Patents-Review.com
ClassID:

220394 ⎘

H03H2003/027 - CPC Classification

Classification description:

Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezo-electric or electrostrictive resonators or networks the resonators or networks being of the microelectro-mechanical [MEMS] type

Recent Application in this class:
#1
20260142643
2026-05-21

WAFER-LEVEL-PACKAGED SILICON-PIEZOELECTRIC RESONATOR

 #2
20260135539
2026-05-14

METHOD OF MANUFACTURE FOR SINGLE CRYSTAL CAPACITOR DIELECTRIC FOR A RESONANCE CIRCUIT

 #3
20260090275
2026-03-26

THERMAL ANNEALING OF PIEZOELECTRIC MICROELECTROMECHANICAL SYSTEMS (MEMS) STACKS

 #4
20260005665
2026-01-01

ELASTIC WAVE DEVICE AND METHOD FOR MANUFACTURING THE SAME

 #5
20250317117
2025-10-09

SELF-REFERENCING MICROELECTROMECHANICAL SYSTEMS (MEMS) RESONATOR WITH DUAL MECHANICAL MODES FOR TEMPERATURE-INDEPENDENT ENVIRONMENTAL SENSING

 #6
20250253826
2025-08-07

SEALED-CAVITY BULK ACOUSTIC-WAVE RESONATOR AND METHOD FOR MANUFACTURING

 #7
20250239989
2025-07-24

Microelectromechanical resonator

 #8
20250239984
2025-07-24

Piezo-actuated MEMS

 #9
20250007492
2025-01-02

Microelectromechanical resonator

 #10
20240297630
2024-09-05

ION IRRADIATION OF MICROELECTROMECHANICAL RESONATORS

 #11
20240223151
2024-07-04

Piezo-actuated MEMS resonator with reduced nonlinear tcf

 #12
20240154599
2024-05-09

PIEZOELECTRIC MICROELECTROMECHANICAL RESONATOR DEVICE AND CORRESPONDING MANUFACTURING PROCESS

 #13
20240088863
2024-03-14

ELASTIC WAVE DEVICE AND METHOD FOR MANUFACTURING THE SAME

 #14
20230387877
2023-11-30

Integrated Acoustic Devices

 #15
20230336149
2023-10-19

MEMS DEVICE AND FABRICATION METHOD THEREOF

 #16
20230134688
2023-05-04

PLATE WAVE DEVICES WITH WAVE CONFINEMENT STRUCTURES AND FABRICATION METHODS

 #17
20230116933
2023-04-20

Piezoelectric MEMS resonators based on porous silicon technologies

 #18
20230103757
2023-04-06

RESONATOR AND METHOD OF MANUFACTURING THE RESONATOR, AND STRAIN SENSOR AND SENSOR ARRAY INCLUDING THE RESONATOR

 #19
20230085815
2023-03-23

Non-linear tethers for suspended devices

 #20
20230037734
2023-02-09

Elastic wave device and method for manufacturing the same

 #21
20230025951
2023-01-26

Method of manufacturing integrated circuit configured with two or more single crystal acoustic resonator devices

 #22
20230023845
2023-01-26

METHOD OF MANUFACTURE FOR SINGLE CRYSTAL CAPACITOR DIELECTRIC FOR A RESONANCE CIRCUIT

 #23
20220385262
2022-12-01

Acoustic resonator device with controlled placement of functionalization material

 #24
20220337218
2022-10-20

Microelectromechanical resonator

 #25
20220231652
2022-07-21

Method for manufacturing a piezoelectric resonator

 #26
20220166403
2022-05-26

Microelectromechanical resonator

 #27
20210409000
2021-12-30

Piezoelectric MEMS resonators based on porous silicon technologies

 #28
20210328566
2021-10-21

Method of manufacturing quartz crystal element

 #29
20210297097
2021-09-23

Multiplexer

 #30
20210218366
2021-07-15

Super-regenerative transceiver with improved frequency discrimination

 #31
20210159875
2021-05-27

Piezo-actuated MEMS resonator

 #32
20210135648
2021-05-06

Non-linear tethers for suspended devices

 #33
20210099154
2021-04-01

Piezoelectric microelectromechanical resonator device and corresponding manufacturing process

 #34
20210098319
2021-04-01

Device on ceramic substrate

 #35
20200403572
2020-12-24

Frequency-converting super-regenerative transceiver

 #36
20200274514
2020-08-27

Buk acoustic wave resonator with guard rings having recessed space from electrode edge and periodic designs

 #37
20200266790
2020-08-20

Thin-film bulk acoustic resonator and semiconductor apparatus comprising the same

 #38
20200259479
2020-08-13

Fin bulk acoustic resonator technology for UHF and SHF signal processing

 #39
20200212873
2020-07-02

Spurious-mode-free, laterally-vibrating microelectromechanical system resonators

 #40
20200091406
2020-03-19

Method of manufacture for single crystal capacitor dielectric for a resonance circuit

 #41
20200083859
2020-03-12

Elastic wave device and method for manufacturing the same

 #42
20200067484
2020-02-27

Vibrator device, manufacturing method of vibrator device, electronic device, and vehicle

 #43
20200028485
2020-01-23

Microelectromechanical resonator

 #44
20190386627
2019-12-19

Method of forming an integrated resonator with a mass bias

 #45
20190379416
2019-12-12

Super-regenerative transceiver with improved frequency discrimination

 #46
20190379345
2019-12-12

Plate wave devices with wave confinement structures and fabrication methods

 #47
20190372543
2019-12-05

Acoustic filter with packaging-defined boundary conditions and method for producing the same

 #48
20190341904
2019-11-07

Multi-frequency guided wave devices and fabrication methods

 #49
20190305749
2019-10-03

Piezoelectric single crystal silicon carbide microelectromechanical resonators

 #50
20190305744
2019-10-03

Method of fabricating a SiC resonator

 #51
20190296713
2019-09-26

Guided wave devices with selectively loaded piezoelectric layers

 #52
20190260342
2019-08-22

Microelectronic devices having vertical piezoelectric membranes for integrated RF filters

 #53
20190245509
2019-08-08

Method for fabricating single crystal piezoelectric RF resonators and filters with improved cavity definition

 #54
20190207557
2019-07-04

Frequency-converting super-regenerative transceiver

 #55
20190199316
2019-06-27

5.5 GHz Wi-fi 5G coexistence acoustic wave resonator RF filter circuit

 #56
20190158058
2019-05-23

Method of manufacturing integrated circuit configured with two or more single crystal acoustic resonator devices

 #57
20190089321
2019-03-21

Resonance device manufacturing method

 #58
20190007026
2019-01-03

Gallium nitride structure, piezoelectric element, method of manufacturing piezoelectric element, and resonator using piezoelectric element

 #59
20180358948
2018-12-13

Spurious-mode-free, laterally-vibrating microelectromechanical system resonators

 #60
20180254761
2018-09-06

Switchable filters and design structures

 #61
20180226942
2018-08-09

Piezo-actuated MEMS resonator with surface electrodes

 #62
20180198185
2018-07-12

NONUNIFORM CORRUGATED DIAPHRAGM FOR MEMS TUNERS AND ACTUATORS

 #63
20180159501
2018-06-07

Electronic component and method of manufacturing the same

 #64
20180097499
2018-04-05

Nano- and microelectromechanical resonators

 #65
20180053679
2018-02-22

Composite substrate, elastic wave device, and method for producing elastic wave device

 #66
20180048280
2018-02-15

Acoustic resonator device with controlled placement of functionalization material

 #67
20180034438
2018-02-01

Acoustic resonator devices and methods with noble metal layer for functionalization

 #68
20180019724
2018-01-18

Temperature-engineered MEMS resonator

 #69
20170370791
2017-12-28

Method of fabricating acoustic wave device

 #70
20170366154
2017-12-21

Switchable filters and design structures

 #71
20170366153
2017-12-21

Switchable filters and design structures

 #72
20170331450
2017-11-16

Nano- and micro-electromechanical resonators

 #73
20170331449
2017-11-16

Elastic wave device and method for manufacturing the same

 #74
20170294894
2017-10-12

Piezoelectric thin film and piezoelectric vibrator

 #75
20170294892
2017-10-12

Fluidic sensor device having UV-blocking cover

 #76
20170264263
2017-09-14

Manufacturing of thin-film bulk acoustic resonator and semiconductor apparatus comprising the same

 #77
20170264257
2017-09-14

Method for producing a batch of acoustic wave filters

 #78
20170214385
2017-07-27

Guided wave devices with selectively loaded piezoelectric layers

 #79
20170214384
2017-07-27

Guided wave devices with sensors utilizing embedded electrodes

 #80
20170214383
2017-07-27

Mixed domain guided wave devices utilizing embedded electrodes

 #81
20170214382
2017-07-27

Guided wave devices with embedded electrodes and non-embedded electrodes

 #82
20170214381
2017-07-27

Guided wave devices with selectively thinned piezoelectric layers

 #83
20170187347
2017-06-29

Piezoelectric MEMS resonator with integrated phase change material switches

 #84
20170170803
2017-06-15

Nano- and microelectromechanical resonators

 #85
20170163240
2017-06-08

Nano- and micro-electromechanical resonators

 #86
20170134002
2017-05-11

BAW sensor with enhanced surface area active region

 #87
20170134001
2017-05-11

Acoustic resonator devices and fabrication methods providing hermeticity and surface functionalization

 #88
20170093361
2017-03-30

Microelectromechanical resonator

 #89
20170077386
2017-03-16

Method of manufacture for single crystal capacitor dielectric for a resonance circuit

 #90
20170054432
2017-02-23

Single crystal micromechanical resonator

 #91
20160336922
2016-11-17

Nonuniform corrugated diaphragm for MEMS tuners and actuators

 #92
20160329876
2016-11-10

Elastic wave device and method for manufacturing the same

 #93
20160322953
2016-11-03

Piezoelectric vibrator and piezoelectric vibrating apparatus

 #94
20160204334
2016-07-14

Vibration element manufacturing method, vibration element, electronic device, electronic apparatus, and moving object

 #95
20160197597
2016-07-07

Vibration device and manufacturing method of the same

 #96
20160182009
2016-06-23

Plate wave devices with wave confinement structures and fabrication methods

 #97
20160182008
2016-06-23

Multi-frequency guided wave devices and fabrication methods

 #98
20160182007
2016-06-23

Plate wave devices with wave confinement structures and fabrication methods

 #99
20160107880
2016-04-21

Substrate for diaphragm-type resonant MEMS devices, diaphragm-type resonant MEMS device and method for manufacturing same

 #100
20160094199
2016-03-31

Resonant circuit with variable frequency and impedance

 #101
20160065169
2016-03-03

Nano- and micro-electromechanical resonators

 #102
20160028374
2016-01-28

Apparatus and method for tuning a resonance frequency

 #103
20150372660
2015-12-24

Switchable filters and design structures

 #104
20150344293
2015-12-03

Integrated semiconductor devices with single crystalline beam, methods of manufacture and design structure

 #105
20150301502
2015-10-22

Resonator with reduced sensitivity to climatic variations

 #106
20150256143
2015-09-10

Resonator with a staggered electrode configuration

 #107
20150033521
2015-02-05

Method of manufacturing elastic wave device

 #108
20140313866
2014-10-23

Ceramic temperature-compensated resonator

 #109
20140290019
2014-10-02

METHOD FOR FABRICATING VIBRATOR

 #110
20140173862
2014-06-26

Method for manufacturing composite piezoelectric substrate

 #111
20140008741
2014-01-09

Integrated semiconductor devices with single crystalline beam, methods of manufacture and design structure

 #112
20130334929
2013-12-19

Resonator electrodes and related methods and apparatus

 #113
20130214877
2013-08-22

Method of manufacturing switchable filters

 #114
20130122627
2013-05-16

Integrated semiconductor devices with single crystalline beam, methods of manufacture and design structure

 #115
20130119491
2013-05-16

Integrated semiconductor devices with amorphous silicon beam, methods of manufacture and design structure

 #116
20130119490
2013-05-16

Methods of manufacturing integrated semiconductor devices with single crystalline beam

 #117
20120229226
2012-09-13

Micromechanical Resonator

 #118
20120117769
2012-05-17

Method for manufacturing piezoelectric element

 #119
20120079692
2012-04-05

Manufacturing method of an array of BAW resonators with mask controlled resonant frequencies

 #120
20120073099
2012-03-29

Method for manufacturing piezoelectric device

 #121
20120050236
2012-03-01

Electromechanical systems piezoelectric contour mode differential resonators and filters

 #122
20110305120
2011-12-15

First and second orders temperature-compensated resonator

 #123
20110133856
2011-06-09

Contour-mode piezoelectric micromechanical resonators

 #124
20100277034
2010-11-04

ARRAY OF BAW RESONATORS WITH MASK CONTROLLED RESONANT FREQUENCIES

 #125
20100088868
2010-04-15

Method for manufacturing composite piezoelectric substrate

 #126
20100066467
2010-03-18

Lithographically defined multi-standard multi-frequency high-Q tunable micromechanical resonators

 #127
20100064492
2010-03-18

LAMB WAVE TYPE FREQUENCY DEVICE AND METHOD THEREOF

 #128
20090307884
2009-12-17

Resonator system with a plurality of individual mechanically coupled resonators and method of making same

 #129
20090144963
2009-06-11

Contour-mode piezoelectric micromechanical resonators

 #130
20090108959
2009-04-30

Contour-Mode Piezoelectric Micromechanical Resonators

 #131
20080246559
2008-10-09

Lithographically-defined multi-standard multi-frequency high-Q tunable micromechanical resonators

 #132
20070240294
2007-10-18

MEMS piezoelectric longitudinal mode resonator

 #133
20070188047
2007-08-16

Lamb wave type frequency device and method thereof

 #134
20060290449
2006-12-28

Contour-mode piezoelectric micromechanical resonators

 #135
20060273867
2006-12-07

Contour-mode piezoelectric micromechanical resonators

 #136
20060098059
2006-05-11

Semiconductor device having actuator

 #137
20050224900
2005-10-13

Electro mechanical device having a sealed cavity

 #138
20050140467
2005-06-30

Resonator system with a plurality of individual mechanically coupled resonators and method of making same

 #139
20050101139
2005-05-12

System and method for producing a reduced substrate micro-electro-mechanical systems (MEMS) device

 #140
17491245
2025-09-02

Method for producing transmon qubit and lithium niobate resonator on the same substrate

 #141
15265340
2018-12-04

Trimming method for microresonators and microresonators made thereby

 #142
15149026
2018-11-27

High Q quartz-based MEMS resonators and method of fabricating same

 #143
14680902
2018-06-05

Rounded and curved integrated tethers for quartz resonators

 #144
14288236
2016-12-20

Single crystal micromechanical resonator and fabrication methods thereof