220577 ⎘
Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators; Details of microelectro-mechanical resonators; Means for compensation or elimination of undesired effects Strain
Resonance device
#2Differential resonator and MEMS sensor
#3Differential resonator and MEMS sensor
#4Vibrating beam accelerometer
#5Bulk acoustic wave resonator on a stress isolated platform
#6Microelectromechanical resonator with improved electrical features
#7Piezoelectric thin film and piezoelectric vibrator
#8Suspended passive element for MEMS devices
#9Monolithic body MEMS devices
#10Temperature compensation for MEMS devices
#11Serrated MEMS resonators
#12Serrated MEMS resonators
#13Dielectrically transduced single-ended to differential MEMS filter