220582 ⎘
Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators; Details of microelectro-mechanical resonators; Vibration modes Torsional
MEMS frequency-tuning springs
#2Micromechanical devices comprising n-type doping agents
#3Micromechanical resonator and method for manufacturing thereof
#4MEMS resonator and electrical device using the same
#5Out-of plane MEMS resonator with static out-of-plane deflection
#6Method and apparatus for MEMS oscillator
#7Out-of-plane MEMS resonator with static out-of-plane deflection
#8Method and apparatus for MEMS oscillator
#9Resonator and resonator array
#10MICRO MECHANICAL RESONATOR
#11Resonator and filter using the same
#12Nanomechanical oscillator
#13Magnetic nano-resonator
#14Torsional resonator and filter using this
#15Vibrator, resonator using the same and electromechanical filter using the same
#16Method and apparatus for MEMS oscillator
#17Electromagnetic composite metamaterial
#18Electromechanical filter
#19Torsion resonator and filter using this
#20Resonant-oscillating-device fabrication method
#21Parametric resonator and filter using the same
#22Electromechanical filter
#23Apparatus and method for vacuum-based nanomechanical energy force and mass sensors
#24Micromechanical electrostatic resonator