ClassID:

220573

H03H9/02448 - CPC Classification

Classification description:

Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators; Details of microelectro-mechanical resonators; Means for compensation or elimination of undesired effects of temperature influence

Recent Application in this class:
#1
20260142643
2026-05-21

WAFER-LEVEL-PACKAGED SILICON-PIEZOELECTRIC RESONATOR

#2
20260142640
2026-05-21

MEMS RESONATOR WITH TEMPERATURE COMPENSATION

#3
20260091972
2026-04-02

MEMS VIBRATOR

#4
20260019059
2026-01-15

PIEZOELECTRIC RESONATOR WITH BUILT-IN TEMPERATURE SENSOR AND REFERENCE SIGNAL GENERATION DEVICE

#5
20260005667
2026-01-01

RESONATOR ELEMENT

#6
20260005666
2026-01-01

RESONATOR ELEMENT

#7
20250385655
2025-12-18

PLATE MODE MICROACOUSTIC FILTERS INCLUDING BILATERAL TEMPERATURE COEFFICIENT OF FREQUENCY (TCF) LAYERS

#8
20250317117
2025-10-09

SELF-REFERENCING MICROELECTROMECHANICAL SYSTEMS (MEMS) RESONATOR WITH DUAL MECHANICAL MODES FOR TEMPERATURE-INDEPENDENT ENVIRONMENTAL SENSING

#9
20250239989
2025-07-24

Microelectromechanical resonator

#10
20250239984
2025-07-24

Piezo-actuated MEMS

#11
20250096768
2025-03-20

METAL RIBS IN ELECTROMECHANICAL DEVICES

#12
20250080050
2025-03-06

DUAL RESONATOR STRUCTURE FOR OVEN-CONTROLLED MEMS OSCILLATORS, INCLUDING RELATED APPARATUSES

#13
20250080049
2025-03-06

DUAL RESONATOR STRUCTURE FOR TEMPERATURE-COMPENSATED OSCILLATORS, INCLUDING RELATED APPARATUSES

#14
20250070745
2025-02-27

MEMS RESONATOR

#15
20250047261
2025-02-06

MEMS Resonator Arrangement

#16
20250011162
2025-01-09

Suspension for Resonators and MEMS Devices

#17
20250007492
2025-01-02

Microelectromechanical resonator

#18
20240339985
2024-10-10

TEMPERATURE-STABLE MEMS RESONATOR

#19
20240294372
2024-09-05

Microelectromechanical Devices For Higher Order Passive Temperature Compensation and Methods of Designing Thereof

#20
20240253975
2024-08-01

DUAL-OUTPUT MICROELECTROMECHANICAL RESONATOR AND METHOD OF MANUFACTURE AND OPERATION THEREOF

#21
20240235518
2024-07-11

FILTER MODULE WITH ENHANCED TEMPERATURE RUGGEDNESS IN SMALLER SIZE

#22
20240223151
2024-07-04

Piezo-actuated MEMS resonator with reduced nonlinear tcf

#23
20240154600
2024-05-09

RESONATOR AND RESONANCE DEVICE

#24
20240007078
2024-01-04

MEMS RESONATOR WITH TEMPERATURE COMPENSATION

#25
20230412140
2023-12-21

MEMS resonator with high quality factor and its use

#26
20230396230
2023-12-07

Metal ribs in electromechanical devices

#27
20230183057
2023-06-15

Dual-output microelectromechanical resonator and method of manufacture and operation thereof

#28
20220337218
2022-10-20

Microelectromechanical resonator

#29
20220311384
2022-09-29

Temperature-controlled radio-frequency resonator and corresponding radio-frequency oscillator

#30
20220227619
2022-07-21

Dual-output microelectromechanical resonator and method of manufacture and operation thereof

#31
20220171426
2022-06-02

Clock Oscillator and Method for Preparing Clock Oscillator

#32
20220166406
2022-05-26

Spring-mass microelectromechanical resonator

#33
20220166403
2022-05-26

Microelectromechanical resonator

#34
20220085790
2022-03-17

Acoustic resonator

#35
20220069795
2022-03-03

Metal ribs in electromechanical devices

#36
20220029598
2022-01-27

Resonance device

#37
20210313960
2021-10-07

VIBRATOR ELEMENT

#38
20210276858
2021-09-09

Dual-output microelectromechanical resonator and method of manufacture and operation thereof

#39
20210203304
2021-07-01

Resonator and resonance device including same

#40
20210184646
2021-06-17

Resonator and resonance device

#41
20210159875
2021-05-27

Piezo-actuated MEMS resonator

#42
20210036686
2021-02-04

MEMS resonator array arrangement

#43
20210006230
2021-01-07

Resonator and resonance device

#44
20200373904
2020-11-26

Micro-electro-mechanical device with reduced temperature sensitivity and manufacturing method thereof

#45
20200287553
2020-09-10

Oscillator, electronic apparatus, and vehicle

#46
20200244222
2020-07-30

Resonance device

#47
20200220549
2020-07-09

Frequency reference oscillator device and method of stabilizing a frequency reference signal

#48
20200204149
2020-06-25

Resonator and resonance device

#49
20200028509
2020-01-23

Radiation-hard precision voltage reference

#50
20200028485
2020-01-23

Microelectromechanical resonator

#51
20190296712
2019-09-26

Resonance device

#52
20190222196
2019-07-18

Distributed-mode beam and frame resonators for high frequency timing circuits

#53
20190181830
2019-06-13

Acoustic resonator

#54
20190173451
2019-06-06

Micromechanical resonator and method for trimming micromechanical resonator

#55
20190173450
2019-06-06

Micromechanical resonator

#56
20190165762
2019-05-30

Resonator with liquid crystal and compensating element

#57
20190131952
2019-05-02

Microelectromechanical resonator system with improved stability with respect to temperature variations

#58
20190109561
2019-04-11

Low-power microelectromechanical system resonator based oscillator using impedance transformation

#59
20190103874
2019-04-04

Oven controlled MEMS oscillator and system and method for calibrating the same

#60
20190074812
2019-03-07

Resonator and resonance device

#61
20180358951
2018-12-13

Acoustic wave device

#62
20180342998
2018-11-29

Micro-electro-mechanical device with reduced temperature sensitivity and manufacturing method thereof

#63
20180226942
2018-08-09

Piezo-actuated MEMS resonator with surface electrodes

#64
20180183404
2018-06-28

Microelectronic structure comprising means of control of viscous damping

#65
20180175794
2018-06-21

Resonator, oscillator, electronic apparatus, and vehicle

#66
20180138887
2018-05-17

Vibration transducer

#67
20180118561
2018-05-03

Temperature-compensated micro-electromechanical device, and method of temperature compensation in a micro-electromechanical device

#68
20180019754
2018-01-18

Oven controlled MEMS oscillator

#69
20180019724
2018-01-18

Temperature-engineered MEMS resonator

#70
20170294894
2017-10-12

Piezoelectric thin film and piezoelectric vibrator

#71
20170288636
2017-10-05

Temperature compensated acoustic resonator device having thin seed interlayer

#72
20170201226
2017-07-13

Piezoelectric vibrator and piezoelectric vibration device

#73
20160352309
2016-12-01

Micro-electromechanical resonators and methods of providing a reference frequency

#74
20160322954
2016-11-03

MEMS device

#75
20160308508
2016-10-20

Crystal device

#76
20160204759
2016-07-14

Resonation device, oscillator, electronic apparatus, and moving object

#77
20160197597
2016-07-07

Vibration device and manufacturing method of the same

#78
20160156330
2016-06-02

Electronic device, electronic apparatus, and moving object

#79
20160111627
2016-04-21

Vibration device

#80
20160099704
2016-04-07

Temperature compensated plate resonator

#81
20160099703
2016-04-07

Temperature compensated beam resonator

#82
20160099702
2016-04-07

Temperature compensated compound resonator

#83
20160064642
2016-03-03

Vibrating device

#84
20150326199
2015-11-12

Active type temperature compensation resonator structure

#85
20150301502
2015-10-22

Resonator with reduced sensitivity to climatic variations

#86
20150284243
2015-10-08

Method of manufacturing a temperature-compensated micro-electromechanical device

#87
20150256143
2015-09-10

Resonator with a staggered electrode configuration

#88
20150180449
2015-06-25

Vibrating device and manufacturing method therfor

#89
20150091412
2015-04-02

Mechanical resonating structures including a temperature compensation structure

#90
20140313866
2014-10-23

Ceramic temperature-compensated resonator

#91
20140219067
2014-08-07

Resonator thermocompensated by a shape-memory metal

#92
20140077898
2014-03-20

Micromechanical devices comprising n-type doping agents

#93
20140062262
2014-03-06

Methods and apparatus for temperature control of devices and mechanical resonating structures

#94
20130293319
2013-11-07

MEMS resonator devices

#95
20130285676
2013-10-31

Micromechanical resonators

#96
20130222073
2013-08-29

Control of multi-temperature micro-oven for MEMS devices

#97
20130187724
2013-07-25

Micromechanical resonator and method for manufacturing thereof

#98
20130127552
2013-05-23

Ovenized System Containing Micro-Electromechanical Resonator

#99
20130106246
2013-05-02

Method of manufacturing a temperature-compensated micromechanical resonator

#100
20130099629
2013-04-25

Temperature compensation in a semiconductor micromechanical resonator via charge carrier depletion

#101
20120295384
2012-11-22

Method of manufacturing a microelectromechanical system (MEMS) resonator

#102
20120286903
2012-11-15

Micromechanical device including N-type doping for providing temperature compensation and method of designing thereof

#103
20120268216
2012-10-25

Dual-Sensor Temperature Stabilization for Integrated Electrical Component

#104
20120262241
2012-10-18

MEMS resonator and method of controlling the same

#105
20120230159
2012-09-13

At least first and second order temperature-compensated resonator

#106
20120229226
2012-09-13

Micromechanical Resonator

#107
20120229220
2012-09-13

Temperature compensated oscillator including MEMS resonator for frequency control

#108
20120075027
2012-03-29

MEMS resonator

#109
20120074810
2012-03-29

Mechanical resonating structures including a temperature compensation structure

#110
20120049980
2012-03-01

Mechanical resonating structures including a temperature compensation structure

#111
20120049965
2012-03-01

Mechanical resonating structures including a temperature compensation structure

#112
20120038431
2012-02-16

Micromechanical resonator array and method for manufacturing thereof

#113
20120032555
2012-02-09

Circuit for compensating influence of temperature on a resonator

#114
20120013412
2012-01-19

MEMS resonator devices

#115
20120001700
2012-01-05

Resonator

#116
20110305120
2011-12-15

First and second orders temperature-compensated resonator

#117
20110304405
2011-12-15

MEMS resonators

#118
20110215877
2011-09-08

MEMS resonator

#119
20110175492
2011-07-21

Temperature Compensation Device and Method for MEMS Resonator

#120
20110127625
2011-06-02

Resonator

#121
20110080224
2011-04-07

Resonator

#122
20110050366
2011-03-03

MEMS resonators having resonator bodies therein with concave-shaped sides that support high quality factor and low temperature coefficient of resonant frequency

#123
20100319185
2010-12-23

Methods of forming micromechanical resonators having high density trench arrays therein that provide passive temperature compensation

#124
20100315179
2010-12-16

Methods and apparatus for temperature control of devices and mechanical resonating structures

#125
20100290320
2010-11-18

Mechanical oscillator having an optimized thermoelastic coefficient

#126
20100182102
2010-07-22

Mechanical resonating structures including a temperature compensation structure

#127
20100176897
2010-07-15

MEMS resonator devices with a plurality of mass elements formed thereon

#128
20100123524
2010-05-20

Temperature compensated piezoelectric oscillator

#129
20100107391
2010-05-06

Temperature-compensated micro-electromechanical device, and method of temperature compensation in a micro-electromechanical device

#130
20100019869
2010-01-28

BULK MODE RESONATOR

#131
20090243747
2009-10-01

Methods and devices for compensating a signal using resonators

#132
20090219104
2009-09-03

MEMS resonator, a method of manufacturing thereof, and a MEMS oscillator

#133
20090158566
2009-06-25

Method for fabricating a microelectromechanical system (MEMS) resonator

#134
20090121808
2009-05-14

MEMS resonator, a method of manufacturing thereof, and a MEMS oscillator

#135
20080218295
2008-09-11

MEMS resonator array structure

#136
20080186109
2008-08-07

Low frequency process-variation-insensitive temperature-stable micromechanical resonators

#137
20080007362
2008-01-10

Temperature measurement system having a plurality of microelectromechanical resonators and method of operating same

#138
20070296527
2007-12-27

Temperature controlled MEMS resonator and method for controlling resonator frequency

#139
20070296526
2007-12-27

Microelectromechanical resonator structure, and method of designing, operating and using same

#140
20070290764
2007-12-20

Microelectromechanical oscillator and method of operating same

#141
20070290763
2007-12-20

Microelectromechanical oscillator having temperature measurement system, and method of operating same

#142
20070262831
2007-11-15

Electromechanical transducer and electrical device

#143
20070247246
2007-10-25

Oscillator system having a plurality of microelectromechanical resonators and method of designing, controlling or operating the same

#144
20070247245
2007-10-25

Oscillator system having a plurality of microelectromechanical resonators and method of designing, controlling or operating same

#145
20070188269
2007-08-16

Temperature compensation for silicon MEMS resonator

#146
20070176701
2007-08-02

Parametric resonator and filter using the same

#147
20070024158
2007-02-01

Integrated resonators and time base incorporating said resonators

#148
20070001783
2007-01-04

MEMS resonator array structure and method of operating and using same

#149
20060261915
2006-11-23

Microelectromechanical resonator structure, and method of designing, operating and using same

#150
20060261703
2006-11-23

Temperature compensated oscillator including MEMS resonator for frequency control

#151
20060186971
2006-08-24

Temperature compensation for silicon MEMS resonator

#152
20060086995
2006-04-27

Temperature-compensated micro-electromechanical device, and method of temperature compensation in a micro-electromechanical device

#153
20060044078
2006-03-02

Capacitive vertical silicon bulk acoustic resonator

#154
20060033594
2006-02-16

Temperature controlled MEMS resonator and method for controlling resonator frequency

#155
20050195050
2005-09-08

Temperature controlled MEMS resonator and method for controlling resonator frequency

#156
20050162239
2005-07-28

Temperature compensation for silicon MEMS resonator

#157
18794222
2026-06-02

Temperature-reporting oscillator

#158
18449089
2025-05-13

Techniques for adding compensating material(s) in semiconductor devices

#159
18402483
2025-08-19

Resonant elements and oscillators

#160
18130843
2024-09-24

Temperature-reporting oscillator

#161
17901748
2023-09-19

Temperature stable MEMS resonator

#162
17561009
2023-05-09

Temperature-reporting oscillator

#163
17384535
2024-02-13

MEMS resonator with beam segments having predefined angular offset to each other and to resonator silicon crystal orientation

#164
17363386
2022-10-11

Temperature stable MEMS resonator

#165
17061413
2022-02-08

Temperature-reporting oscillator

#166
16402161
2020-11-10

Temperature-reporting oscillator

#167
16109082
2022-02-01

Micromechanical device and related methods

#168
15916088
2020-01-21

Temperature stable MEMS resonator

#169
15627049
2023-11-07

Multi-die integrated circuit package

#170
15387375
2018-04-17

Temperature stable MEMS resonator

#171
15175884
2019-02-05

Radiation-hard precision voltage reference

#172
14863337
2017-01-17

Temperature stable MEMS resonator

#173
14617753
2017-07-11

Temperature-engineered MEMS resonator

#174
14191939
2015-09-29

Temperature stable MEMS resonator

#175
13759013
2017-07-04

Temperature insensitive resonant elements and oscillators and methods of designing and manufacturing same

#176
13294950
2014-11-04

Vertical differential resonator

#177
13287068
2016-08-30

Temperature compensated resonator with a pair of spaced apart internal dielectric layers