220574 ⎘
Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators; Details of microelectro-mechanical resonators; Means for compensation or elimination of undesired effects Parasitic elements or effects, e.g. parasitic capacitive coupling between input and output
CAPACITIVELY TRANSDUCED MICRO OR NANO ELECTROMECHANICAL RESONATOR SYSTEM AS SIGNAL AMPLIFIER
#2Resonance device
#3MEMS device including spurious mode suppression and corresponding operating method
#4Resonance device
#5Characterization and driving method based on the second harmonic, which is enhancing the quality factor and reducing the feedthrough current in varying gap electrostatic MEMS resonators
#6Microelectromechanical system resonator devices and oscillator control circuits
#7Resonator
#8Resonator electrode shields
#9MEMS vibrator and oscillator
#10Resonator and method of controlling the same
#11Resonant filter based on an N/MEMS matrix
#12Resonator electrode shields
#13Resonator electrode shields
#14Resonator electrode shields
#15Resonator electrode shields