H03H2009/02511 - CPC Classification Index

#1

20250247072

2025-07-31

PIEZOELECTRIC RESONATOR

#2

20180048288

2018-02-15

Resonator and resonance device

#3

20170179926

2017-06-22

Resonator and resonance device

#4

20160197597

2016-07-07

Vibration device and manufacturing method of the same

#5

20160111627

2016-04-21

Vibration device

#6

20140091871

2014-04-03

MEMS element and oscillator

#7

20140002200

2014-01-02

Micromechanical resonator oscillator structure and driving method thereof

#8

20130187724

2013-07-25

Micromechanical resonator and method for manufacturing thereof

#9

20130027146

2013-01-31

MEMS vibrator and oscillator

#10

20130002364

2013-01-03

Switchable electrode for power handling

#11

20130002363

2013-01-03

Out-of-plane resonator

#12

20120329255

2012-12-27

Out-of plane MEMS resonator with static out-of-plane deflection

#13

20120248932

2012-10-04

Method of adjusting the resonance frequency of a micro-machined vibrating element

#14

20120229226

2012-09-13

Micromechanical Resonator

#15

20120146736

2012-06-14

MEMS vibrator, oscillator, and method for manufacturing MEMS vibrator

#16

20120133449

2012-05-31

Microelectronic device and electronic apparatus

#17

20120112765

2012-05-10

MEMS in-plane resonators

#18

20120091547

2012-04-19

Resonator and production method thereof

#19

20120058741

2012-03-08

Thermal-mechanical signal processing

#20

20120034724

2012-02-09

Method and apparatus for MEMS oscillator

#21

20120025922

2012-02-02

Micro-electro-mechanical-system (MEMS) resonator and manufacturing method thereof

#22

20110306153

2011-12-15

METHOD OF MANUFACTURING MEMS DEVICE

#23

20110260810

2011-10-27

Out-of-plane MEMS resonator with static out-of-plane deflection

#24

20110187347

2011-08-04

Electromechanical transducer and a method of providing an electromechanical transducer

#25

20110128083

2011-06-02

Microelectromechanical resonant structure having improved electrical characteristics

#26

20110059565

2011-03-10

Method and apparatus for MEMS oscillator

#27

20110001392

2011-01-06

Highly efficient, charge depletion-mediated, voltage-tunable actuation efficiency and resonance frequency of piezoelectric semiconductor nanoelectromechanical systems resonators

#28

20100302612

2010-12-02

OSCILLATING STRUCTURE AND OSCILLATOR DEVICE USING THE SAME

#29

20100178717

2010-07-15

Method of manufacturing MEMS device

#30

20100109810

2010-05-06

Resonator and filter using the same

#31

20100090786

2010-04-15

Micro-electro-mechanical-system (MEMS) resonator and manufacturing method thereof

#32

20090315646

2009-12-24

Resonant circuit, method of producing same, and electronic device

#33

20090315645

2009-12-24

Resonant circuit, oscillation circuit, filter circuit, and electronic device

#34

20090302707

2009-12-10

Micro-electro-mechanical-system (MEMS) resonator and manufacturing method thereof

#35

20090294638

2009-12-03

Nanomechanical oscillator

#36

20090289747

2009-11-26

Magnetic nano-resonator

#37

20090085683

2009-04-02

Resonator, oscillator and communication device

#38

20090066170

2009-03-12

Microsystem comprising a bending beam and process of manufacture

#39

20080284528

2008-11-20

Resonator, oscillator, and communication apparatus

#40

20080272852

2008-11-06

Low-voltage MEMS oscillator

#41

20080261344

2008-10-23

Vacuum packaged single crystal silicon device

#42

20080261343

2008-10-23

Vacuum packaged single crystal silicon device

#43

20080238575

2008-10-02

Electro mechanical device and manufacturing method thereof, and resonator and manufacturing method thereof

#44

20080218295

2008-09-11

MEMS resonator array structure

#45

20080165403

2008-07-10

Micromechanical device with adjustable resonant frequency by geometry alteration and method for operating same

#46

20080150647

2008-06-26

Method and apparatus for MEMS oscillator

#47

20080136563

2008-06-12

Electromagnetic composite metamaterial

#48

20070296527

2007-12-27

Temperature controlled MEMS resonator and method for controlling resonator frequency

#49

20070296526

2007-12-27

Microelectromechanical resonator structure, and method of designing, operating and using same

#50

20070188269

2007-08-16

Temperature compensation for silicon MEMS resonator

#51

20070164839

2007-07-19

Electric machine signal selecting element

#52

20070109656

2007-05-17

MEMS device annealing

#53

20070109074

2007-05-17

Micro-electro-mechanical-system (MEMS) resonator and manufacturing method thereof

#54

20070091971

2007-04-26

MEMS resonator and method of enhancing an output signal current from a MEMS resonator

#55

20070090897

2007-04-26

Flap resonator, method of manufacturing a flap resonator, and integrated circuit including the flap resonator

#56

20070075806

2007-04-05

Electromechanical filter

#57

20070063613

2007-03-22

Thermoelastically actuated microresonator

#58

20070024159

2007-02-01

Micro-resonator and communication apparatus

#59

20070018262

2007-01-25

Micromachine and production method thereof

#60

20070010227

2007-01-11

Micro electric machine system resonator, drive method thereof, manufacturing method thereof, and frequency filter

#61

20070001784

2007-01-04

Microresonator, band-pass filter, semiconductor device, and communication apparatus

#62

20070001783

2007-01-04

MEMS resonator array structure and method of operating and using same

#63

20070001250

2007-01-04

Micromachine and method of fabricating the same

#64

20060261915

2006-11-23

Microelectromechanical resonator structure, and method of designing, operating and using same

#65

20060255881

2006-11-16

Method for adjusting the frequency of a MEMS resonator

#66

20060239635

2006-10-26

Shell type actuator

#67

20060238239

2006-10-26

Thermal-mechanical signal processing

#68

20060214746

2006-09-28

Mechanical resonator

#69

20060211169

2006-09-21

Vacuum packaged single crystal silicon device

#70

20060186971

2006-08-24

Temperature compensation for silicon MEMS resonator

#71

20060181368

2006-08-17

MEMS type resonator, process for fabricating the same and communication unit

#72

20060176122

2006-08-10

MEMS oscillator drive

#73

20060140646

2006-06-29

Micro-resonator, frequency filter and communication apparatus

#74

20060103491

2006-05-18

Microresonator, manufacturing method, and electronic apparatus

#75

20060071578

2006-04-06

Micromechanical element having adjustable resonant frequency

#76

20060049895

2006-03-09

Micromachine and method of producing the same

#77

20060033594

2006-02-16

Temperature controlled MEMS resonator and method for controlling resonator frequency

#78

20060017523

2006-01-26

Internal electrostatic transduction structures for bulk-mode micromechanical resonators

#79

20050242904

2005-11-03

Method for adjusting the frequency of a MEMS resonator

#80

20050224900

2005-10-13

Electro mechanical device having a sealed cavity

#81

20050199970

2005-09-15

Electromechanical resonator and method for fabricating such a resonator

#82

20050195050

2005-09-08

Temperature controlled MEMS resonator and method for controlling resonator frequency

#83

20050162239

2005-07-28

Temperature compensation for silicon MEMS resonator

#84

20050161749

2005-07-28

Apparatus and method for vacuum-based nanomechanical energy force and mass sensors

#85

20050036269

2005-02-17

Vacuum-cavity MEMS resonator

#86

20050024165

2005-02-03

Micromechanical resonator having short support beams

#87

14514096

2016-11-08

Vertical differential resonator

#88

13294950

2014-11-04

Vertical differential resonator