220565 ⎘
Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators; Details of microelectro-mechanical resonators; Suspension means Anchors for square resonators, i.e. resonators comprising a square vibrating membrane
MEMS RESONATOR
#2Thermal-piezoresistive oscillator-based aerosol sensor and aerosol sensing method
#3Micromechanical resonator
#4Microelectromechanical system resonator devices and oscillator control circuits
#5Vibration device
#6Suspended passive element for MEMS devices
#7Monolithic body MEMS devices
#8Temperature compensation for MEMS devices
#9Electromechanical resonator with resonant anchor
#10Micromechanical resonator array and method for manufacturing thereof
#11MEMS resonator array structure and method of operating and using same
#12MEMS resonator array structure and method of operating and using same