220571 ⎘
Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators; Details of microelectro-mechanical resonators Means for compensation or elimination of undesired effects
Sub-classes:MEMS RESONATOR
#2CAPACITIVELY TRANSDUCED MICRO OR NANO ELECTROMECHANICAL RESONATOR SYSTEM AS SIGNAL AMPLIFIER
#3RESONANCE DEVICE
#4SINGLE ANCHOR RESONATORS
#5DUAL PROOF-MASS RESONATORS WITH LOW SUPPORT LOSS
#6MEMS RESONATOR AND MEMS RESONATOR PROCESSING METHOD
#7Acoustically Decoupled MEMS Devices
#8RESONANCE DEVICE, COLLECTIVE SUBSTRATE, AND RESONANCE DEVICE MANUFACTURING METHOD
#9Even-mode resonator filter with high stability
#10Resonance device
#11Acoustically decoupled MEMS devices
#12Differential resonator and MEMS sensor
#13Differential resonator and MEMS sensor
#14MEMS device including spurious mode suppression and corresponding operating method
#15Resonance device
#16Resonator and device including the same
#17Vibrating beam accelerometer
#18High frequency module
#19Characterization and driving method based on the second harmonic, which is enhancing the quality factor and reducing the feedthrough current in varying gap electrostatic MEMS resonators
#20Micromechanical vibrasolator
#21Micromechanical resonator having reduced size
#22Resonator and resonator array
#23Bulk acoustic wave resonator on a stress isolated platform
#24Microelectromechanical system resonator devices and oscillator control circuits
#25Resonator and resonator device
#26Resonator and resonance device
#27Resonator and resonance device
#28Corner coupling resonator array
#29MEMS resonator with suppressed spurious modes
#30Vibration transducer
#31MEMS resonator with a high quality factor
#32Acoustic resonator devices and methods with noble metal layer for functionalization
#33Acoustic resonator devices and fabrication methods providing hermeticity and surface functionalization
#34Compensation circuit for acoustic resonators
#35Systems and methods for graphene mechanical oscillators with tunable frequencies
#36Crystal oscillator with reduced acceleration sensitivity
#37Resonator
#38ESD protection for MEMS resonator devices
#39Resonator electrode shields
#40Crystal oscillator with reduced acceleration sensitivity
#41MEMS resonator devices
#42Frequency stabilization in nonlinear MEMS and NEMS oscillators
#43Method of manufacturing a microelectromechanical system (MEMS) resonator
#44VIBRATION CIRCUIT
#45Resonator and method of controlling the same
#46Resonator and method of controlling the same
#47Crystal oscillator with reduced acceleration sensitivity
#48Resonator device and method of optimizing a Q-factor
#49Micro-electro-mechanical-system (MEMS) resonator and manufacturing method thereof
#50MEMS resonator devices
#51Insulator layer based MEMS devices
#52Resonant filter based on an N/MEMS matrix
#53Microelectromechanical resonant structure having improved electrical characteristics
#54MEMS resonator
#55Resonator and a method of manufacturing the same, and oscillator and electronic apparatus including the same
#56Mechanical resonating structures and methods
#57MEMS DEVICE AND METHOD FOR MANUFACTURING THE SAME
#58MEMS resonator devices with a plurality of mass elements formed thereon
#59Micro-electromechanical resonators having electrically-trimmed resonator bodies therein and methods of fabricating same using joule heating
#60Crystal oscillator with reduced acceleration sensitivity
#61Micro-electro-mechanical-system (MEMS) resonator and manufacturing method thereof
#62Resonant circuit, method of producing same, and electronic device
#63Micro-electro-mechanical-system (MEMS) resonator and manufacturing method thereof
#64Micro-electromechanical resonance device with periodic structure
#65Torsional resonator and filter using this
#66Method for fabricating a microelectromechanical system (MEMS) resonator
#67Charge biased MEM resonator
#68Serrated MEMS resonators
#69Serrated MEMS resonators
#70Electromechanical filter
#71Micro-electro-mechanical-system (MEMS) resonator and manufacturing method thereof
#72Dielectrically transduced single-ended to differential MEMS filter
#73Insulation of anti-resonance in resonators
#74Micro-resonator and communication apparatus
#75Microresonator, band-pass filter, semiconductor device, and communication apparatus
#76Micro-resonator, frequency filter and communication apparatus
#77Microresonator, manufacturing method, and electronic apparatus
#78Micromechanical electrostatic resonator
#79Resonator electrode shields
#80Techniques for adding compensating material(s) in semiconductor devices
#81Resonator electrode shields
#82Temperature stable MEMS resonator
#83Temperature stable MEMS resonator
#84Resonator electrode shields
#85Resonator electrode shields
#86Attenuation of spurious responses in electromechanical filters
#87Temperature stable MEMS resonator
#88Resonator electrode shields