ClassID:

220392

H03H2003/025 - CPC Classification

Classification description:

Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezo-electric or electrostrictive resonators or networks the resonators or networks comprising an acoustic mirror

Recent Application in this class:
#1
20260142642
2026-05-21

BULK ACOUSTIC WAVE (BAW) RESONATOR INCLUDING BILATERAL DIELECTRIC LAYERS FOR IMPROVED QUALITY FACTOR AND METHOD OF MAKING

#2
20260135539
2026-05-14

METHOD OF MANUFACTURE FOR SINGLE CRYSTAL CAPACITOR DIELECTRIC FOR A RESONANCE CIRCUIT

#3
20260135538
2026-05-14

METHODS OF FORMING EPITAXIAL AlScN RESONATORS WITH SUPERLATTICE STRUCTURES INCLUDING AlGaN INTERLAYERS AND VARIED SCANDIUM CONCENTRATIONS FOR STRESS CONTROL AND RELATED STRUCTURES

#4
20260095140
2026-04-02

RESONATOR WITH SPUR MITIGATION DEVICE

#5
20260095139
2026-04-02

BULK ACOUSTIC WAVE DEVICE AND METHODS FOR FORMING THE SAME

#6
20260058640
2026-02-26

5.5 GHz Wi-Fi 5G COEXISTENCE ACOUSTIC WAVE RESONATOR RF FILTER CIRCUIT

#7
20260039275
2026-02-05

PIEZOELECTRIC FILM GROWTH WHILE REDUCING ELECTRICAL LOSSES FOR IMPROVED QUALITY FACTOR IN BAW FILTER

#8
20260031783
2026-01-29

PIEZOELECTRIC ELEMENT AND ELECTRONIC DEVICE

#9
20250364967
2025-11-27

METHOD OF MAKING A PIEZOELECTRIC DEVICE

#10
20250247074
2025-07-31

BULK ACOUSTIC WAVE RESONATOR, MANUFACTURING METHOD THEREOF AND ELECTRONIC DEVICE

#11
20250239991
2025-07-24

MULTI-PIEZO ACOUSTIC WAVE DEVICES

#12
20250219614
2025-07-03

BULK ACOUSTIC WAVE DEVICE INCLUDING PATTERNED ACOUSTIC MIRROR LAYERS TO REDUCE EFFECTIVE THICKNESS AND RELATED METHODS

#13
20250211188
2025-06-26

METHODS OF MANUFACTURING BULK ACOUSTIC WAVE DEVICE HAVING PIEZOELECTRIC LAYER WITH ENGINEERED REGION

#14
20250167747
2025-05-22

TRANSVERSELY-EXCITED FILM BULK ACOUSTIC RESONATORS WITH SOLIDLY MOUNTED RESONATOR (SMR) PEDESTALS

#15
20250150053
2025-05-08

SOLIDLY-MOUNTED TRANSVERSELY-EXCITED FILM BULK ACOUSTIC RESONATORS AND FILTERS

#16
20250105816
2025-03-27

SOLIDLY-MOUNTED TRANSVERSELY-EXCITED FILM BULK ACOUSTIC DEVICE

#17
20250081852
2025-03-06

METHOD FOR TRANSFERRING A PIEZOELECTRIC LAYER ONTO A SUPPORT SUBSTRATE

#18
20250080082
2025-03-06

BULK ACOUSTIC WAVE RESONATOR AND PREPARATION METHOD THEREOF

#19
20250055434
2025-02-13

METHODS OF FORMING PIEZOELECTRIC LAYERS HAVING ALTERNATING POLARIZATIONS

#20
20250023547
2025-01-16

BULK ACOUSTIC WAVE RESONATOR AND ELECTRONIC DEVICE

#21
20250023538
2025-01-16

BULK ACOUSTIC WAVE RESONATORS HAVING CONVEX SURFACES, AND METHODS OF FORMING THE SAME

#22
20250023537
2025-01-16

BULK ACOUSTIC WAVE RESONATOR, MANUFACTURING METHOD THEREOF AND ELECTRONIC DEVICE

#23
20250023535
2025-01-16

METHOD FOR FORMING AN ALUMINUM NITRIDE LAYER

#24
20240429892
2024-12-26

BULK ACOUSTIC RESONATOR AND RELATED DEVICE, AND METHOD FOR MANUFACTURING BULK ACOUSTIC RESONATOR

#25
20240388273
2024-11-21

ALUMINUM NITRIDE DOPANT SCHEME FOR BULK ACOUSTIC WAVE DEVICES

#26
20240348227
2024-10-17

PIEZOELECTRIC RESONATOR AND MANUFACTURING METHOD THEREOF

#27
20240339981
2024-10-10

ACOUSTIC DEVICES INCLUDING ACOUSTIC MIRRORS CO-OPTIMIZED FOR LONGITUDINAL AND SHEAR WAVE REFLECTION, AND RELATED METHOD OF FABRICATION

#28
20240305268
2024-09-12

SINGLE CRYSTAL FILM BULK ACOUSTIC WAVE RESONATOR, AND PREPARATION METHOD AND APPLICATION THEREOF

#29
20240235514
2024-07-11

BULK ACOUSTIC WAVE RESONATOR DEVICE AND METHOD OF MANUFACTURING THEREOF

#30
20240196753
2024-06-13

METHODS OF FORMING ACOUSTIC RESONATOR DEVICE WAFERS INTEGRATED WITH ELECTRONIC SEMICONDUCTOR SWITCHING DEVICE WAFERS USING A WAFER TRANSFER PROCESS AND RELATED STRUCTURES

#31
20240195377
2024-06-13

METHOD FOR MAKING A WITH BULK ACOUSTIC WAVE FILTER

#32
20240128942
2024-04-18

PIEZOELECTRIC TRANSDUCER PREPARATION METHOD AND PIEZOELECTRIC TRANSDUCER

#33
20240106408
2024-03-28

BULK ACOUSTIC WAVE (BAW) DEVICE WITH OPPOSITELY POLARIZED PIEZOELECTRIC LAYERS FOR HIGHER ORDER RESONANCE AND METHOD OF MANUFACTURE

#34
20240088860
2024-03-14

METHODS OF FORMING GROUP III-NITRIDE SINGLE CRYSTAL PIEZOELECTRIC THIN FILMS USING ORDERED DEPOSITION AND STRESS NEUTRAL TEMPLATE LAYERS

#35
20240039510
2024-02-01

ACOUSTIC WAVE DEVICES WITH RESONANCE-TUNED LAYER STACK AND METHOD OF MANUFACTURE

#36
20240039506
2024-02-01

Solidly-mounted transversely-excited film bulk acoustic resonator

#37
20230412145
2023-12-21

METHOD AND STRUCTURE FOR HIGH PERFORMANCE RESONANCE CIRCUIT WITH SINGLE CRYSTAL PIEZOELECTRIC CAPACITOR DIELECTRIC MATERIAL

#38
20230396229
2023-12-07

Bulk acoustic wave resonators having convex surfaces, and methods of forming the same

#39
20230336235
2023-10-19

Front end modules for Wi-Fi acoustic wave resonator RF filter circuits

#40
20230336139
2023-10-19

Acoustic wave resonator, RF filter circuit and system

#41
20230327649
2023-10-12

5.5 GHz Wi-Fi 5G COEXISTENCE ACOUSTIC WAVE RESONATOR RF FILTER CIRCUIT

#42
20230327628
2023-10-12

PIEZOELECTRIC ACOUSTIC RESONATOR WITH DIELECTRIC PROTECTIVE LAYER MANUFACTURED WITH PIEZOELECTRIC THIN FILM TRANSFER PROCESS

#43
20230327627
2023-10-12

Manufacturing process for bulk acoustic resonator, and bulk acoustic resonator

#44
20230291376
2023-09-14

Piezoelectric acoustic resonator manufactured with piezoelectric thin film transfer process

#45
20230257869
2023-08-17

SYSTEM FOR DEPOSITING PIEZOELECTRIC MATERIALS, METHODS FOR USING THE SAME, AND MATERIALS DEPOSITED WITH THE SAME

#46
20230253943
2023-08-10

PIEZOELECTRIC ACOUSTIC RESONATOR MANUFACTURED WITH PIEZOELECTRIC THIN FILM TRANSFER PROCESS

#47
20230231537
2023-07-20

Resonator and Manufacturing Method Thereof, Filter, and Electronic Device

#48
20230231527
2023-07-20

METHOD FOR MANUFACTURING ACOUSTIC RESONATOR IN LATERAL EXCITATION SHEAR MODE

#49
20230223926
2023-07-13

BULK ACOUSTIC WAVE RESONATORS WITH TUNABLE ELECTROMECHANICAL COUPLING

#50
20230163743
2023-05-25

RF acoustic wave resonators integrated with high electron mobility transistors including a shared piezoelectric/buffer layer

#51
20230114606
2023-04-13

WIRELESS COMMUNICATION INFRASTRUCTURE SYSTEM CONFIGURED WITH A SINGLE CRYSTAL PIEZO RESONATOR AND FILTER STRUCTURE USING THIN FILM TRANSFER PROCESS

#52
20230107728
2023-04-06

STACKED ACOUSTIC WAVE DEVICE ASSEMBLY

#53
20230105034
2023-04-06

ASSEMBLY WITH PIEZOELECTRIC LAYER WITH EMBEDDED INTERDIGITAL TRANSDUCER ELECTRODE

#54
20230103956
2023-04-06

STACKED SINGLE MIRROR ACOUSTIC WAVE DEVICE AND DOUBLE MIRROR ACOUSTIC WAVE DEVICE

#55
20230034164
2023-02-02

RF BAW RESONATOR FILTER ARCHITECTURE FOR 6.5GHZ WI-FI 6E COEXISTENCE AND OTHER ULTRA-WIDEBAND APPLICATIONS

#56
20230025951
2023-01-26

Method of manufacturing integrated circuit configured with two or more single crystal acoustic resonator devices

#57
20230023845
2023-01-26

METHOD OF MANUFACTURE FOR SINGLE CRYSTAL CAPACITOR DIELECTRIC FOR A RESONANCE CIRCUIT

#58
20230006635
2023-01-05

ACOUSTIC RESONATOR

#59
20230006631
2023-01-05

Acoustic wave resonator, RF filter circuit and system

#60
20220416756
2022-12-29

METHODS OF FORMING EPITAXIAL AlScN RESONATORS WITH SUPERLATTICE STRUCTURES INCLUDING AlGaN INTERLAYERS AND VARIED SCANDIUM CONCENTRATIONS FOR STRESS CONTROL AND RELATED STRUCTURES

#61
20220385275
2022-12-01

Acoustic wave resonator RF filter circuit and system

#62
20220385274
2022-12-01

Acoustic wave resonator RF filter circuit and system

#63
20220376673
2022-11-24

BAW RESONATOR ARRANGEMENT WITH RESONATORS HAVING DIFFERENT RESONANCE FREQUENCIES AND MANUFACTURING METHOD

#64
20220376669
2022-11-24

Solidly-mounted transversely-excited film bulk acoustic device and method

#65
20220352866
2022-11-03

RF BAW RESONATOR FILTER ARCHITECTURE FOR 6.5GHZ WI-FI 6E COEXISTENCE AND OTHER ULTRA-WIDEBAND APPLICATIONS

#66
20220352863
2022-11-03

Piezoelectric acoustic resonator manufactured with piezoelectric thin film transfer process

#67
20220345110
2022-10-27

5.5 GHz Wi-Fi 5G coexistence acoustic wave resonator RF filter circuit

#68
20220321087
2022-10-06

Transversely-excited film bulk acoustic resonators with solidly mounted resonator (SMR) pedestals

#69
20220321082
2022-10-06

Transversely-excited film bulk acoustic resonators with solidly mounted resonator (SMR) pedestals

#70
20220311502
2022-09-29

Front end module for 6.1 GHz wi-fi acoustic wave resonator RF filter circuit

#71
20220263484
2022-08-18

PIEZOELECTRIC ACOUSTIC RESONATOR WITH IMPROVED TCF MANUFACTURED WITH PIEZOELECTRIC THIN FILM TRANSFER PROCESS

#72
20220231665
2022-07-21

5 and 6 GHz Wi-Fi coexistence acoustic wave resonator RF diplexer circuit

#73
20220209742
2022-06-30

Method and structure for high performance resonance circuit with single crystal piezoelectric capacitor dielectric material

#74
20220182034
2022-06-09

DOPED CRYSTALLINE PIEZOELECTRIC RESONATOR FILMS AND METHODS OF FORMING DOPED SINGLE CRYSTALLINE PIEZOELECTRIC RESONATOR LAYERS ON SUBSTRATES VIA EPITAXY

#75
20220166398
2022-05-26

Method of fabricating layers of single-crystal material

#76
20220158608
2022-05-19

Solidly-mounted transversely-excited film bulk acoustic resonator with diamond layers in Bragg reflector stack

#77
20220131523
2022-04-28

Electroacoustic device with conductive acoustic mirrors

#78
20220123724
2022-04-21

ELECTRO ACOUSTIC COMPONENT, RF FILTER AND METHOD OF MANUFACTURING

#79
20220123715
2022-04-21

BULK ACOUSTIC WAVE DEVICE WITH INTEGRATED TEMPERATURE SENSOR AND HEATER

#80
20220116010
2022-04-14

Solidly-mounted transversely-excited film bulk acoustic resonators and filters for 27 GHz communications bands

#81
20220103239
2022-03-31

Front end modules for 5.6 GHz and 6.6 GHz Wi-Fi acoustic wave resonator RF filter circuits

#82
20220094322
2022-03-24

ELECTRO-ACOUSTIC RESONATOR AND METHOD FOR MANUFACTURING THE SAME

#83
20220060170
2022-02-24

Solidly-mounted transversely-excited film bulk acoustic device

#84
20220052665
2022-02-17

RF BAW resonator filter architecture for 6.5GHz Wi-Fi 6E coexistence and other ultra-wideband applications

#85
20210351761
2021-11-11

Acoustic wave device and forming method thereof

#86
20210336603
2021-10-28

Formation method of filter device

#87
20210328568
2021-10-21

Solidly-mounted transversely-excited film bulk acoustic resonator

#88
20210297059
2021-09-23

Baw resonator with improved top electrode connection

#89
20210288627
2021-09-16

POLARITY PATTERNED PIEZOELECTRIC FILM

#90
20210273625
2021-09-02

Aluminum nitride dopant scheme for bulk acoustic wave filters

#91
20210257987
2021-08-19

Digitally tunable acoustic wave resonators

#92
20210242849
2021-08-05

METHOD FOR MANUFACTURING AN ELECTRO-ACOUSTIC RESONATOR AND ELECTRO-ACOUSTIC RESONATOR DEVICE

#93
20210234525
2021-07-29

Piezoelectric acoustic resonator with dielectric protective layer manufactured with piezoelectric thin film transfer process

#94
20210203402
2021-07-01

Front end module for 6.1 GHz Wi-Fi acoustic wave resonator RF filter circuit

#95
20210184642
2021-06-17

PIEZOELECTRIC ACOUSTIC RESONATOR MANUFACTURED WITH PIEZOELECTRIC THIN FILM TRANSFER PROCESS

#96
20210091742
2021-03-25

Method for the production of a bulk acoustic wave resonator with a reduced parasitic capacitance

#97
20210067123
2021-03-04

RF acoustic wave resonators integrated with high electron mobility transistors including a shared piezoelectric/buffer layer and methods of forming the same

#98
20210058050
2021-02-25

Bulk acoustic wave resonator device and method of manufacturing thereof

#99
20210050839
2021-02-18

Bulk acoustic wave resonator and manufacturing method therefor

#100
20210020826
2021-01-21

Method for transferring a piezoelectric layer onto a support substrate

#101
20210006220
2021-01-07

Method for forming an aluminum nitride layer

#102
20200412331
2020-12-31

Resonator and method for manufacturing the same

#103
20200382091
2020-12-03

Bulk acoustic wave resonators having convex surfaces, and methods of forming the same

#104
20200313751
2020-10-01

Front end module for 6.5 GHz Wi-Fi acoustic wave resonator RF filter circuit

#105
20200313750
2020-10-01

Front end module for 5.5 GHz Wi-Fi acoustic wave resonator RF filter circuit

#106
20200313639
2020-10-01

Piezoelectric acoustic resonator manufactured with piezoelectric thin film transfer process

#107
20200304091
2020-09-24

Solidly-mounted transversely-excited film bulk acoustic resonator with diamond layers in Bragg reflector stack

#108
20200304087
2020-09-24

Piezoelectric acoustic resonator with improved TCF manufactured with piezoelectric thin film transfer process

#109
20200287511
2020-09-10

Process for producing a micro-electro-mechanical system from a transferred piezoelectric or ferroelectric layer

#110
20200274607
2020-08-27

Front end module for 5.2 GHz Wi-Fi acoustic wave resonator RF filter circuit

#111
20200259070
2020-08-13

Methods of forming group III-nitride single crystal piezoelectric thin films using ordered deposition and stress neutral template layers

#112
20200228096
2020-07-16

5.5 GHz Wi-Fi 5G coexistence acoustic wave resonator RF filter circuit

#113
20200220514
2020-07-09

Piezoelectric acoustic resonator manufactured with piezoelectric thin film transfer process

#114
20200220513
2020-07-09

WIRELESS COMMUNICATION INFRASTRUCTURE SYSTEM CONFIGURED WITH A SINGLE CRYSTAL PIEZO RESONATOR AND FILTER STRUCTURE USING THIN FILM TRANSFER PROCESS

#115
20200212880
2020-07-02

Highly dispersive bulk acoustic wave resonators

#116
20200169241
2020-05-28

Solidly-mounted transversely-excited film bulk acoustic resonator

#117
20200091406
2020-03-19

Method of manufacture for single crystal capacitor dielectric for a resonance circuit

#118
20190386641
2019-12-19

Acoustic resonator and acoustic resonator filter including the same

#119
20190386637
2019-12-19

Solidly-mounted transversely-excited film bulk acoustic resonator

#120
20190372549
2019-12-05

5.5 GHz Wi-Fi coexistence acoustic wave resonator RF filter circuit

#121
20190372547
2019-12-05

Acoustic wave device, high frequency front-end circuit, and communication device

#122
20190363694
2019-11-28

Bulk acoustic wave (BAW) and passive-on-glass (POG) filter co-integration

#123
20190348966
2019-11-14

Acoustic wave filter formed on a V-groove topography and method for producing the same

#124
20190341907
2019-11-07

Bulk acoustic wave sensor having an overmoded resonating structure

#125
20190333965
2019-10-31

GaN stack acoustic reflector and method for producing the same

#126
20190319602
2019-10-17

BAW structure having multiple BAW transducers over a common reflector, which has reflector layers of varying thicknesses

#127
20190305753
2019-10-03

Method and structure for high performance resonance circuit with single crystal piezoelectric capacitor dielectric material

#128
20190288658
2019-09-19

Piezoelectric acoustic resonator manufactured with piezoelectric thin film transfer process

#129
20190253038
2019-08-15

5G n79 Wi-Fi acoustic triplexer circuit

#130
20190199316
2019-06-27

5.5 GHz Wi-fi 5G coexistence acoustic wave resonator RF filter circuit

#131
20190199312
2019-06-27

Single-flipped resonator devices with 2DEG bottom electrode

#132
20190190488
2019-06-20

Film bulk acoustic resonator (FBAR) devices for high frequency RF filters

#133
20190165763
2019-05-30

Elastic wave device, high-frequency front-end circuit, and communication apparatus

#134
20190158058
2019-05-23

Method of manufacturing integrated circuit configured with two or more single crystal acoustic resonator devices

#135
20190149129
2019-05-16

Acoustic wave device and method of fabricating the same, filter, and multiplexer

#136
20190081611
2019-03-14

Wireless communication infrastructure system configured with a single crystal piezo resonator and filter structure

#137
20190068164
2019-02-28

5G band n79 acoustic wave resonator RF filter circuit

#138
20190036592
2019-01-31

Front end module for 5.2 GHz Wi-Fi acoustic wave resonator RF filter circuit

#139
20190028081
2019-01-24

Layer structures for RF filters fabricated using rare earth oxides and epitaxial aluminum nitride

#140
20190020328
2019-01-17

Front end module for 5.6 GHz Wi-Fi acoustic wave resonator RF filter circuit

#141
20190007021
2019-01-03

Piezoelectric thin film resonator and fabrication method of the same, filter, and multiplexer

#142
20190007020
2019-01-03

Bulk acoustic wave resonators having convex surfaces, and methods of forming the same

#143
20180375489
2018-12-27

Aluminum nitride film, acoustic wave device, filter, and multiplexer

#144
20180309425
2018-10-25

5.6 GHz Wi-Fi acoustic wave resonator RF filter circuit

#145
20180309422
2018-10-25

5.2 GHz Wi-Fi acoustic wave resonator RF filter circuit

#146
20180294794
2018-10-11

Piezoelectric thin film resonator, filter, and multiplexer

#147
20180294790
2018-10-11

Method for fabricating resonator structure and resonator structure

#148
20180277739
2018-09-27

Spurious mode suppression in bulk acoustic wave resonator

#149
20180226939
2018-08-09

Method for manufacturing piezoelectric thin-film element

#150
20180205362
2018-07-19

Elastic wave device

#151
20180205361
2018-07-19

Elastic wave device

#152
20180175821
2018-06-21

Polarity patterned piezoelectric film

#153
20180152171
2018-05-31

Elastic wave device

#154
20180054176
2018-02-22

Piezoelectric acoustic resonator manufactured with piezoelectric thin film transfer process

#155
20170370791
2017-12-28

Method of fabricating acoustic wave device

#156
20170366163
2017-12-21

Elastic wave device and method for manufacturing the same

#157
20170366160
2017-12-21

Elastic wave device and manufacturing method therefor

#158
20170179925
2017-06-22

Piezoelectric device and method for manufacturing piezoelectric device

#159
20170170801
2017-06-15

Bulk acoustic wave resonator with a modified outside stack portion

#160
20170141750
2017-05-18

Layer structures for RF filters fabricated using rare earth oxides and epitaxial aluminum nitride

#161
20170077386
2017-03-16

Method of manufacture for single crystal capacitor dielectric for a resonance circuit

#162
20170063325
2017-03-02

Devices with specific termination angles in titanium tungsten layers and methods for fabricating the same

#163
20160300693
2016-10-13

Sloped termination in molybdenum layers and method of fabricating

#164
20150295556
2015-10-15

Temperature compensated bulk acoustic wave resonator with a high coupling coefficient

#165
20150280679
2015-10-01

Method of fabricating acoustic resonator with planarization layer

#166
20150094000
2015-04-02

Temperature compensated bulk acoustic wave devices using over-moded acoustic reflector layers

#167
20150033520
2015-02-05

Piezoelectric film transfer for acoustic resonators and filters

#168
20150017320
2015-01-15

Method of manufacturing stacked thin film piezoelectric filter

#169
20140184358
2014-07-03

BAW-filter operating using bulk acoustic waves and passive components forming a balun

#170
20140130319
2014-05-15

Method for manufacturing piezoelectric device

#171
20140125432
2014-05-08

Selective tuning of acoustic devices

#172
20140117815
2014-05-01

TEMPERATURE COMPENSATED RESONATOR DEVICE HAVING LOW TRIM SENSITIVY AND METHOD OF FABRICATING THE SAME

#173
20130127300
2013-05-23

Piezoelectric thin-film resonator and method for producing piezoelectric thin film

#174
20130033151
2013-02-07

Piezoelectric thin-film resonator and method for manufacturing the same

#175
20120231218
2012-09-13

SUBSTRATE, MANUFACTURING METHOD OF SUBSTRATE, SAW DEVICE AND DEVICE

#176
20120096697
2012-04-26

Method of forming acoustic resonator using intervening seed layer

#177
20110131774
2011-06-09

Method of manufacturing stacked thin film piezoelectric filter

#178
20110089786
2011-04-21

Arrangement of a piezoacoustic resonator on an acoustic mirror of a substrate, method for producing the arrangement and use of the arrangement

#179
20110080232
2011-04-07

Bragg mirror and BAW resonator with a high quality factor on the bragg mirror

#180
20100231329
2010-09-16

BAW structure with reduced topographic steps and related method

#181
20100146755
2010-06-17

Method of manufacturing an acoustic mirror for a piezoelectric resonator

#182
20100134210
2010-06-03

Piezoelectric Resonator and Piezoelectric Filter Device

#183
20100123948
2010-05-20

Bragg mirror and method for making same

#184
20100107400
2010-05-06

Method of manufacturing an acoustic mirror

#185
20100005654
2010-01-14

Planarization method in the fabrication of a circuit

#186
20100001814
2010-01-07

THIN FILM ACOUSTIC REFLECTOR STACK

#187
20090133237
2009-05-28

PIEZOELECTRIC DEVICE AND METHOD OF MANUFACTURING PIEZOELECTRIC RESONATORS

#188
20090102319
2009-04-23

Acoustic resonator and filter

#189
20090053401
2009-02-26

Piezoelectric deposition for BAW resonators

#190
20090045704
2009-02-19

Method for forming a multi-layer electrode underlying a piezoelectric layer and related structure

#191
20080204857
2008-08-28

Bragg mirror optimized for shear waves

#192
20080169728
2008-07-17

Piezoelectric thin film resonator, piezoelectric thin film resonator filter and manufacturing method thereof

#193
20080129412
2008-06-05

Acoustic wave filter and manufacturing method of the same

#194
20080074005
2008-03-27

Piezoelectric thin film device and method for manufacturing the same

#195
20080072408
2008-03-27

Piezoelectric thin film device and method for manufacturing the same

#196
20070285191
2007-12-13

Piezoelectric resonator with an efficient all-dielectric Bragg reflector

#197
20070279155
2007-12-06

Film bulk acoustic resonator, filter, and fabrication method thereof

#198
20070266548
2007-11-22

Method of manufacturing an acoustic mirror

#199
20070199185
2007-08-30

Method of manufacturing an acoustic mirror for piezoelectric resonator

#200
20070046157
2007-03-01

Piezoelectric device and method of manufacturing piezoelectric resonators

#201
20060267711
2006-11-30

Thin-film piezoelectric resonator, filter and voltage-controlled oscillator

#202
20050255234
2005-11-17

Method for manufacturing resonator

#203
20050184627
2005-08-25

Piezoelectric thin film device and method for manufacturing the same

#204
20050167854
2005-08-04

Encapsulated electronics device with improved heat dissipation

#205
20050134406
2005-06-23

Piezoelectric thin film resonator and method for manufacturing the same