220738 ⎘
Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators; Constructional features of resonators of material which is not piezo-electric, electrostrictive, or magnetostrictive of microelectro-mechanical resonators
Sub-classes:MEMS RESONATOR WITH TEMPERATURE COMPENSATION
#2ACTIVE NULLIFICATION OF STRAY CHARGES ON FLOATING ELECTRODES IN MICRO OR NANO ELECTROMECHANICAL RESONATOR SYSTEMS
#3DUAL RING MICROELECTROMECHANICAL SYSTEMS INTEGRATION FOR ANALOG TUNABILITY IN RECONFIGURABLE INTELLIGENT SURFACES
#4SINGLE ANCHOR RESONATORS
#5Three Dimensional Microstructures With Selectively Removed Regions For Use In Gyroscopes And Other Devices
#6MEMS RESONATOR WITH TEMPERATURE COMPENSATION
#7Methods and devices for microelectromechanical resonators
#8Piezoelectric MEMS resonators based on porous silicon technologies
#9BULK ACOUSTIC WAVE DEVICE PACKAGING WITH REDISTRIBUTION USING SILICON DIOXIDE INSULATION
#10Methods and devices for microelectromechanical resonators
#11Method for manufacturing a piezoelectric resonator
#12RESONATOR AND RESONANCE DEVICE
#13Transversely-excited film bulk acoustic resonator comprising small cells
#14Three dimensional microstructures with selectively removed regions for use in gyroscopes and other devices
#15Sensor interface including resonator and differential amplifier
#16Transversely-excited film bulk acoustic resonator comprising small cells
#17Piezoelectric MEMS resonators based on porous silicon technologies
#18Resonance device and method for manufacturing resonance device
#19Methods and devices for microelectromechanical resonators
#20Micro-electro-mechanical device with reduced temperature sensitivity and manufacturing method thereof
#21Suspended microelectromechanical system (MEMS) devices
#22Inductively-coupled MEMS resonators
#23SYSTEM AND METHODS FOR OPTICAL EXCITATION OF ACOUSTIC RESONANCE IN RESONATOR GYROSCOPES
#24MEMS frequency-tuning springs
#25Radiation-hard precision voltage reference
#26Characterization and driving method based on the second harmonic, which is enhancing the quality factor and reducing the feedthrough current in varying gap electrostatic MEMS resonators
#27Methods and devices for microelectromechanical resonators
#28Micromechanical resonator
#29Resonator and resonance device
#30Low-power microelectromechanical system resonator based oscillator using impedance transformation
#31Oven controlled MEMS oscillator and system and method for calibrating the same
#32Micromechanical resonator and resonator system including the same
#33Angular rate sensor with in-phase motion suppression structure
#34Micro-electro-mechanical device with reduced temperature sensitivity and manufacturing method thereof
#35Piezoelectric rotational MEMS resonator
#36Piezoelectric rotational MEMS resonator
#37Stacked balanced resonators
#38System and method for resonator amplitude control
#39Resonator and resonance device
#40Resonator and resonance device
#41MEMS resonator with suppressed spurious modes
#42Microelectromechanical resonant circulator
#43Vibration transducer
#44Multi resonator system
#45MEMS device and method for producing same
#46Method of manufacturing piezoelectric resonator unit
#47Piezoelectric MEMS resonator with a high quality factor
#48Piezoelectric vibrator and piezoelectric vibration device
#49Resonator and resonating device
#50Resonator circuit having greater degrees of freedom, filter with improved tunability, and duplexer with improved tunability
#51Phononic metamaterials comprising atomically disordered resonators
#52Unreleased coupled MEMS resonators and transmission filters
#53Encapsulated bulk acoustic wave (BAW) resonator device
#54Micro-hemispherical resonators and methods of making the same
#55Compound spring MEMS resonators for frequency and timing generation
#56Temperature compensated beam resonator
#57Temperature compensated compound resonator
#58Nanomechanical resonator array and production method thereof
#59Piezoresistive resonator with multi-gate transistor
#60Methods and devices for microelectromechanical resonators
#61Methods and devices for microelectromechanical pressure sensors
#62Method for temperature compensation in MEMS resonators with isolated regions of distinct material
#63Micro-electro-mechanical transducer having an optimized non-flat surface
#64Micro-electro-mechanical transducer having an optimized non-flat surface
#65Micro-electro-mechanical transducer having an optimized non-flat surface
#66Vibrator, oscillator, electronic device, and moving object
#67Vibrator, oscillator, electronic device, and moving object
#68Nanophononic metamaterials
#69Method of manufacturing a mechanical resonating structure
#70Volume wave resonator using excitation/detection of vibrations
#71Vibrator, oscillator, electronic apparatus, moving object, and method of manufacturing vibrator
#72Module for the mechanical uncoupling of a resonator having a high quality factor
#73Tunable and switchable resonator and filter structures in single crystal piezoelectric MEMS devices using bimorphs
#74Variable capacitor and switch structures in single crystal piezoelectric MEMS devices using bimorphs
#75Composite dilation mode resonators
#76Micromechanical devices comprising n-type doping agents
#77Hemitoroidal resonator gyroscope
#78Methods and apparatus for temperature control of devices and mechanical resonating structures
#79Resonator electrode shields
#80Semiconductor device with a resonator using acoustic standing wave excited in semiconductor crystal
#81Device with suspended beam and piezoresistive means of detecting displacement of the beam and method of manufacturing the device
#82Resonant device with piezoresistive detection and with a resonator connected elastically to the support of the device, and method for manufacturing the device
#83Self-polarized capacitive micromechanical resonator apparatus and fabrication method
#84Cross-sectional dilation mode resonators
#85Cross-sectional dilation mode resonators and resonator-based ladder filters
#86Micro electro mechanical systems component
#87Unreleased mems resonator and method of forming same
#88Method of manufacturing a microelectromechanical system (MEMS) resonator
#89Electromechanical systems oscillator with piezoelectric contour mode resonator for multiple frequency generation
#90LOW TEMPERATURE BI-CMOS COMPATIBLE PROCESS FOR MEMS RF RESONATORS AND FILTERS
#91Method of actuating an internally transduced pn-diode-based ultra high frequency micromechanical resonator
#92MEMS resonator
#93Multi-dimensional integrated detection and analysis system (MIDAS) based on microcantilvers
#94Wide bandwidth slanted-finger contour-mode piezoelectric devices
#95Resonator device and method of optimizing a Q-factor
#96Micromechanical resonating devices and related methods
#97MEMS element, and manufacturing method of MEMS element
#98Thermal-mechanical signal processing
#99Micro-electro-mechanical transducer having an optimized non-flat surface
#100MEMS resonators
#101Hemitoroidal resonator gyroscope
#102MICROMECHANICAL MEMBRANES AND RELATED STRUCTURES AND METHODS
#103Method of manufacturing a resonating structure
#104Insulator layer based MEMS devices
#105MEMS resonator array structure and method of operating and using same
#106Device with a micro electromechanical structure
#107MEMS vibrating structure using a single-crystal piezoelectric thin-film layer having domain inversions
#108Compensated micro/nano-resonator with improved capacitive detection and method for producing same
#109Micro-electro-mechanical transducer having a surface plate
#110Resonator, elastic wave transmission element and fabrication method thereof
#111Resonator and periodic structure
#112Signal amplification by hierarchal resonating structures
#113Low temperature Bi-CMOS compatible process for MEMS RF resonators and filters
#114Piezoresistive strain sensor based nanowire mechanical oscillator
#115Micromechanical resonator with enlarged portion
#116Method for temperature compensation in MEMS resonators with isolated regions of distinct material
#117MEMS resonators having resonator bodies therein with concave-shaped sides that support high quality factor and low temperature coefficient of resonant frequency
#118Miniature mechanical resonator device
#119Methods and apparatus for temperature control of devices and mechanical resonating structures
#120Microresonator
#121Nanotube Device
#122MEMS ultrasonic device having a PZT and cMUT
#123MEMS resonator having at least one resonator mode shape
#124Q enhancement in micromachined lateral-extensional resonators
#125Micro-electromechanical resonators having electrically-trimmed resonator bodies therein and methods of fabricating same using joule heating
#126Method for temperature compensation in MEMS resonators with isolated regions of distinct material
#127RESONATOR
#128Patterned Functionalization of Nanomechanical Resonators for Chemical Sensing
#129Lithographically defined multi-standard multi-frequency high-Q tunable micromechanical resonators
#130Micromechanical resonating devices and related methods
#131Micro-electro-mechanical transducer having a surface plate
#132Oscillating mass resonator
#133Apparatus, method, and computer program product providing edgeless carbon nanotube resonator arrays
#134Vibrator, resonator using the same and electromechanical filter using the same
#135Micro-electro-mechanical transducer having embedded springs
#136Method for fabricating a microelectromechanical system (MEMS) resonator
#137MEMS resonator array structure and method of operating and using same
#138Microresonator
#139Low temperature Bi-CMOS compatible process for MEMS RF resonators and filters
#140Charge biased MEM resonator
#141Vacuum packaged single crystal silicon device
#142Vacuum packaged single crystal silicon device
#143Lithographically-defined multi-standard multi-frequency high-Q tunable micromechanical resonators
#144MEMS resonator array structure
#145Serrated MEMS resonators
#146Serrated MEMS resonators
#147Electromagnetic composite metamaterial
#148Method for making an electromechanical component on a plane substrate
#149Nonlinear micromechanical resonator
#150Temperature measurement system having a plurality of microelectromechanical resonators and method of operating same
#151Microelectromechanical resonator structure, and method of designing, operating and using same
#152Microelectromechanical oscillator and method of operating same
#153Microelectromechanical oscillator having temperature measurement system, and method of operating same
#154Electromechanical transducer and electrical device
#155Oscillator system having a plurality of microelectromechanical resonators and method of designing, controlling or operating the same
#156Oscillator system having a plurality of microelectromechanical resonators and method of designing, controlling or operating same
#157Electromechanical filter
#158Parametric resonator and filter using the same
#159MEMS device annealing
#160Nonlinear internal resonance based micromechanical resonators
#161MEMS acoustic filter and fabrication of the same
#162Integrated resonators and time base incorporating said resonators
#163MEMS resonator array structure and method of operating and using same
#164Microelectromechanical resonator structure, and method of designing, operating and using same
#165Shell type actuator
#166Thermal-mechanical signal processing
#167Mechanical resonator
#168Vacuum packaged single crystal silicon device
#169Resonator
#170Micromachine and method of producing the same
#171Internal electrostatic transduction structures for bulk-mode micromechanical resonators
#172Electromechanical electron transfer devices
#173Electromechanical resonator and method for fabricating such a resonator
#174Electromechanical resonator and method of operating same
#175Vacuum-cavity MEMS resonator
#176Resonator electrode shields
#177Techniques for adding compensating material(s) in semiconductor devices
#178Resonant elements and oscillators
#179Resonator electrode shields
#180Temperature stable MEMS resonator
#181MEMS resonator with beam segments having predefined angular offset to each other and to resonator silicon crystal orientation
#182Temperature stable MEMS resonator
#183Resonator electrode shields
#184Nonlinear acoustic medium
#185Micromechanical device and related methods
#186Dual-mode MEMS resonator, oscillator, sensor, timing device, acoustic filter and front-end module and the methods of making
#187Resonator electrode shields
#188High-Q quartz-based inductor array for antenna matching
#189Multi-die integrated circuit package
#190Resonator electrode shields
#191System and method for lossless phase noise cancellation in a microelectromechanical system (MEMS) resonator
#192Radiation-hard precision voltage reference
#193MEMs-based resonant FinFET
#194Micromechanical devices based on piezoelectric resonators
#195Resonator electrode shields
#196Temperature stable MEMS resonator
#197Temperature insensitive resonant elements and oscillators and methods of designing and manufacturing same