220558 ⎘
Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators; Details of microelectro-mechanical resonators; Vibrating means comprising perforations
Film bulk acoustic resonator with spurious resonance suppression
#2Thermal-piezoresistive oscillator-based aerosol sensor and aerosol sensing method
#3Frequency compensated oscillator design for process tolerances
#4Frequency compensated oscillator design for process tolerances
#5Filter chip and method for producing a filter chip
#6Method of forming a resonator
#7Multiple coil spring MEMS resonator
#8Compound spring MEMS resonators for frequency and timing generation
#9Frequency compensated oscillator design for process tolerances
#10Frequency compensated oscillator design for process tolerances
#11Microelectromechanical resonators
#12Microelectronic machine-based ariable
#13Micromechanical resonators
#14Out-of plane MEMS resonator with static out-of-plane deflection
#15Method of manufacturing a microelectromechanical system (MEMS) resonator
#16Bulk acoustic wave resonator and method of manufacturing thereof
#17Micro-electromechanical resonator geometry
#18Out-of-plane MEMS resonator with static out-of-plane deflection
#19MEMS resonator array structure and method of operating and using same
#20Resonator, elastic wave transmission element and fabrication method thereof
#21Oscillator having micro-electromechanical resonators and driver circuits therein that support in-phase and out-of-phase signals
#22MEMS resonator structure including regions with different densities and method
#23Thin-film bulk acoustic resonators having perforated bodies that provide reduced susceptibility to process-induced lateral dimension variations
#24Thin-film piezoelectric-on-insulator resonators having perforated resonator bodies therein
#25Method for fabricating a microelectromechanical system (MEMS) resonator
#26MEMS resonator structure and method
#27MEMS resonator array structure and method of operating and using same
#28Method and apparatus for frequency tuning of a micro-mechanical resonator
#29Method for frequency tuning of a micro-mechanical resonator
#30Method and apparatus for frequency tuning of a micro-mechanical resonator
#31Frequency compensated oscillator design for process tolerances
#32Techniques for adding compensating material(s) in semiconductor devices
#33Temperature stable MEMS resonator
#34Temperature stable MEMS resonator
#35Temperature stable MEMS resonator
#36Temperature stable MEMS resonator