220551 ⎘
Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators; Details of microelectro-mechanical resonators; Driving or detection means Comb electrodes
MEMS RESONATOR
#2ACOUSTIC WAVE ELEMENT, ACOUSTIC WAVE FILTER DEVICE, AND MULTIPLEXER
#3Laterally Vibrating Bulk Acoustic Wave Resonator
#4PLATE WAVE DEVICES WITH WAVE CONFINEMENT STRUCTURES AND FABRICATION METHODS
#5Acoustic resonator
#6ELASTIC WAVE DEVICE, SPLITTER, AND COMMUNICATION APPARATUS
#7Reconfigurable resonator devices, methods of forming reconfigurable resonator devices, and operations thereof
#8Surface acoustic wave device, filter circuit, and electronic component
#9Saw filter manufacturing method and saw filter
#10Acoustic wave filter, multiplexer, radio frequency front-end circuit, and communication device
#11Multiplexer, radio-frequency front end circuit, and communication device
#12Multiplexer, radio-frequency front end circuit, and communication device
#13Multiplexer, high-frequency front-end circuit, and communication device
#14Laterally vibrating bulk acoustic wave resonator
#15ACOUSTIC WAVE ELEMENT, ACOUSTIC WAVE FILTER DEVICE, AND MULTIPLEXER
#16Plate wave devices with wave confinement structures and fabrication methods
#17Multi-frequency guided wave devices and fabrication methods
#18Guided wave devices with selectively loaded piezoelectric layers
#19Direct write sensors
#20Acoustic resonator
#21Elastic wave element and elastic wave filter device
#22MEMS resonator with suppressed spurious modes
#23Microelectromechanical resonant circulator
#24Resonator
#25Resonator device
#26Solidly mounted layer thin film device with grounding layer
#27MEMS device oscillating about two axes and having a position detecting system, in particular of a piezoresistive type
#28Uncooled, high sensitivity spectral selective infrared detector
#29Guided wave devices with selectively loaded piezoelectric layers
#30Guided wave devices with sensors utilizing embedded electrodes
#31Mixed domain guided wave devices utilizing embedded electrodes
#32Guided wave devices with embedded electrodes and non-embedded electrodes
#33Guided wave devices with selectively thinned piezoelectric layers
#34MEMS resonator
#35Direct write sensors
#36One-port surface elastic wave resonator on high permittivity substrate
#37Plate wave devices with wave confinement structures and fabrication methods
#38Multi-frequency guided wave devices and fabrication methods
#39Plate wave devices with wave confinement structures and fabrication methods
#40Resonator
#41Method of manufacturing a mechanical resonating structure
#42Rotational MEMS resonator for oscillator applications
#43Tunable and switchable resonator and filter structures in single crystal piezoelectric MEMS devices using bimorphs
#44Variable capacitor and switch structures in single crystal piezoelectric MEMS devices using bimorphs
#45Micromechanical resonator
#46Micromechanical resonating devices and related methods
#47MICROMECHANICAL MEMBRANES AND RELATED STRUCTURES AND METHODS
#48Method of manufacturing a resonating structure
#49Micromechanical resonator
#50Electromechanical transducer and a method of providing an electromechanical transducer
#51MEMS vibrating structure using a single-crystal piezoelectric thin-film layer having domain inversions
#52MEMS resonator for filtering and mixing
#53Drive element and method for operating a drive element
#54MICROMECHANICAL COMPONENT AND METHOD FOR OPERATING A MICROMECHANICAL COMPONENT
#55Micro-electromechanical resonators having electrically-trimmed resonator bodies therein and methods of fabricating same using joule heating
#56Micromechanical resonating devices and related methods
#57Oscillating mass resonator
#58Micromechanical resonator
#59Serrated MEMS resonators
#60Serrated MEMS Resonators
#61MEMS resonator using frequency tuning
#62Reconfigurable MEMS devices, methods of forming reconfigurable MEMS devices, and methods for reconfiguring frequencies of a MEMS device
#63Differential split-electrode feedthrough cancellation mechanism
#64Microresonator electrode design