ClassID:

220558

H03H2009/0233 - CPC Classification

Classification description:

Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators; Details of microelectro-mechanical resonators; Vibrating means comprising perforations

Recent Application in this class:
#1
20200220520
2020-07-09

Film bulk acoustic resonator with spurious resonance suppression

#2
20190227034
2019-07-25

Thermal-piezoresistive oscillator-based aerosol sensor and aerosol sensing method

#3
20180248533
2018-08-30

Frequency compensated oscillator design for process tolerances

#4
20180248532
2018-08-30

Frequency compensated oscillator design for process tolerances

#5
20170201234
2017-07-13

Filter chip and method for producing a filter chip

#6
20160126926
2016-05-05

Method of forming a resonator

#7
20160118955
2016-04-28

Multiple coil spring MEMS resonator

#8
20160118954
2016-04-28

Compound spring MEMS resonators for frequency and timing generation

#9
20150263699
2015-09-17

Frequency compensated oscillator design for process tolerances

#10
20150263695
2015-09-17

Frequency compensated oscillator design for process tolerances

#11
20140266484
2014-09-18

Microelectromechanical resonators

#12
20140184347
2014-07-03

Microelectronic machine-based ariable

#13
20130285676
2013-10-31

Micromechanical resonators

#14
20120329255
2012-12-27

Out-of plane MEMS resonator with static out-of-plane deflection

#15
20120295384
2012-11-22

Method of manufacturing a microelectromechanical system (MEMS) resonator

#16
20120280758
2012-11-08

Bulk acoustic wave resonator and method of manufacturing thereof

#17
20110309891
2011-12-22

Micro-electromechanical resonator geometry

#18
20110260810
2011-10-27

Out-of-plane MEMS resonator with static out-of-plane deflection

#19
20110199167
2011-08-18

MEMS resonator array structure and method of operating and using same

#20
20110133855
2011-06-09

Resonator, elastic wave transmission element and fabrication method thereof

#21
20110133848
2011-06-09

Oscillator having micro-electromechanical resonators and driver circuits therein that support in-phase and out-of-phase signals

#22
20110018655
2011-01-27

MEMS resonator structure including regions with different densities and method

#23
20100194241
2010-08-05

Thin-film bulk acoustic resonators having perforated bodies that provide reduced susceptibility to process-induced lateral dimension variations

#24
20100060111
2010-03-11

Thin-film piezoelectric-on-insulator resonators having perforated resonator bodies therein

#25
20090158566
2009-06-25

Method for fabricating a microelectromechanical system (MEMS) resonator

#26
20090153267
2009-06-18

MEMS resonator structure and method

#27
20090153258
2009-06-18

MEMS resonator array structure and method of operating and using same

#28
20070096850
2007-05-03

Method and apparatus for frequency tuning of a micro-mechanical resonator

#29
20060006964
2006-01-12

Method for frequency tuning of a micro-mechanical resonator

#30
20050195049
2005-09-08

Method and apparatus for frequency tuning of a micro-mechanical resonator

#31
20050073078
2005-04-07

Frequency compensated oscillator design for process tolerances

#32
18449089
2025-05-13

Techniques for adding compensating material(s) in semiconductor devices

#33
17901748
2023-09-19

Temperature stable MEMS resonator

#34
17363386
2022-10-11

Temperature stable MEMS resonator

#35
15916088
2020-01-21

Temperature stable MEMS resonator

#36
15387375
2018-04-17

Temperature stable MEMS resonator