220572 ⎘
Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators; Details of microelectro-mechanical resonators; Means for compensation or elimination of undesired effects Anchor loss
SINGLE ANCHOR RESONATORS
#2DUAL PROOF-MASS RESONATORS WITH LOW SUPPORT LOSS
#3Acoustically Decoupled MEMS Devices
#4MICROELECTROMECHANICAL SYSTEM RESONATOR ASSEMBLY
#5Clock device
#6Acoustically decoupled MEMS devices
#7Resonator and device including the same
#8Micromechanical vibrasolator
#9Micromechanical resonator having reduced size
#10Resonator and resonator array
#11Microelectromechanical system resonator devices and oscillator control circuits
#12Microelectromechanical resonator with improved electrical features
#13Stacked balanced resonators
#14Resonator and resonance device
#15Resonator and resonance device
#16MEMS resonator with a high quality factor
#17Hollow supports and anchors for mechanical resonators
#18Vibration device
#19Planar structure of a mechanical resonator decoupled by bending oscillation and expansion/compression vibrations
#20Nano scale resonator, nano scale sensor, and fabrication method thereof
#21Device with suspended beam and piezoresistive means of detecting displacement of the beam and method of manufacturing the device
#22Resonant device with piezoresistive detection and with a resonator connected elastically to the support of the device, and method for manufacturing the device
#23Resonator
#24Optimal Leg Design for MEMS Resonator
#25Resonator device and method of optimizing a Q-factor
#26Electromechanical resonator with resonant anchor
#27MEMS resonator array structure and method of operating and using same
#28MEMS resonators having resonator bodies therein with concave-shaped sides that support high quality factor and low temperature coefficient of resonant frequency
#29Miniature mechanical resonator device
#30Mechanical resonating structures and methods
#31MEMS device and manufacturing method thereof
#32MEMS resonator array structure and method of operating and using same
#33MEMS resonator array structure
#34MEMS resonator array structure and method of operating and using same