220522 ⎘
Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators; Details of bulk acoustic wave devices Treatment of substrates
Sub-classes:SILICON-SUPPORTED WAFER TO WAFER SOLDER BOND
#2BULK ACOUSTIC WAVE RESONATORS HAVING CONVEX SURFACES, AND METHODS OF FORMING THE SAME
#3HYBRID STRUCTURE FOR A SURFACE ACOUSTIC WAVE DEVICE
#4ACOUSTIC RESONATOR AND METHOD FOR MANUFACTURING ACOUSTIC RESONATOR
#5BULK FILTER
#6Resonator and Preparation Method Thereof
#7BULK ACOUSTIC WAVE DEVICE PACKAGING WITH REDISTRIBUTION USING BUFFER COAT INSULATION
#8COMPLEMENTARY SWITCHABLE DUAL-MODE BULK ACOUSTIC WAVE RESONATOR AND FILTER
#9Bulk acoustic wave resonators having convex surfaces, and methods of forming the same
#10RESONATOR AND METHOD OF PREPARING A RESONATOR
#11Acoustic wave resonator, RF filter circuit and system
#12LADDER FILTER WITH TRANSVERSELY-EXCITED FILM BULK ACOUSTIC RESONATORS HAVING DIFFERENT PITCHES
#13Bulk acoustic wave resonator structure
#14Acoustic wave resonator, RF filter circuit and system
#15Resonator device
#16Hybrid structure for a surface acoustic wave device
#17Deposition method of a metallic layer on a substrate of a resonator device
#18Bulk acoustic wave resonators having convex surfaces, and methods of forming the same
#19Gallium-nitride based devices implementing an engineered substrate structure
#20Single-Crystal Bulk Acoustic Wave Resonator and Method of Making Thereof
#21Piezoelectric resonator with patterned resonant confiners
#22Bulk acoustic wave resonator structure
#23Bulk acoustic wave resonator structure for second harmonic suppression
#24Voltage sensor device based on a tunable bulk acoustic wave (BAW) resonator
#25Acoustic wave resonators having fresnel surfaces
#26Bulk acoustic wave filter
#27Bulk-acoustic wave resonator
#28Positions of release ports for sacrificial layer etching
#295.5 GHz Wi-Fi coexistence acoustic wave resonator RF filter circuit
#30Bulk acoustic wave resonator and method of manufacturing the same
#31SELF-SUPPORTING CAVITY STRUCTURE OF A BULK ACOUSTIC RESONATOR AND METHOD THEREFOR
#32Acoustic wave devices and a method of producing the same
#33Acoustic wave device and method of fabricating the same, filter and multiplexer
#34Power and RF devices implemented using an engineered substrate structure
#35Piezoelectric device, piezoelectric vibrating piece, and method for manufacturing piezoelectric vibrating piece
#36Bulk Acoustic Wave Resonator having a Central Feed
#37Bulk acoustic wave resonator
#38Hybrid structure for a surface acoustic wave device
#39Bulk acoustic wave resonators having convex surfaces, and methods of forming the same
#40Bulk acoustic wave filter
#41Bulk acoustic wave resonator
#42Filters including loop circuits for phase cancellation
#43Film bulk acoustic resonator with spurious resonance suppression
#44Bulk acoustic wave resonator and method for manufacturing the same
#45Bulk acoustic wave filter device and method of manufacturing the same
#46Elastic wave device and manufacturing method for the same
#47Power generating device having a deformable element that generates power when deforming
#48Acoustic resonator structure with inclined C-axis piezoelectric bulk and crystalline seed layers
#49Methods for producing piezoelectric bulk and crystalline seed layers of different C-axis orientation distributions
#50Multi-stage deposition system for growth of inclined c-axis piezoelectric material structures
#51Methods for fabricating acoustic structure with inclined c-axis piezoelectric bulk and crystalline seed layers
#52Method of deposition
#53BAW device and method of manufacturing BAW device
#54Bulk acoustic wave resonator having piezoelectric layer with varying amounts of dopant
#55Semiconductor substrate and a method of manufacturing the same
#56Method for manufacturing piezoelectric device
#57Piezoelectric thin film resonator, filter, and duplexer including a film inserted into the piezoelectric film
#58Bulk acoustic wave resonator having piezoelectric layer with multiple dopants
#59Acoustic wave bandpass filter comprising integrated acoustic guiding
#60Piezoelectric device
#61Acoustic resonator formed on a pedestal
#62WAFER LEVEL FABRICATION OF CAVITY FOR SURFACE ACOUSTIC WAVE FILTER
#63HBAR resonator with high temperature stability
#64HBAR resonator with a high level of integration
#65Thin-Film Bulk Acoustic Resonators Having Reduced Susceptibility to Process-Induced Material Thickness Variations
#66High-ohmic semiconductor substrate and a method of manufacturing the same
#67Band filter using film bulk acoustic resonator and method of fabricating the same