220552 ⎘
Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators; Details of microelectro-mechanical resonators Vibrating means
Sub-classes:Micro-Mechanical Resonator Having Out-of-Phase and Out-of-Plane Flexural Mode Resonator Portions
#2Vibration Device
#3Micro-mechanical resonator having out-of-phase and out-of-plane flexural mode resonator portions
#4Differential resonator and MEMS sensor
#5Systems and methods for reducing the actuation voltage for electrostatic MEMS devices
#6Two-dimensional mode resonators
#7Multiple coil spring MEMS resonator
#8Compound spring MEMS resonators for frequency and timing generation
#9Vibrator, oscillator, electronic device, and moving object
#10Vibrator, oscillator, electronic device, and moving object
#11Micromechanical resonators
#12Micro-electro-mechanical-system (MEMS) driver
#13MEMS vibrator and oscillator
#14Method of manufacturing a microelectromechanical system (MEMS) resonator
#15Method for fabricating a microelectromechanical system (MEMS) resonator
#16Techniques for adding compensating material(s) in semiconductor devices
#17Temperature stable MEMS resonator
#18Temperature stable MEMS resonator
#19Dual-mode MEMS resonator, oscillator, sensor, timing device, acoustic filter and front-end module and the methods of making
#20Temperature stable MEMS resonator
#21Method for manufacturing a vibrating MEMS circuit