SELF-REFERENCING MICROELECTROMECHANICAL SYSTEMS (MEMS) RESONATOR WITH DUAL MECHANICAL MODES FOR TEMPERATURE-INDEPENDENT ENVIRONMENTAL SENSING

HIGH ELECTROMECHANICAL COUPLING STRENGTH HOLLOW DISK RESONATORS

Aluminum nitride combined overtone resonators for the mmWave spectrum

MEMS device including spurious mode suppression and corresponding operating method

Micromechanical resonator

Temperature compensated plate resonator

Temperature compensated compound resonator

Planar structure of a mechanical resonator decoupled by bending oscillation and expansion/compression vibrations

Composite dilation mode resonators

Frequency stabilization in nonlinear MEMS and NEMS oscillators

Resonator device and method of optimizing a Q-factor

Electromechanical resonator with resonant anchor

Electromechanical systems piezoelectric contour mode differential resonators and filters

Silicon MEMS resonators

Resonator and filter using the same

Silicon MEMS resonators

Nanomechanical oscillator

Microsystem comprising a bending beam and process of manufacture

Multi-ring resonator system and method

MEMS filter device having a nanosize coupling element and manufacturing method thereof

MEMS resonator array structure

Micromechanical device with adjustable resonant frequency by geometry alteration and method for operating same

Process compensated micromechanical resonators

Temperature measurement system having a plurality of microelectromechanical resonators and method of operating same

Temperature controlled MEMS resonator and method for controlling resonator frequency

Microelectromechanical resonator structure, and method of designing, operating and using same

Microelectromechanical oscillator and method of operating same

Microelectromechanical oscillator having temperature measurement system, and method of operating same

Oscillator system having a plurality of microelectromechanical resonators and method of designing, controlling or operating the same

Oscillator system having a plurality of microelectromechanical resonators and method of designing, controlling or operating same

Electric machine signal selecting element

Breath-mode ring resonator structure, and method of designing, operating and using same

MEMS resonator array structure and method of operating and using same

Microelectromechanical resonator structure, and method of designing, operating and using same

Method for adjusting the frequency of a MEMS resonator

Temperature controlled MEMS resonator and method for controlling resonator frequency

Method for adjusting the frequency of a MEMS resonator

Temperature controlled MEMS resonator and method for controlling resonator frequency

Apparatus and method for vacuum-based nanomechanical energy force and mass sensors

Dual-mode MEMS resonator, oscillator, sensor, timing device, acoustic filter and front-end module and the methods of making