220745 ⎘
Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators; Constructional features of resonators of material which is not piezo-electric, electrostrictive, or magnetostrictive of microelectro-mechanical resonators Square resonators
DUAL-OUTPUT MICROELECTROMECHANICAL RESONATOR AND METHOD OF MANUFACTURE AND OPERATION THEREOF
#2SINGLE ANCHOR RESONATORS
#3Methods and devices for microelectromechanical resonators
#4Dual-output microelectromechanical resonator and method of manufacture and operation thereof
#5Methods and devices for microelectromechanical resonators
#6Clock device
#7Dual-output microelectromechanical resonator and method of manufacture and operation thereof
#8Dual-output microelectromechanical resonator and method of manufacture and operation thereof
#9Methods and devices for microelectromechanical resonators
#10Resonance device
#11Thermal-piezoresistive oscillator-based aerosol sensor and aerosol sensing method
#12Methods and devices for microelectromechanical resonators
#13Quartz crystal resonator, quartz crystal unit, and quartz crystal oscillator
#14Micro or nanomechanical particle detection device
#15Micromechanical resonator
#16Microelectromechanical system resonator devices and oscillator control circuits
#17Resonator and resonance device
#18Corner coupling resonator array
#19Piezoelectric MEMS resonator with a high quality factor
#20Vibration device
#21Temperature compensated plate resonator
#22Temperature compensated compound resonator
#23Methods and devices for microelectromechanical resonators
#24Methods and devices for microelectromechanical pressure sensors
#25Active type temperature compensation resonator structure
#26Method for temperature compensation in MEMS resonators with isolated regions of distinct material
#27Suspended passive element for MEMS devices
#28Monolithic body MEMS devices
#29Temperature compensation for MEMS devices
#30Micromechanical devices comprising n-type doping agents
#31MEMS resonator, manufacturing method thereof, and signal processing method using MEMS resonator
#32Micromechanical resonator oscillator structure and driving method thereof
#33Micromechanical resonator and method for manufacturing thereof
#34Micromechanical device including N-type doping for providing temperature compensation and method of designing thereof
#35Bulk acoustic wave resonator and method of manufacturing thereof
#36Micromechanical Resonator
#37Resonator device and method of optimizing a Q-factor
#38Electromechanical resonator with resonant anchor
#39Micromechanical resonator array and method for manufacturing thereof
#40Dual in-situ mixing for extended tuning range of resonators
#41Microelectromechanical resonator and a method for producing the same
#42Device with a micro electromechanical structure
#43Compensated micro/nano-resonator with improved capacitive detection and method for producing same
#44Microelectromechanical resonant structure having improved electrical characteristics
#45MEMS resonator for filtering and mixing
#46Method for temperature compensation in MEMS resonators with isolated regions of distinct material
#47MEMS resonator
#48Resonator electrode shields
#49Resonator and a method of manufacturing the same, and oscillator and electronic apparatus including the same
#50Methods of forming micromechanical resonators having high density trench arrays therein that provide passive temperature compensation
#51Resonator having a sideways oscillation compressing one connector while extending another
#52Digitally programmable RF MEMS filters with mechanically coupled resonators
#53Method for temperature compensation in MEMS resonators with isolated regions of distinct material
#54BULK MODE RESONATOR
#55Oscillating mass resonator
#56MEMS filter device having a nanosize coupling element and manufacturing method thereof