220573 ⎘
Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators; Details of microelectro-mechanical resonators; Means for compensation or elimination of undesired effects of temperature influence
WAFER-LEVEL-PACKAGED SILICON-PIEZOELECTRIC RESONATOR
#2MEMS RESONATOR WITH TEMPERATURE COMPENSATION
#3MEMS VIBRATOR
#4PIEZOELECTRIC RESONATOR WITH BUILT-IN TEMPERATURE SENSOR AND REFERENCE SIGNAL GENERATION DEVICE
#5RESONATOR ELEMENT
#6RESONATOR ELEMENT
#7PLATE MODE MICROACOUSTIC FILTERS INCLUDING BILATERAL TEMPERATURE COEFFICIENT OF FREQUENCY (TCF) LAYERS
#8SELF-REFERENCING MICROELECTROMECHANICAL SYSTEMS (MEMS) RESONATOR WITH DUAL MECHANICAL MODES FOR TEMPERATURE-INDEPENDENT ENVIRONMENTAL SENSING
#9Microelectromechanical resonator
#10Piezo-actuated MEMS
#11METAL RIBS IN ELECTROMECHANICAL DEVICES
#12DUAL RESONATOR STRUCTURE FOR OVEN-CONTROLLED MEMS OSCILLATORS, INCLUDING RELATED APPARATUSES
#13DUAL RESONATOR STRUCTURE FOR TEMPERATURE-COMPENSATED OSCILLATORS, INCLUDING RELATED APPARATUSES
#14MEMS RESONATOR
#15MEMS Resonator Arrangement
#16Suspension for Resonators and MEMS Devices
#17Microelectromechanical resonator
#18TEMPERATURE-STABLE MEMS RESONATOR
#19Microelectromechanical Devices For Higher Order Passive Temperature Compensation and Methods of Designing Thereof
#20DUAL-OUTPUT MICROELECTROMECHANICAL RESONATOR AND METHOD OF MANUFACTURE AND OPERATION THEREOF
#21FILTER MODULE WITH ENHANCED TEMPERATURE RUGGEDNESS IN SMALLER SIZE
#22Piezo-actuated MEMS resonator with reduced nonlinear tcf
#23RESONATOR AND RESONANCE DEVICE
#24MEMS RESONATOR WITH TEMPERATURE COMPENSATION
#25MEMS resonator with high quality factor and its use
#26Metal ribs in electromechanical devices
#27Dual-output microelectromechanical resonator and method of manufacture and operation thereof
#28Microelectromechanical resonator
#29Temperature-controlled radio-frequency resonator and corresponding radio-frequency oscillator
#30Dual-output microelectromechanical resonator and method of manufacture and operation thereof
#31Clock Oscillator and Method for Preparing Clock Oscillator
#32Spring-mass microelectromechanical resonator
#33Microelectromechanical resonator
#34Acoustic resonator
#35Metal ribs in electromechanical devices
#36Resonance device
#37VIBRATOR ELEMENT
#38Dual-output microelectromechanical resonator and method of manufacture and operation thereof
#39Resonator and resonance device including same
#40Resonator and resonance device
#41Piezo-actuated MEMS resonator
#42MEMS resonator array arrangement
#43Resonator and resonance device
#44Micro-electro-mechanical device with reduced temperature sensitivity and manufacturing method thereof
#45Oscillator, electronic apparatus, and vehicle
#46Resonance device
#47Frequency reference oscillator device and method of stabilizing a frequency reference signal
#48Resonator and resonance device
#49Radiation-hard precision voltage reference
#50Microelectromechanical resonator
#51Resonance device
#52Distributed-mode beam and frame resonators for high frequency timing circuits
#53Acoustic resonator
#54Micromechanical resonator and method for trimming micromechanical resonator
#55Micromechanical resonator
#56Resonator with liquid crystal and compensating element
#57Microelectromechanical resonator system with improved stability with respect to temperature variations
#58Low-power microelectromechanical system resonator based oscillator using impedance transformation
#59Oven controlled MEMS oscillator and system and method for calibrating the same
#60Resonator and resonance device
#61Acoustic wave device
#62Micro-electro-mechanical device with reduced temperature sensitivity and manufacturing method thereof
#63Piezo-actuated MEMS resonator with surface electrodes
#64Microelectronic structure comprising means of control of viscous damping
#65Resonator, oscillator, electronic apparatus, and vehicle
#66Vibration transducer
#67Temperature-compensated micro-electromechanical device, and method of temperature compensation in a micro-electromechanical device
#68Oven controlled MEMS oscillator
#69Temperature-engineered MEMS resonator
#70Piezoelectric thin film and piezoelectric vibrator
#71Temperature compensated acoustic resonator device having thin seed interlayer
#72Piezoelectric vibrator and piezoelectric vibration device
#73Micro-electromechanical resonators and methods of providing a reference frequency
#74MEMS device
#75Crystal device
#76Resonation device, oscillator, electronic apparatus, and moving object
#77Vibration device and manufacturing method of the same
#78Electronic device, electronic apparatus, and moving object
#79Vibration device
#80Temperature compensated plate resonator
#81Temperature compensated beam resonator
#82Temperature compensated compound resonator
#83Vibrating device
#84Active type temperature compensation resonator structure
#85Resonator with reduced sensitivity to climatic variations
#86Method of manufacturing a temperature-compensated micro-electromechanical device
#87Resonator with a staggered electrode configuration
#88Vibrating device and manufacturing method therfor
#89Mechanical resonating structures including a temperature compensation structure
#90Ceramic temperature-compensated resonator
#91Resonator thermocompensated by a shape-memory metal
#92Micromechanical devices comprising n-type doping agents
#93Methods and apparatus for temperature control of devices and mechanical resonating structures
#94MEMS resonator devices
#95Micromechanical resonators
#96Control of multi-temperature micro-oven for MEMS devices
#97Micromechanical resonator and method for manufacturing thereof
#98Ovenized System Containing Micro-Electromechanical Resonator
#99Method of manufacturing a temperature-compensated micromechanical resonator
#100Temperature compensation in a semiconductor micromechanical resonator via charge carrier depletion
#101Method of manufacturing a microelectromechanical system (MEMS) resonator
#102Micromechanical device including N-type doping for providing temperature compensation and method of designing thereof
#103Dual-Sensor Temperature Stabilization for Integrated Electrical Component
#104MEMS resonator and method of controlling the same
#105At least first and second order temperature-compensated resonator
#106Micromechanical Resonator
#107Temperature compensated oscillator including MEMS resonator for frequency control
#108MEMS resonator
#109Mechanical resonating structures including a temperature compensation structure
#110Mechanical resonating structures including a temperature compensation structure
#111Mechanical resonating structures including a temperature compensation structure
#112Micromechanical resonator array and method for manufacturing thereof
#113Circuit for compensating influence of temperature on a resonator
#114MEMS resonator devices
#115Resonator
#116First and second orders temperature-compensated resonator
#117MEMS resonators
#118MEMS resonator
#119Temperature Compensation Device and Method for MEMS Resonator
#120Resonator
#121Resonator
#122MEMS resonators having resonator bodies therein with concave-shaped sides that support high quality factor and low temperature coefficient of resonant frequency
#123Methods of forming micromechanical resonators having high density trench arrays therein that provide passive temperature compensation
#124Methods and apparatus for temperature control of devices and mechanical resonating structures
#125Mechanical oscillator having an optimized thermoelastic coefficient
#126Mechanical resonating structures including a temperature compensation structure
#127MEMS resonator devices with a plurality of mass elements formed thereon
#128Temperature compensated piezoelectric oscillator
#129Temperature-compensated micro-electromechanical device, and method of temperature compensation in a micro-electromechanical device
#130BULK MODE RESONATOR
#131Methods and devices for compensating a signal using resonators
#132MEMS resonator, a method of manufacturing thereof, and a MEMS oscillator
#133Method for fabricating a microelectromechanical system (MEMS) resonator
#134MEMS resonator, a method of manufacturing thereof, and a MEMS oscillator
#135MEMS resonator array structure
#136Low frequency process-variation-insensitive temperature-stable micromechanical resonators
#137Temperature measurement system having a plurality of microelectromechanical resonators and method of operating same
#138Temperature controlled MEMS resonator and method for controlling resonator frequency
#139Microelectromechanical resonator structure, and method of designing, operating and using same
#140Microelectromechanical oscillator and method of operating same
#141Microelectromechanical oscillator having temperature measurement system, and method of operating same
#142Electromechanical transducer and electrical device
#143Oscillator system having a plurality of microelectromechanical resonators and method of designing, controlling or operating the same
#144Oscillator system having a plurality of microelectromechanical resonators and method of designing, controlling or operating same
#145Temperature compensation for silicon MEMS resonator
#146Parametric resonator and filter using the same
#147Integrated resonators and time base incorporating said resonators
#148MEMS resonator array structure and method of operating and using same
#149Microelectromechanical resonator structure, and method of designing, operating and using same
#150Temperature compensated oscillator including MEMS resonator for frequency control
#151Temperature compensation for silicon MEMS resonator
#152Temperature-compensated micro-electromechanical device, and method of temperature compensation in a micro-electromechanical device
#153Capacitive vertical silicon bulk acoustic resonator
#154Temperature controlled MEMS resonator and method for controlling resonator frequency
#155Temperature controlled MEMS resonator and method for controlling resonator frequency
#156Temperature compensation for silicon MEMS resonator
#157Temperature-reporting oscillator
#158Techniques for adding compensating material(s) in semiconductor devices
#159Resonant elements and oscillators
#160Temperature-reporting oscillator
#161Temperature stable MEMS resonator
#162Temperature-reporting oscillator
#163MEMS resonator with beam segments having predefined angular offset to each other and to resonator silicon crystal orientation
#164Temperature stable MEMS resonator
#165Temperature-reporting oscillator
#166Temperature-reporting oscillator
#167Micromechanical device and related methods
#168Temperature stable MEMS resonator
#169Multi-die integrated circuit package
#170Temperature stable MEMS resonator
#171Radiation-hard precision voltage reference
#172Temperature stable MEMS resonator
#173Temperature-engineered MEMS resonator
#174Temperature stable MEMS resonator
#175Temperature insensitive resonant elements and oscillators and methods of designing and manufacturing same
#176Vertical differential resonator
#177Temperature compensated resonator with a pair of spaced apart internal dielectric layers