220578 ⎘
Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators; Details of microelectro-mechanical resonators Vibration modes
Sub-classes:Vibration Device
#2RESONANCE DEVICE, COLLECTIVE SUBSTRATE, AND RESONANCE DEVICE MANUFACTURING METHOD
#3Multifunctional logic device and method
#4Resonator and resonance device
#5Resonator and resonance device
#6Characterization and driving method based on the second harmonic, which is enhancing the quality factor and reducing the feedthrough current in varying gap electrostatic MEMS resonators
#7Micromechanical resonator and resonator system including the same
#8Gallium nitride structure, piezoelectric element, method of manufacturing piezoelectric element, and resonator using piezoelectric element
#9Micro-electromechanical resonators and methods of providing a reference frequency
#10MEMS element and oscillator
#11MEMS pressure sensor
#12Resonator and method of controlling the same
#13Resonator and method of controlling the same
#14Lateral over-moded bulk acoustic resonators
#15Thermal-mechanical signal processing
#16Method and device for suppressing hysteresis of resonators through simultaneous resonance
#17Signal amplification by hierarchal resonating structures
#18Resonator and a method of manufacturing the same, and oscillator and electronic apparatus including the same
#19Resonators, resonator arrays, apparatus and methods
#20MEMS resonators
#21MEMS device annealing
#22Shell type actuator
#23Thermal-mechanical signal processing
#24Dual-mode MEMS resonator, oscillator, sensor, timing device, acoustic filter and front-end module and the methods of making