220559 ⎘
Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators; Details of microelectro-mechanical resonators Suspension means
Sub-classes:TRANSVERSELY-EXCITED FILM BULK ACOUSTIC RESONATORS WITH ELECTRODES HAVING IRREGULAR HEXAGON CROSS-SECTIONAL SHAPES
#2DUAL-MODE MEMS RESONATORS WITH LOW SUPPORT LOSS
#3MEMS RESONATOR
#4MEMS RESONATOR
#5TRANSVERSELY-EXCITED FILM BULK ACOUSTIC RESONATORS
#6Acoustically Decoupled MEMS Devices
#7MEMS resonator
#8NON-LINEAR TETHERS FOR SUSPENDED DEVICES
#9Non-linear tethers for suspended devices
#10MEMS Vibrating Ring Resonator with Deformable Inner Ring-Shaped Spring Supports
#11MEMS resonator
#12Acoustic resonator
#13Transversely-excited film bulk acoustic resonators
#14Transversely-excited film bulk acoustic resonators with electrodes having irregular hexagon cross-sectional shapes
#15Non-linear tethers for suspended devices
#16Non-linear tethers for suspended devices
#17Aluminum nitride combined overtone resonators for the mmWave spectrum
#18MEMS resonator array arrangement
#19Acoustically decoupled MEMS devices
#20Micro-electro-mechanical device with reduced temperature sensitivity and manufacturing method thereof
#21Transversely-excited film bulk acoustic resonators with molybdenum conductors
#22Electromechanically damped resonator devices and methods
#23Apparatus and methods for photonic integrated resonant accelerometers
#24Resonator and device including the same
#25Guided wave devices with selectively loaded piezoelectric layers
#26Micromechanical resonator having reduced size
#27Resonator and resonator array
#28Micro or nanomechanical particle detection device
#29Acoustic resonator
#30Micromechanical resonator
#31Microelectromechanical system resonator devices and oscillator control circuits
#32Pitch/roll annulus gyroscope with slanted quadrature tuning electrodes and related fabrication methods
#33Microelectromechanical resonator system with improved stability with respect to temperature variations
#34Micro-electro-mechanical device with reduced temperature sensitivity and manufacturing method thereof
#35Piezoelectric rotational MEMS resonator
#36Piezoelectric rotational MEMS resonator
#37Microelectromechanical resonator with improved electrical features
#38Microelectronic structure comprising means of control of viscous damping
#39Resonant transducer
#40Resonator and resonance device
#41Resonator
#42MEMS device for harvesting sound energy and methods for fabricating same
#43Resonator
#44Guided wave devices with selectively loaded piezoelectric layers
#45Guided wave devices with sensors utilizing embedded electrodes
#46Mixed domain guided wave devices utilizing embedded electrodes
#47Guided wave devices with embedded electrodes and non-embedded electrodes
#48Guided wave devices with selectively thinned piezoelectric layers
#49Vibrating device
#50Multiple coil spring MEMS resonator
#51Planar structure of a mechanical resonator decoupled by bending oscillation and expansion/compression vibrations
#52Enhanced MEMS vibrating device
#53Resonator
#54Vibrator, oscillator, electronic device, and moving object
#55Vibrator, oscillator, electronic device, and moving object
#56Vibrator with a beam-shaped portion above a recess in a substrate, and oscillator using same
#57Resonator
#58MEMS resonator
#59MEMS resonator, sensor having the same and manufacturing method for MEMS resonator
#60Widening resonator bandwidth using mechanical loading
#61Resonator and method of controlling the same
#62Micromechanical Resonator
#63Resonator and oscillator with a tuning fork vibrator in a cut-out portion of a layered body
#64Process for producing an acoustic device having a controlled-bandgap phononic crystal structure
#65Optimal Leg Design for MEMS Resonator
#66Electromechanical resonator with resonant anchor
#67Micromechanical resonator
#68Resonator and production method thereof
#69Micromechanical resonating devices and related methods
#70Micromechanical resonator
#71MEMS resonator array structure and method of operating and using same
#72Electromechanical transducer and a method of providing an electromechanical transducer
#73Resonator and periodic structure
#74Microelectromechanical resonant structure having improved electrical characteristics
#75MEMS resonator structure including regions with different densities and method
#76Resonator and a method of manufacturing the same, and oscillator and electronic apparatus including the same
#77Mechanical resonating structures and methods
#78Microsystem, and more particularly a microgyrometer, includes at least two mechanically coupled oscillating masses
#79Micromechanical resonating devices and related methods
#80Micro-electromechanical resonance device with periodic structure
#81Oscillating mass resonator
#82Micromechanical resonator
#83MEMS resonator structure and method
#84MEMS resonator array structure and method of operating and using same
#85Multi-ring resonator system and method
#86MEMS resonator array structure
#87Composite mechanical transducers and approaches therefor
#88Micromechanical device with adjustable resonant frequency by geometry alteration and method for operating same
#89Mechanical oscillator formed by a network of basic oscillators
#90Temperature controlled MEMS resonator and method for controlling resonator frequency
#91Microelectromechanical resonator structure, and method of designing, operating and using same
#92Temperature compensation for silicon MEMS resonator
#93Breath-mode ring resonator structure, and method of designing, operating and using same
#94In-plane mechanically coupled microelectromechanical tuning fork resonators
#95MEMS resonator array structure and method of operating and using same
#96Microelectromechanical resonator structure, and method of designing, operating and using same
#97Integrated monolithic tri-axial micromachined accelerometer
#98Temperature compensation for silicon MEMS resonator
#99MEMS type resonator, process for fabricating the same and communication unit
#100Highly tunable low-impedance capacitive micromechanical resonators, oscillators, and processes relating thereto
#101Temperature controlled MEMS resonator and method for controlling resonator frequency
#102High-Q micromechanical resonator devices and filters utilizing same
#103Temperature controlled MEMS resonator and method for controlling resonator frequency
#104Temperature compensation for silicon MEMS resonator
#105Micromechanical devices based on piezoelectric resonators
#106Vertical differential resonator
#107Methods and apparatus for anchoring resonators
#108Vertical differential resonator
#109Temperature compensated resonator with a pair of spaced apart internal dielectric layers