220724 ⎘
Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators; Constructional features of resonators consisting of piezo-electric or electrostrictive material having a single resonator implemented with thin-film techniques, i.e. of the film bulk acoustic resonator [FBAR] type
Sub-classes:Edge Treatment for Spurious Mode Suppression in Thin-Film LiNbO3
#2THIN-FILM SUSPENDED MICROACOUSTIC RESONATORS FOR TIMING APPLICATIONS
#3TRANSVERSELY-EXCITED FILM BULK ACOUSTIC RESONATOR WITH OPTIMIZED PIEZOELECTRIC PLATE THICKNESS
#4BULK ACOUSTIC WAVE RESONANT STRUCTURE AND PREPARATION METHOD THEREFOR, AND ACOUSTIC WAVE DEVICE
#5STRAINED PIEZOELECTRIC DEVICES FOR RADIOFREQUENCY RESONATORS AND FABRICATION METHODS THEREOF
#6MULTI-GRADIENT RAISED FRAME IN BULK ACOUSTIC WAVE DEVICE
#7ACOUSTIC WAVE DEVICES WITH COMMON CERAMIC SUBSTRATE
#8ACOUSTIC RESONATOR DEVICES OPERATING AT HIGH-ORDER MODES
#9ACOUSTIC WAVE FILTER WITH BULK ACOUSTIC WAVE DEVICES HAVING MULTIPLE RAISED FRAME STRUCTURES
#10RESONATOR, FILTER, ELECTRONIC DEVICE, AND METHOD FOR MANUFACTURING RESONATOR
#11METHOD FOR FABRICATING FILM BULK ACOUSTIC RESONATOR (FBAR), FBAR, AND FILTER
#12RESONATOR AND RESONANCE DEVICE
#13BULK ACOUSTIC RESONATOR
#14Transversely-excited film bulk acoustic filters with symmetric layout
#15PIEZOELECTRIC FILM BULK ACOUSTIC RESONATOR
#16COMPACT HYBRID ACOUSTIC WAVE FILTER STRUCTURE
#17TRANSVERSELY-EXCITED FILM BULK ACOUSTIC RESONATOR USING YX-CUT LITHIUM NIOBATE FOR HIGH POWER APPLICATIONS
#18ACOUSTIC LOAD-LINE TUNING IN A WIRELESS TRANSMISSION CIRCUIT
#19SEMICONDUCTOR STRUCTURE AND METHOD FOR PREPARING SEMICONDUCTOR STRUCTURE, FILM BULK ACOUSTIC RESONATOR AND METHOD FOR PREPARING FILM BULK ACOUSTIC RESONATOR
#20ACOUSTIC RESONATOR AND MANUFACTURING METHOD THEREOF
#21GUARD RING TO ENHANCE PIEZOELECTRIC COUPLING COEFFICIENT FOR BAW DEVICE
#22Multiplexer including filter with two types of acoustic wave resonators
#23Fabrication method of film bulk acoustic resonator (FBAR) filter device
#24Transversely-excited film bulk acoustic resonator with optimized electrode thickness, mark, and pitch
#25Acoustic Resonator and Method of Forming the Same
#26PIEZOELECTRIC ELEMENT UNIT AND RESONATOR
#27METHOD FOR MANUFACTURING RESONANCE DEVICE, AND RESONANCE DEVICE
#28ACOUSTIC WAVE DEVICE
#29RESONANCE DEVICE, COLLECTIVE BOARD, AND MANUFACTURING METHOD FOR RESONANCE DEVICE
#30ACOUSTIC WAVE DEVICE
#31Method for fabricating an acoustic resonator device with perimeter structures
#32ELASTIC WAVE DEVICE AND COMMUNICATION DEVICE
#33Baw resonators with antisymmetric thick electrodes
#34FREQUENCY TUNABLE RF PHASE SHIFTER OR CIRCULATOR HAVING A WIDE-BAND SAW-MULTIFERROIC HYBRID DEVICE
#35ACOUSTIC WAVE DEVICE AND LADDER FILTER
#36BULK WAVE RESONATOR AND BANDPASS FILTER
#37ACOUSTIC WAVE FILTER
#38TRANSVERSELY-EXCITED FILM BULK ACOUSTIC RESONATORS WITH COUNTER CHIRPED INTERDIGITAL TRANSDUCERS (IDTs) FOR MECHANICAL AND PROCESS COMPENSATION
#39RESONANCE DEVICE AND RESONANCE DEVICE MANUFACTURING METHOD
#40BULK-ACOUSTIC WAVE RESONATOR
#41ATOMIC LAYER DEPOSITION IN ACOUSTIC WAVE RESONATORS
#42Transversely-excited film bulk acoustic filters with symmetric layout
#43Acoustic wave device
#44FILM BULK ACOUSTIC WAVE RESONATORS AND FILTERS WITH TRANSVERSE MODE SUPPRESSION
#45FILM BULK ACOUSTIC WAVE RESONATORS AND FILTERS WITH PERIPHERAL FILM FRAME
#46PASSBAND FILTER COMBINING RESONATORS OF A FIRST TYPE AND RESONATORS OF A SECOND TYPE
#47Acoustic resonator
#48ACOUSTIC WAVE DEVICE
#49ACOUSTIC WAVE RESONATOR AND DEVICE FOR WIRELESS COMMUNICATIONS
#50PIEZOELECTRIC FILM AND RESONATOR
#51METAL CAVITY FOR TRANSVERSELY-EXCITED FILM BULK ACOUSTIC RESONATOR (XBAR)
#52Film bulk acoustic resonator filter assembling and interconnecting method and electronic device
#53ACOUSTIC WAVE DEVICES WITH THERMAL BYPASS
#54ACOUSTIC WAVE DEVICE
#55ACOUSTIC WAVE DEVICES WITH IMPROVED HEAT MANAGEMENT
#56ACOUSTIC WAVE DEVICE
#57RADIO FREQUENCY ACOUSTIC WAVE DEVICE WITH IMBALANCED RAISED FRAME
#58Multi-radio filtering front-end circuitry for transceiver systems
#59Acoustic wave devices with common ceramic substrate
#60RF filter circuit including BAW resonators
#61Diplexer using decoupled transversely-excited film bulk acoustic resonators
#62THIN FILM PIEZOELECTRIC ACOUSTIC WAVE RESONATOR AND MANUFACTURING METHOD THEREFOR, AND FILTER
#63ELASTIC WAVE DEVICE
#64Method For Manufacturing Vibration Element
#65BULK ACOUSTIC WAVE DEVICE WITH REDUCED NON-LINEARITIES
#66Transversely-excited film bulk acoustic resonator with diaphragm support pedestals
#67Filter with bulk acoustic wave device having raised frame structure
#68FILTERS WITH BULK ACOUSTIC WAVE DEVICES
#69Transversely-excited film bulk acoustic resonator with optimized electrode thickness, mark, and pitch
#70Resonator using YX-cut lithium niobate for high power applications
#71Devices and methods related to film bulk acoustic resonators
#72Bulk acoustic wave resonator
#73Transversely-excited film bulk acoustic resonator with a front-side dielectric layer and optimized pitch and mark
#74Transversely-excited film bulk acoustic resonator with optimized piezoelectric plate thickness and having multiple pitches and marks
#75TRANSVERSELY-EXCITED FILM BULK ACOUSTIC RESONATOR WITH OPTIMIZED PIEZOELECTRIC PLATE THICKNESS
#76Air-gap type film bulk acoustic resonator
#77TRANSVERSELY-EXCITED FILM BULK ACOUSTIC RESONATOR WITH OPTIMIZED PIEZOELECTRIC PLATE THICKNESS AND ELECTRODE MARK AND PITCH
#78Transversely-excited film bulk acoustic resonator with multi-mark electrodes and optimized electrode thickness
#79Transversely-excited film bulk acoustic resonator with optimized electrode thickness, mark, and pitch
#80Transversely-excited film bulk acoustic resonator with optimized electrode mark, and pitch
#81Transversely-excited film bulk acoustic resonator with optimized electrode thickness, mark, and pitch
#82Film bulk acoustic resonator structure and fabricating method
#83Bulk acoustic wave device with raised frame structure
#84RESONATOR AND RESONANCE DEVICE
#85Multi-gradient raised frame in bulk acoustic wave device
#86Bulk acoustic wave device with multi-gradient raised frame
#87Acoustic resonator
#88Magnetoelectric Antenna Arrays
#89Method for fabricating an acoustic resonator device with perimeter structures
#90Filter assembly with two types of acoustic wave resonators
#91Resonator and resonance device for vibrating in a contour vibration mode
#92Micro-acoustic wafer-level package and method of manufacture
#93Transversely-excited film bulk acoustic resonator using YX-cut lithium niobate for high power applications
#94BULK-ACOUSTIC WAVE RESONATOR AND METHOD FOR FABRICATING BULK-ACOUSTIC WAVE RESONATOR
#95ACOUSTIC RESONATOR FILTER
#96High power acoustic resonators
#97Enhanced thrust from ion-propelled spacecraft via tethered ion blocker
#98Multi-radio filtering front-end circuitry for transceiver systems
#99FBAR filter with integrated cancelation circuit
#100High frequency, high power film bulk acoustic resonators
#101Structure and method of manufacture for acoustic resonator or filter devices using improved fabrication conditions and perimeter structure modifications
#102Resonator device
#103Wide bandwidth time division duplex transceiver
#104BAW resonators with antisymmetric thick electrodes
#105Method for fabricating an acoustic resonator device
#106Transversely-excited film bulk acoustic resonator with diaphragm support pedestals
#107High power transversely-excited film bulk acoustic resonators on rotated Z-cut lithium niobate
#108Transversely-excited film bulk acoustic filters with symmetric layout
#109Transversely-excited film bulk acoustic resonator using Y-X-cut lithium niobate for high power applications
#110Transversely-excited film bulk acoustic resonators for high power applications
#111Film bulk acoustic resonator
#112Method for forming film bulk acoustic resonator
#113Filter devices having high power transversely-excited film bulk acoustic resonators
#114METHODS OF MAKING ACOUSTIC WAVE DEVICES
#115Resonator devices and methods of fabricating resonator devices
#116Transversely-excited film bulk acoustic filters with symmetric layout
#117BAW resonators with antisymmetric thick electrodes
#118Resonance-frequency diverse metamaterials and metasurfaces
#119Thin-film bulk acoustic resonator and semiconductor apparatus comprising the same
#120Multi-radio filtering front-end circuitry for transceiver systems
#121Thin-film bulk acoustic resonator and semiconductor apparatus comprising the same
#122High power transversely-excited film bulk acoustic resonators on Z-cut lithium niobate
#123FRONT END SYSTEM HAVING AN ACOUSTIC WAVE RESONATOR (AWR) ON AN INTERPOSER SUBSTRATE
#124Bulk acoustic wave resonator with ceramic substrate
#125Acoustic wave devices with common glass substrate
#126Acoustic wave devices with common ceramic substrate
#127Spurious-mode-free, laterally-vibrating microelectromechanical system resonators
#128Acoustic resonator
#129FBAR-BASED LOCAL OSCILLATOR GENERATION
#130Electronic package including cavity formed by removal of sacrificial material from within a cap
#131Thin-film type package
#132Techniques for monolithic co-integration of thin-film bulk acoustic resonator devices and III-N semiconductor transistor devices
#133Filter
#134Film bulk acoustic resonator having suppressed lateral mode
#135Filter with antiresonance frequency correction
#136FBAR filter with integrated cancelation circuit
#137Transversely-excited film bulk acoustic resonators for high power applications
#138DIAMOND NANO RESONATOR SEMI CONDUCTOR
#139Electronic devices formed in a cavity between substrates
#140Tunable film bulk acoustic resonators and FBAR filters with digital to analog converters
#141Acoustic resonator and acoustic resonator filter including the same
#142Wideband piezoelectric filter with ladder-structure
#1435G n41 2.6 GHz band acoustic wave resonator RF filter circuit
#144Filter including bulk acoustic wave resonator
#145Multiplexer including filter with two types of acoustic wave resonators
#146Filter including two types of acoustic wave resonators
#147Acoustic wave filter including two types of resonators
#148Resonance device
#149Multi-radio filtering front-end circuitry for transceiver systems
#150Microwave switched multiplexer and a mobile telecommunications device including such a multiplexer
#151Microwave switched multiplexer and a mobile telecommunications device including such a multiplexer
#152Acoustic wave filter device, multiplexer, radio-frequency front end circuit, and communication device
#153Structure and method of manufacture for acoustic resonator or filter devices using improved fabrication conditions and perimeter structure modifications
#154Acoustic resonator
#155Film bulk acoustic resonator (FBAR) RF filter having epitaxial layers
#156Bulk acoustic resonator and filter
#157CONVERTER AND POWER DEVICE WITH SUCH A CONVERTER
#158Polymer lid wafer-level package with an electrically and thermally conductive pillar
#159BAW RESONATOR LESS PRONE TO SPURIOUS MODES, BAW FILTER, AND MANUFACTURING METHOD
#160Bulk acoustic wave resonators having a phononic crystal acoustic mirror
#161Acoustic resonator structure having an electrode with a cantilevered portion
#162Structure and method of manufacture for acoustic resonator or filter devices using improved fabrication conditions and perimeter structure modifications
#163Front end module for 5.6 GHz Wi-Fi acoustic wave resonator RF filter circuit
#164Method for fabricating an acoustic resonator device with perimeter structures
#165Structure and method of manufacture for acoustic resonator or filter devices using improved fabrication conditions and perimeter structure modifications
#166Spurious-mode-free, laterally-vibrating microelectromechanical system resonators
#167Bulk acoustic wave resonator
#168Acoustic resonator including extended cavity
#169RF resonator electrode and membrane combinations and method of fabrication
#170Acoustic wave device including interdigital electrodes covered by silicon oxynitride film
#171Filter circuit, multiplexer, and module
#172Filter and front end module including the same
#173Bulk mode microelectromechanical resonator devices and methods
#174Bulk acoustic wave resonator and filter including the same
#175Packaged resonator with polymeric air cavity package
#176MEMS resonator with suppressed spurious modes
#177Electronic devices formed in a cavity between substrates and including a via
#178METHODS OF MANUFACTURING ELECTRONIC DEVICES TO PREVENT WATER INGRESS DURING MANUFACTURE
#179Methods of manufacturing electronic devices formed in a cavity
#180Resonation device, oscillator, electronic apparatus, and moving object
#181Methods of manufacturing electronic devices formed in a cavity and including a via
#182Microelectromechanical resonant circulator
#183Filter including bulk acoustic wave resonator
#184Structure and method of manufacture for acoustic resonator or filter devices using improved fabrication conditions and perimeter structure modifications
#185BULK ACOUSTIC WAVE RESONATORS HAVING DOPED PIEZOELECTRIC MATERIAL AND A BUFFER LAYER
#186Wafer-level-packaged BAW devices with surface mount connection structures
#187Resonator element, resonator, and electronic device
#188Tunable film bulk acoustic resonators and filters with integrated biasing resistors
#189MEMS resonator with a high quality factor
#190Acoustic wave device and method of fabricating the same
#191Bulk acoustic resonator
#192Bulk acoustic resonator and filter
#193Piezoelectric MEMS resonator with a high quality factor
#194Low-loss tunable radio frequency filter
#195Bulk acoustic wave filter device and method of manufacturing the same
#196Multi-radio filtering front-end circuitry for transceiver systems
#197BULK ACOUSTIC WAVE RESONATOR HAVING A PLURALITY OF COMPENSATION LAYERS AND DUPLEXER USING SAME
#198Film bulk acoustic wave resonator (FBAR) having stress-relief
#199Piezoelectric thin film resonator, filter, and multiplexer
#200Acoustic wave device
#201Temperature compensated acoustic resonator device having thin seed interlayer
#202Electronic package including cavity formed by removal of sacrificial material from within a cap
#203Resonation device, oscillator, electronic apparatus, and moving object
#204Resonator manufacturing method
#205Bulk acoustic wave resonator with electrically isolated border ring
#206Resonator and related manufacturing method
#207Manufacturing of thin-film bulk acoustic resonator and semiconductor apparatus comprising the same
#208Manufacturing of thin-film bulk acoustic resonator and semiconductor apparatus comprising the same
#209Piezoelectric thin film resonator, filter, and duplexer
#210Resonant circuit, filter circuit, and acoustic wave resonator
#211Acoustic wave device and electronic component
#212Film bulk acoustic resonator and method of fabrication same
#213Acoustic wave resonator, filter, and duplexer
#214Piezoelectric thin film resonator and filter
#215Integrated structures of acoustic wave device and varactor, and acoustic wave device, varactor and power amplifier, and fabrication methods thereof
#216ACOUSTIC WAVE DEVICE AND METHOD FOR PRODUCING SAME
#217Acoustic resonator structure having an electrode with a cantilevered portion
#218Low-loss tunable radio frequency filter
#219Air gap in BAW top metal stack for reduced resistive and acoustic loss
#220Acoustic wave device and method of manufacturing the same
#221BAW RESONATOR HAVING MULTI-LAYER ELECTRODE AND BO RING CLOSE TO PIEZOELECTRIC LAYER
#222BAW resonator having lateral energy confinement and methods of fabrication thereof
#223Acoustic resonator device with an electrically-isolated layer of high-acoustic-impedance material interposed therein
#224Micromechanical frequency divider
#225Bulk acoustic wave resonator comprising multiple acoustic reflectors
#226MEMS RESONATOR WITH HIGH QUALITY FACTOR
#227Devices and methods for generation and detection of spin waves
#228Piezoelectric vibrator and piezoelectric vibrating apparatus
#229Electronic device, method for producing electronic device, electronic apparatus, and moving object
#230Acoustic resonator and method of manufacturing the same
#231Elastic wave device
#232Vibration device and manufacturing method of the same
#233Film bulk acoustic resonator filter
#234Resonation device, oscillator, electronic apparatus, and moving object
#235Acoustic wave device structure, integrated structure of power amplifier and acoustic wave device, and fabrication methods thereof
#236Bulk acoustic wave resonator having a frame spaced apart from an electrode
#237Piezoelectric thin film resonator including an insertion film, filter, and duplexer
#238Packaged device including cavity package with elastic layer within molding compound
#239Acoustic wave device
#240Film bulk acoustic resonators comprising backside vias
#241Single crystal acoustic resonator and bulk acoustic wave filter
#242Low-loss tunable radio frequency filter
#243Low-loss tunable radio frequency filter
#244Acoustic resonator with electrical interconnect disposed in underlying dielectric
#245BAW component and method for manufacturing a BAW component
#246BAW component, lamination for a BAW component, and method for manufacturing a BAW component
#247Bulk acoustic wave devices with temperature-compensating niobium alloy electrodes
#248Transducer with bulk waves surface-guided by synchronous excitation structures
#249Multiplexer
#250Piezoelectric film producing process, vibrator element, vibrator, oscillator, electronic device, and moving object
#251Acoustic resonator comprising acoustic redistribution layers and lateral features
#252Acoustic resonator comprising acoustic redistribution layers
#253Symmetric dual piezoelectric stack microelectromechanical piezoelectric devices
#254Tunable filter structures and design structures
#255Alkali-niobate-based piezoelectric thin film element
#256Film bulk acoustic wave resonator (FBAR) having stress-relief
#257Topographical structure and method of producing it
#258Acoustic wave device and method for manufacturing same
#259Surface mounted piezoelectric vibrator
#260Method for producing a polycrystalline ceramic film
#261Piezoelectric thin film resonator, filter and duplexer including a film inserted in the piezoelectric film
#262Resonator element, resonator, electronic device, electronic apparatus, and moving object
#263Elastic wave device including a high acoustic velocity film and a low acoustic velocity film
#264Resonator element, resonator, electronic device, electronic apparatus, and moving object
#265Bulk wave resonator having an aluminum nitride film containing scandium and ScAlN protective layer
#266SURFACE PASSIVATION OF SUBSTRATE BY MECHANICALLY DAMAGING SURFACE LAYER
#267Bulk acoustic wave resonator having piezoelectric layer with varying amounts of dopant
#268On-chip power converter circuit and on-chip power supply using the power converter circuit
#269Acoustic resonator comprising acoustic reflector, frame and collar
#270Piezoelectric thin film resonator, filter, and duplexer including a film inserted into the piezoelectric film
#271Piezoelectric bulk wave device, and method of manufacturing the piezoelectric bulk wave device
#272Acoustic resonator structure having an electrode with a cantilevered portion
#273Method of fabricating rare-earth doped piezoelectric material with various amounts of dopants and a selected C-axis orientation
#274Acoustic resonator comprising collar and frame
#275Film bulk acoustic resonator with multi-layers of different piezoelectric materials and method of making
#276Tunable filter structures and design structures
#277CRYSTAL RESONATOR
#278Piezoelectric device and method for manufacturing the same
#279Piezoelectric thin-film resonator and method for manufacturing the same
#280Bulk acoustic wave resonator having a plurality of compensation layers and duplexer using same
#281Filter and duplexer
#282Acoustic wave device and method for producing same
#283Manufacturing method of an array of BAW resonators with mask controlled resonant frequencies
#284Low-loss tunable radio frequency filter
#285Acoustic wave device and method for manufacturing same
#286Contour-mode piezoelectric micromechanical resonators
#287HYBRID BULK ACOUSTIC WAVE RESONATOR
#288Piezoelectric resonator operating in thickness shear mode
#289Low-loss tunable radio frequency filter
#290Acoustic resonator structure having an electrode with a cantilevered portion
#291ARRAY OF BAW RESONATORS WITH MASK CONTROLLED RESONANT FREQUENCIES
#292METHOD OF FABRICATING AN ELECTRODE FOR A BULK ACOUSTIC RESONATOR
#293Low-loss tunable radio frequency filter
#294Bulk acoustic wave resonator device
#295Bulk acoustic resonators with multi-layer electrodes
#296Devices having a tunable acoustic path length and methods for making same
#297Contour-mode piezoelectric micromechanical resonators
#298Tunable resonator using film bulk acoustic resonator (FBAR)
#299Contour-Mode Piezoelectric Micromechanical Resonators
#300Low-loss tunable radio frequency filter