220523 ⎘
Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators; Details of bulk acoustic wave devices; Treatment of substrates of the surface including the back surface
ACOUSTIC WAVE DEVICE
#2Etching and thinning for the fabrication of lithographically patterned diamond nanostructures
#3Vibration element and oscillator
#4Electrical component with heat dissipation
#5Method of manufacture for single crystal acoustic resonator devices using micro-vias
#6Acoustic filters integrated into single die
#7Piezoelectric device and manufacturing method therefor
#8Stealth-dicing compatible devices and methods to prevent acoustic backside reflections on acoustic wave devices
#9Bulk acoustic wave (BAW) device having roughened bottom side
#10Piezoelectric component
#11Bulk acoustic wave (BAW) device having roughened bottom side
#12Optimal acoustic impedance materials for polished substrate coating to suppress passband ripple in BAW resonators and filters
#13Piezoelectric laterally vibrating resonator structure geometries for spurious frequency suppression
#14Method for manufacturing electronic component
#15Electronic component and method for manufacturing electronic component
#16Boundary acoustic wave device
#17Optimal acoustic impedance materials for polished substrate coating to suppress passband ripple in BAW resonators and filters
#18PIEZOELECTRIC THIN FILM DEVICE
#19PIEZOELECTRIC THIN FILM DEVICE
#20Method of manufacturing a piezoelectric thin film device
#21Bulk acoustic wave resonator with means for suppression of pass-band ripple in bulk acoustic wave filters
#22Method of manufacture for single crystal acoustic resonator devices using micro-vias