the same
#222Switchable filters and design structures
#223Bulk acoustic wave resonator
#224Acoustic wave resonator and method for manufacturing the same
#225Polarity patterned piezoelectric film
#226MEMBRANE SUBSTRATE STRUCTURE FOR SINGLE CRYSTAL ACOUSTIC RESONATOR DEVICE
#227Single crystal acoustic resonator and bulk acoustic wave filter
#228Bulk-acoustic wave resonator and method for manufacturing the same
#229Bulk acoustic filter device and method of manufacturing the same
#230Composite substrate, elastic wave device, and method for producing elastic wave device
#231Acoustic wave device and method of fabricating the same
#232Wafer scale packaging
#233Method of fabricating acoustic wave device
#234Switchable filters and design structures
#235Switchable filters and design structures
#236Elastic wave device and method for manufacturing the same
#237Resonator and related manufacturing method
#238Manufacturing of thin-film bulk acoustic resonator and semiconductor apparatus comprising the same
#239Piezoelectric device and method for manufacturing piezoelectric device
#240Acoustic resonator and method of manufacturing the same
#241Method for manufacturing piezoelectric device
#242Method for producing piezoelectric device
#243Method of manufacture for single crystal capacitor dielectric for a resonance circuit
#244Aluminum nitride piezoelectric thin film, piezoelectric material, piezoelectric component, and method for manufacturing aluminum nitride piezoelectric thin film
#245Elastic wave device and method for manufacturing the same
#246METHOD FOR FABRICATING FILM BULK ACOUSTIC RESONATOR FILTERS
#247Membrane substrate structure for single crystal acoustic resonator device
#248Wafer scale packaging
#249Single crystal acoustic resonator and bulk acoustic wave filter
#250Switchable filters and design structures
#251Method of fabricating acoustic resonator with planarization layer
#252Method of manufacturing elastic wave device
#253Method of manufacturing stacked thin film piezoelectric filter
#254Method for manufacturing piezoelectric device with a composite piezoelectric substrate
#255Method for manufacturing composite piezoelectric substrate
#256Piezoelectric device and method for producing piezoelectric device
#257Method for manufacturing piezoelectric device
#258Method of manufacturing switchable filters
#259Method of manufacturing a temperature-compensated micromechanical resonator
#260Piezoelectric thin-film resonator and method for manufacturing the same
#261Film bulk acoustic wave resonator-based high energy radiation detectors and methods using the same
#262Method for manufacturing piezoelectric element
#263Lateral over-moded bulk acoustic resonators
#264Method for manufacturing piezoelectric device
#265METHOD OF FABRICATING RESONATOR, RESONATOR, AND OSCILLATOR
#266Method for manufacturing composite piezoelectric substrate and piezoelectric device
#267Method of manufacturing stacked thin film piezoelectric filter
#268Film bulk acoustic resonator, filter, communication module and communication apparatus
#269Method for manufacturing piezoelectric device
#270Method for manufacturing piezoelectric device
#271Bulk acoustic wave resonator, filter and duplexer and methods of making same
#272Method of manufacturing a ladder filter
#273Method for manufacturing composite piezoelectric substrate
#274Film bulk acoustic resonator, filter, communication module and communication device
#275Resonant device, communication module, communication device, and method for manufacturing resonant device
#276Multi-channel filter assemblies
#277FILM BULK ACOUSTIC RESONATOR
#278Bulk acoustic device and method for fabricating
#279Piezoelectric thin film resonator, piezoelectric thin film resonator filter and manufacturing method thereof
#280Piezoelectric element, piezoelectric actuator, ink jet recording head, ink jet printer, surface acoustic wave element, frequency filter, oscillator, electronic circuit, thin film piezoelectric resonator, and electronic apparatus
#281Piezoelectric thin-film resonator and filter using the same
#282Ladder type filter
#283Piezoelectric thin film device and method for manufacturing the same
#284Piezoelectric thin film device and method for manufacturing the same
#285Method of forming pattern of inorganic material film comprising thermally induced cracking
#286Piezoelectric filter, antenna duplexer, and communications apparatus employing piezoelectric resonator
#287Thin film piezoelectric resonator, method of manufacturing the same, and filter including the same
#288Aluminum nitride thin film, composite film containing the same and piezoelectric thin film resonator using the same
#289Film bulk acoustic wave resonator, film bulk acoustic wave resonator filter and method of manufacturing film bulk acoustic wave resonator
#290Film bulk acoustic resonator and method for manufacturing the same
#291Bulk acoustic resonator including a resonance part with dimple and fabrication method therefor
#292Piezoelectric thin film resonator and devices provided with the same
#293Thin-film piezoelectric resonator, filter and voltage-controlled oscillator
#294Film bulk acoustic resonator and filter circuit including a plurality of film bulk acoustic resonators
#295Potassium niobate deposited body and method for manufacturing the same, piezoelectric thin film resonator, frequency filter, oscillator, electronic circuit, and electronic apparatus
#296Band filter using film bulk acoustic resonator and method of fabricating the same
#297Film bulk acoustic-wave resonator (FBAR), filter implemented by FBARs and method for manufacturing FBAR
#298Method for manufacturing resonator
#299Piezoelectric element, piezoelectric actuator, ink jet recording head, ink jet printer, surface acoustic wave element, frequency filter, oscillator, electronic circuit, thin film piezoelectric resonator and electronic apparatus
#300Thin film piezoelectric resonator and manufacturing process thereof