220549 ⎘
Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators; Details of microelectro-mechanical resonators Driving or detection means
Sub-classes:STRUCTURES, ACOUSTIC DEVICES AND SYSTEMS
#2MICRO/NANO ELECTROMECHANICAL RING OSCILLATOR DEVICE
#3STRUCTURES, DEVICES, ACOUSTIC WAVE RESONATORS, AND SYSTEMS
#4PIEZOELECTRIC RESONATOR WITH BUILT-IN TEMPERATURE SENSOR AND REFERENCE SIGNAL GENERATION DEVICE
#5RESONATOR ELEMENT
#6RESONATOR ELEMENT
#7BULK ACOUSTIC WAVE RESONATOR, PATTERNED LAYER STRUCTURES, DEVICES AND SYSTEMS
#8THIN-FILM SUSPENDED MICROACOUSTIC RESONATORS FOR TIMING APPLICATIONS
#9BIMORPH MICROELECTROMECHANICAL SYSTEMS (MEMS) INTEGRATION FOR ANALOG TUNABILITY IN METASURFACES
#10DUAL-MODE MEMS RESONATORS WITH LOW SUPPORT LOSS
#11TUNING-FORK-TYPE DRIVING ELEMENT AND LIGHT DEFLECTION ELEMENT
#12SYSTEMS, ACOUSTIC WAVE STRUCTURES, AND DEVICES
#13ACOUSTIC REFLECTOR AND RESONATOR STRUCTURES, DEVICES AND SYSTEMS
#14Microelectromechanical resonator
#15RESONANCE DEVICE
#16ACOUSTIC WAVE DEVICE WITH LAYER STRUCTURES, DEVICES AND SYSTEMS
#17RESONATOR AND RESONATOR DRIVE METHOD
#18DOPED ACOUSTIC WAVE RESONATORS, STRUCTURES, DEVICES AND SYSTEMS
#19ACOUSTIC STRUCTURES, DEVICES, FILTERS AND SYSTEMS
#20Microelectromechanical resonator
#21RESONANT STRUCTURE IN MICRO ELECTRO MECHANICAL SYSTEMS
#22TEMPERATURE COMPENSATING ACOUSTIC WAVE STRUCTURES, DEVICES AND SYSTEMS
#23BULK ACOUSTIC WAVE RESONATOR WITH PATTERNED LAYER STRUCTURES, DEVICES AND SYSTEMS
#24MASS LOADED BULK ACOUSTIC WAVE RESONATOR STRUCTURES, DEVICES AND SYSTEMS
#25ACOUSTIC DEVICES, STRUCTURES AND SYSTEMS
#26SYSTEMS, STRUCTURES, ACOUSTIC WAVE RESONATORS AND DEVICES TO SENSE A TARGET VARIABLE
#27Three Dimensional Microstructures With Selectively Removed Regions For Use In Gyroscopes And Other Devices
#28RESONANCE DEVICE AND MANUFACTURING METHOD FOR THE SAME
#29RESONANCE DEVICE, COLLECTIVE BOARD, AND MANUFACTURING METHOD FOR RESONANCE DEVICE
#30Bulk acoustic wave (BAW) resonator structures, devices and systems
#31Systems And Methods Resulting From The Parametric Coupling Of Mechanical And Electrical Resonator Assemblies And Systems And Methods To Parametrically Couple The Assemblies
#32VIBRATOR DEVICE
#33Clock device
#34Electromechanical resonators based on metal-chalcogenide nanotubes
#35Microelectromechanical resonator
#36Microelectromechanical resonator
#37STRUCTURES, ACOUSTIC WAVE RESONATORS, DEVICES AND SYSTEMS
#38Temperature compensating bulk acoustic wave (BAW) resonator structures, devices and systems
#39Mass loaded bulk acoustic wave (BAW) resonator structures, devices, and systems
#40Bulk acoustic wave (BAW) resonator with patterned layer structures, devices and systems
#41Acoustic devices structures, filters and systems
#42Bulk acoustic wave (BAW) reflector and resonator structures, devices and systems
#43Acoustic devices with layer structures, devices and systems
#44Doped acoustic wave resonator structures, devices and systems
#45Bulk acoustic wave (BAW) resonator structures, devices, and systems
#46Acoustic device structures, devices and systems
#47Three dimensional microstructures with selectively removed regions for use in gyroscopes and other devices
#48Sensor interface including resonator and differential amplifier
#49Structures, acoustic wave resonators, devices and systems to sense a target variable
#50VIBRATOR ELEMENT
#51Multifunctional logic device and method
#52Super-regenerative transceiver with improved frequency discrimination
#53Resonator and resonance device including same
#54Micromechanical resonator and resonator system including the same
#55MEMS device having a connection portion formed of a eutectic alloy
#56Structures, acoustic wave resonators, devices and systems to sense a target variable, including as a non-limiting example corona viruses
#57Frequency-converting super-regenerative transceiver
#58Electromechanical resonators based on metal-chalcogenide nanotubes
#59Method for generating high order harmonic frequencies and MEMS resonator
#60Micro-electro-mechanical device with reduced temperature sensitivity and manufacturing method thereof
#61Resonance device
#62Spurious-mode-free, laterally-vibrating microelectromechanical system resonators
#63Resonator and resonant device
#64Vibrating beam accelerometer
#65Radiation-hard precision voltage reference
#66Microelectromechanical resonator
#67Mechanically-isolated in-plane pendulous vibrating beam accelerometer
#68Super-regenerative transceiver with improved frequency discrimination
#69Mechanical resonator based cascadable logic device
#70Guided wave devices with selectively loaded piezoelectric layers
#71Characterization and driving method based on the second harmonic, which is enhancing the quality factor and reducing the feedthrough current in varying gap electrostatic MEMS resonators
#72Resonator and resonator array
#73Thermal-piezoresistive oscillator-based aerosol sensor and aerosol sensing method
#74Distributed-mode beam and frame resonators for high frequency timing circuits
#75Frequency-converting super-regenerative transceiver
#76Pitch/roll annulus gyroscope with slanted quadrature tuning electrodes and related fabrication methods
#77Microelectromechanical resonator system with improved stability with respect to temperature variations
#78Drive mode and sense mode resonance frequency matching
#79Systems and methods for reducing the actuation voltage for electrostatic MEMS devices
#80Spurious-mode-free, laterally-vibrating microelectromechanical system resonators
#81Micro-electro-mechanical device with reduced temperature sensitivity and manufacturing method thereof
#82Stacked balanced resonators
#83Vibration transducer
#84Multi resonator system
#85Two-dimensional mode resonators
#86Multi-frequency excitation
#87Piezoelectric package-integrated crystal devices
#88Resonator manufacturing method
#89Guided wave devices with selectively loaded piezoelectric layers
#90Guided wave devices with sensors utilizing embedded electrodes
#91Mixed domain guided wave devices utilizing embedded electrodes
#92Guided wave devices with embedded electrodes and non-embedded electrodes
#93Guided wave devices with selectively thinned piezoelectric layers
#94Piezoelectric vibrator and piezoelectric vibration device
#95Resonator and resonating device
#96Ultra low power thermally-actuated oscillator and driving circuit thereof
#97Tunable Q resonator
#98Method of forming a resonator
#99Multiple coil spring MEMS resonator
#100Method and device for bi-state control of nonlinear resonators
#101Piezoresistive resonator with multi-gate transistor
#102Resonant body high electron mobility transistor
#103Frequency divider apparatus
#104Measurement system including a network of nanoelectromechanical system resonators
#105Micro-electro-mechanical transducer having an optimized non-flat surface
#106Micro-electro-mechanical transducer having an optimized non-flat surface
#107Micro-electro-mechanical transducer having an optimized non-flat surface
#108Method for detecting a perturbation by hysteretic cycle using a nonlinear electromechanical resonator and device using the method
#109Mixer
#110Junctionless nano-electro-mechanical resonant transistor
#111MEMS/NEMS device comprising a network of electrostatically actuated resonators and having an adjustable frequency response, notably for a band-pass filter
#112Radiation-hard precision voltage reference
#113Piezoelectric device and electronic apparatus
#114Suspended passive element for MEMS devices
#115Monolithic body MEMS devices
#116Temperature compensation for MEMS devices
#117Microelectromechanical resonator
#118Volume wave resonator using excitation/detection of vibrations
#119Rotational MEMS resonator for oscillator applications
#120Microelectromechanical resonators
#121Mixer
#122Resonator electrode shields
#123Micromechanical resonator oscillator structure and driving method thereof
#124Piezo-resistive MEMS resonator
#125Micromechanical resonators
#126Device with suspended beam and piezoresistive means of detecting displacement of the beam and method of manufacturing the device
#127Methods and apparatus for mechanical resonating structures
#128Resonant device with piezoresistive detection and with a resonator connected elastically to the support of the device, and method for manufacturing the device
#129In-plane actuated resonant device and method of manufacturing the device
#130Inter-digital bulk acoustic resonator
#131MEMS resonator and electrical device using the same
#132Switchable electrode for power handling
#133MEMS resonator
#134MEMS resonator and method of controlling the same
#135Resonator and method of controlling the same
#136Micromechanical Resonator
#137MEMS vibrating-beam accelerometer with piezoelectric drive
#138MEMS oscillator
#139Micromechanical resonating devices and related methods
#140Acoustic galvanic isolation device
#141Thermal-mechanical signal processing
#142MEMS oscillator
#143Micro-electro-mechanical transducer having an optimized non-flat surface
#144MICRORESONATOR, RESONATOR SENSOR WITH SUCH MICRORESONATOR, AND SENSOR ARRAY COMPRISING AT LEAST TWO SUCH MICRORESONATORS
#145Method and device for suppressing hysteresis of resonators through simultaneous resonance
#146Frame-shaped MEMS piezoresistive resonator
#147MEMS resonator array structure and method of operating and using same
#148Electromechanical transducer and a method of providing an electromechanical transducer
#149Piezo-resistive MEMS resonator
#150Tunable multiwalled nanotube resonator
#151Resonator and oscillator using same
#152Micro-electro-mechanical transducer having a surface plate
#153Oscillator having micro-electromechanical resonators and driver circuits therein that support in-phase and out-of-phase signals
#154Microelectromechanical resonant structure having improved electrical characteristics
#155Piezoresistive strain sensor based nanowire mechanical oscillator
#156MEMS resonator for filtering and mixing
#157Micromechanical resonator with enlarged portion
#158MEMS resonators having resonator bodies therein with concave-shaped sides that support high quality factor and low temperature coefficient of resonant frequency
#159Frequency selection and amplifying device
#160Resonant body transistor and oscillator
#161Resonator electrode shields
#162Highly efficient, charge depletion-mediated, voltage-tunable actuation efficiency and resonance frequency of piezoelectric semiconductor nanoelectromechanical systems resonators
#163MEMS resonator including main and sub movable beams, and exciting electrodes excited by alternating-current signal
#164Resonator and a method of manufacturing the same, and oscillator and electronic apparatus including the same
#165MEMS device and manufacturing method thereof
#166OSCILLATING STRUCTURE AND OSCILLATOR DEVICE USING THE SAME
#167Vibrating nano-scale or micro-scale electromechanical component with enhanced detection level
#168MEMS resonators
#169Resonator having a sideways oscillation compressing one connector while extending another
#170Wiring nanoscale sensors with nanomechanical resonators
#171Transistor-based micrometric or nanometric resonant device
#172MEMS ultrasonic device having a PZT and cMUT
#173Logical element
#174MEMS resonator having at least one resonator mode shape
#175INTEGRATED MEMS AND IC SYSTEMS AND RELATED METHODS
#176Pressure gauge
#177Resonator and filter using the same
#178Patterned Functionalization of Nanomechanical Resonators for Chemical Sensing
#179Thin-film piezoelectric-on-insulator resonators having perforated resonator bodies therein
#180Micromechanical resonating devices and related methods
#181Micro-electro-mechanical transducer having a surface plate
#182Tunable multiwalled nanotube resonator
#183Magnetic nano-resonator
#184Torsional resonator and filter using this
#185SEMICONDUCTOR DEVICE TRANSDUCER AND METHOD
#186Resonator having an output electrode underneath first and second electrode arms
#187Micro-electro-mechanical transducer having embedded springs
#188MEMS resonator array structure and method of operating and using same
#189Single-resonator dual-frequency lateral-extension mode piezoelectric oscillators, and operating methods thereof
#190Microsystem comprising a bending beam and process of manufacture
#191Nano-electromechanical circuit using co-planar transmission line
#192Piezo-resistive detection resonant device made using surface technologies
#193Piezo-on-diamond resonators and resonator systems
#194Low-voltage MEMS oscillator
#195Apparatus and method using capacitive detection with inherent self-calibration
#196Serrated MEMS resonators
#197Serrated MEMS resonators
#198PIEZOELECTRIC OSCILLATOR AND METHOD FOR MANUFACTURING THE SAME, AND MEMS DEVICE AND METHOD FOR MANUFACTURING THE SAME
#199Microelectromechanical resonator structure, and method of designing, operating and using same
#200Electromechanical filter utilizing a quantum device and sensing electrode
#201Torsion resonator and filter using this
#202Temperature compensation for silicon MEMS resonator
#203Resonant-oscillating-device fabrication method
#204Electric machine signal selecting element
#205MEMS device annealing
#206Dielectrically transduced single-ended to differential MEMS filter
#207MEMS resonator and method of enhancing an output signal current from a MEMS resonator
#208Flap resonator, method of manufacturing a flap resonator, and integrated circuit including the flap resonator
#209Thermoelastically actuated microresonator
#210Breath-mode ring resonator structure, and method of designing, operating and using same
#211MEMS acoustic filter and fabrication of the same
#212Integrated resonators and time base incorporating said resonators
#213Micro electric machine system resonator, drive method thereof, manufacturing method thereof, and frequency filter
#214Micromachine and method of fabricating the same
#215Microelectromechanical resonator structure, and method of designing, operating and using same
#216Shell type actuator
#217Thermal-mechanical signal processing
#218Temperature compensation for silicon MEMS resonator
#219MEMS oscillator drive
#220Transducer and electronic device
#221Microresonator, manufacturing method, and electronic apparatus
#222Internal electrostatic transduction structures for bulk-mode micromechanical resonators
#223Electromechanical electron transfer devices
#224Temperature compensation for silicon MEMS resonator
#225Micromechanical electrostatic resonator
#226Resonator electrode shields
#227Resonator electrode shields
#228MEMS-tunable optical ring resonator
#229Resonator electrode shields
#230Resonator electrode shields
#231Radiation-hard precision voltage reference
#232Micromechanical devices based on piezoelectric resonators
#233Differential split-electrode feedthrough cancellation mechanism
#234Micro-resonator having lid-integrated electrode
#235Vertical differential resonator
#236Resonator electrode shields
#237Vertical differential resonator
#238Temperature compensated resonator with a pair of spaced apart internal dielectric layers