220725 ⎘
Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators; Constructional features of resonators consisting of piezo-electric or electrostrictive material having a single resonator implemented with thin-film techniques, i.e. of the film bulk acoustic resonator [FBAR] type Means for mounting on a substrate, i.e. means constituting the material interface confining the waves to a volume
Sub-classes:EMBEDDED SILICON DIOXIDE IN ELECTRODE TO REDUCE TEMPERATURE COEFFICIENT OF FREQUENCY IN BULK ACOUSTIC WAVE RESONATOR
#2BULK ACOUSTIC WAVE DEVICES WITH HIGH ACOUSTIC VELOCITY ELECTRODES
#3BULK ACOUSTIC WAVE DEVICE WITH RECESSED FRAME STRUCTURE IN ACOUSTICALLY ACTIVE REGION
#4MULTI-TERMINAL BULK ACOUSTIC WAVE RESONATOR UTILIZING OVERTONE MODES
#5ACOUSTIC WAVE DEVICE
#6ACOUSTIC WAVE DEVICE
#7BULK ACOUSTIC RESONATOR AND METHOD FOR MANUFACTURING THE SAME, FILTER AND ELECTRONIC DEVICE
#8BULK ACOUSTIC WAVE RESONATORS HAVING CONVEX SURFACES, AND METHODS OF FORMING THE SAME
#9BULK ACOUSTIC RESONATOR, ACOUSTIC FILTER, AND ELECTRONIC DEVICE
#10ACOUSTIC RESONATOR STRUCTURE WITH IMPROVED TEMPERATURE COEFFICIENT OF FREQUENCY (TCF)
#11BAW RESONATOR AND BAW RESONATOR MANUFACTURING METHOD
#12BULK ACOUSTIC WAVE RESONANT STRUCTURE AND MANUFACTURING METHOD THEREFOR
#13ACOUSTIC WAVE DEVICE, FILTER AND MULTIPLEXER
#14ACOUSTIC WAVE DEVICE
#15Bulk acoustic wave resonators having convex surfaces, and methods of forming the same
#16Assemblies Including an Acoustic Resonator Device and Methods of Forming
#17CROSSOVER REDUCTION FOR ACOUSTIC DUPLEXERS BY SPURIOUS MODES
#18Single crystal film bulk acoustic resonator, manufacturing method for single crystal film bulk acoustic resonator, and filter
#19THIN-FILM BULK ACOUSTIC WAVE RESONATOR, FORMING METHOD, AND FILTER
#20Resonator, filter and duplexer
#21ACOUSTIC RESONATOR PACKAGE
#22Fbar Type Filter
#23METAL CAVITY FOR TRANSVERSELY-EXCITED FILM BULK ACOUSTIC RESONATOR (XBAR)
#24FILM PIEZOELECTRIC ACOUSTIC RESONATOR, FILTER AND ELECTRONIC APPARATUS
#25ACOUSTIC RESONATOR
#26Bulk acoustic wave filter having release hole and fabricating method of the same
#27PIEZOELECTRIC VIBRATING SUBSTRATE AND PIEZOELECTRIC VIBRATING ELEMENT
#28BULK ACOUSTIC WAVE FILTER HAVING RELEASE HOLE AND FABRICATING METHOD OF THE SAME
#29Fin field-effect transistor (FinFET) resonator
#30RESONATOR AND ELECTRONIC DEVICE
#31Method for manufacturing a piezoelectric resonator
#32Bulk acoustic wave resonator and formation method thereof
#33QUARTZ CRYSTAL RESONATOR UNIT, ELECTRONIC COMPONENT, AND ELECTRONIC DEVICE
#34Acoustic resonator filter
#35Vibrator device
#36Piezoelectric resonator device
#37Acoustic resonator
#38MANUFACTURING OF C-AXIS TEXTURED SIDEWALL ALN FILMS
#39ELECTRIC DEVICE WAFER
#40ELLIPTICAL STRUCTURE FOR BULK ACOUSTIC WAVE RESONATOR
#41Elastic wave device
#42Film bulk acoustic resonator (FBAR) devices for high frequency RF filters
#43Bulk acoustic wave resonators having convex surfaces, and methods of forming the same
#44Bulk acoustic wave/film bulk acoustic wave resonator and filter for wide bandwidth applications
#45METHOD AND STRUCTURE TO REDUCE IMPACT OF EXTERNAL STRESS AND AGING OF A BAW RESONATOR
#46Resonator device, resonator module, electronic apparatus, and vehicle
#47Electronic device including gas sensor and method of operating the same
#48Acoustic resonator
#49Acoustic resonator structure
#50Film bulk acoustic wave resonators and fabrication methods thereof
#51Microelectronic devices having vertical piezoelectric membranes for integrated RF filters
#52RF filters and resonators of crystalline III-N films
#53Film bulk acoustic resonator (FBAR) devices for high frequency RF filters
#54Communication filter for LTE band 41
#55CRYSTAL CONTROLLED OSCILLATOR
#56Elliptical structure for bulk acoustic wave resonator
#57Acoustic resonator and method for manufacturing the same
#58Bulk acoustic wave resonators having convex surfaces, and methods of forming the same
#59Techniques for integrating three-dimensional islands for radio frequency (RF) circuits
#60Ultrasonic device having large radiating area
#61Acoustic wave filter device
#62Resonator and resonance device
#63Bulk acoustic wave resonator device
#64Elastic wave device
#65Transverse bulk acoustic wave filter
#66Piezoelectric thin film and piezoelectric vibrator
#67Piezoelectric thin film resonator, filter, and duplexer
#68Copper pillar bump pad structure for BAW devices
#69Resonator and resonating device
#70Acoustic resonator with reduced mechanical clamping of an active region for enhanced shear mode response
#71THIN FILM ULTRASOUND TRANSDUCER
#72Elastic wave device and fabrication method thereof
#73Acoustic resonator and method of manufacturing the same
#74Membrane substrate structure for single crystal acoustic resonator device
#75Temperature controlled acoustic resonator comprising feedback circuit
#76Temperature controlled acoustic resonator
#77Enhanced MEMS vibrating device
#78Method of fabricating acoustic resonator with planarization layer
#79Bulk acoustic wave resonators having doped piezoelectric material and frame elements
#80Acoustic wave device and method for manufacturing same
#81SURFACE MOUNTING QUARTZ CRYSTAL UNIT AND METHOD OF FABRICATING THE SAME
#82Package, resonation device, oscillator, electronic device, and moving object
#83Resonating element, resonator, electronic device, electronic apparatus, and mobile object
#84Acoustic wave device and method for manufacturing same
#85Resonator element, resonator, oscillator, electronic apparatus, and moving object
#86Vibration element, vibrator, oscillator, electronic apparatus, and moving object
#87Vibration element, vibrator, oscillator, electronic apparatus, and moving object
#88Resonator element, resonator, oscillator, electronic apparatus, and moving object
#89HBAR resonator comprising a structure for amplifying the amplitude of at least one resonance of said resonator and methods for producing such a resonator
#90Temperature controlled acoustic resonator
#91Oscillator device and manufacturing process of the same
#92Contour-mode piezoelectric micromechanical resonators
#93Acoustic resonator formed on a pedestal
#94Resonating element, resonator, electronic device, electronic apparatus, and mobile object
#95MEMS devices made with isotopic materials
#96Bulk acoustic wave resonator and method of manufacturing thereof
#97Widening resonator bandwidth using mechanical loading
#98Resonator and oscillator with a tuning fork vibrator in a cut-out portion of a layered body
#99Process for producing an acoustic device having a controlled-bandgap phononic crystal structure
#100Method for manufacturing piezoelectric element
#101Lateral over-moded bulk acoustic resonators
#102HBAR resonator with high temperature stability
#103Acoustic wave device and method for manufacturing same
#104Quartz-crystal devices and methods for manufacturing same
#105HBAR resonator with a high level of integration
#106Thin film piezoelectric vibrator, thin film piezoelectric bulk acoustic wave resonator, and radio-frequency filter using such resonator
#107OSCILLATOR HAVING REDUCED SENSITIVITY TO ACCELERATION
#108Contour-mode piezoelectric micromechanical resonators
#109Oscillator having micro-electromechanical resonators and driver circuits therein that support in-phase and out-of-phase signals
#110Micro-electromechanical devices having variable capacitors therein that compensate for temperature-induced frequency drift in acoustic resonators
#111Thin-film bulk acoustic resonators having perforated bodies that provide reduced susceptibility to process-induced lateral dimension variations
#112METHOD FOR MANUFACTURING PIEZOELECTRIC DEVICE
#113Method of manufacturing film bulk acoustic resonator using internal stress of metallic film and resonator manufactured thereby
#114Switchable tunable acoustic resonator using BST material
#115Lithographically defined multi-standard multi-frequency high-Q tunable micromechanical resonators
#116Bulk acoustic wave resonator with adjustable resonance frequency and use of such a resonator in the field of telephony
#117Thin-film piezoelectric-on-insulator resonators having perforated resonator bodies therein
#118Electroacoustic resonator, filter, duplexer and method for determining parameters of a resonator
#119Bulk acoustic wave device and a method of its manufacturing
#120Bulk acoustic wave resonator with reduced energy loss
#121Bulk acoustic wave resonator with controlled thickness region having controlled electromechanical coupling
#122Oscillator having reduced sensitivity to acceleration
#123Contour-mode piezoelectric micromechanical resonators
#124PIEZOELECTRIC DEVICE AND METHOD OF MANUFACTURING PIEZOELECTRIC RESONATORS
#125Film bulk acoustic wave resonator, its fabrication method and film bulk acoustic wave resonator filter using the resonator
#126Contour-Mode Piezoelectric Micromechanical Resonators
#127Electronic device on substrate with cavity and mitigated parasitic leakage path
#128Single-resonator dual-frequency lateral-extension mode piezoelectric oscillators, and operating methods thereof
#129Method for forming a multi-layer electrode underlying a piezoelectric layer and related structure
#130Piezo-on-diamond resonators and resonator systems
#131Assembly of a microswitch and of an acoustic resonator
#132Lithographically-defined multi-standard multi-frequency high-Q tunable micromechanical resonators
#133Thin film piezoelectric vibrator, thin film piezoelectric bulk acoustic wave resonator, and radio-frequency filter using such resonator
#134POLYMER BULK ACOUSTIC RESONATOR
#135Method of isolation for acoustic resonator device
#136MEMS piezoelectric longitudinal mode resonator
#137Electronic device on substrate with cavity and mitigated parasitic leakage path
#138Switchable tunable acoustic resonator using BST material
#139Support for acoustic resonator and corresponding integrated circuit
#140Acoustic devices using an AlGaN piezoelectric region
#141Piezoelectric resonator and method for producing the same
#142Polymer bulk acoustic resonator
#143Piezoelectric device and method of manufacturing piezoelectric resonators
#144Hybrid resonant structure
#145Film bulk acoustic wave resonator and manufacturing method thererof
#146Contour-mode piezoelectric micromechanical resonators
#147Film bulk acoustic resonator (FBAR) process using single-step resonator layer deposition
#148Contour-mode piezoelectric micromechanical resonators
#149Ultrasonic element
#150Resonator and component with hermetic encapsulation
#151Piezoelectric thin-film resonator and process for producing same
#152Piezoelectric resonator, method for manufacturing the same, piezoelectric filter, and duplexer
#153Resonator and filter using the same
#154Thin film bulk acoustic wave resonator and production method of the same
#155Tunable bulk acoustic wave MEMS micro-resonator
#156Acoustic resonator
#157Film bulk acoustic resonator and method for manufacturing the same
#158Piezoelectric film, piezoelectric element, piezoelectric actuator, piezoelectric pump, ink-jet type recording head, ink-jet printer surface-acoustic-wave element, thin-film piezoelectric resonator, frequency filter, oscillator, electronic circuit, and electronic apparatus
#159Method for fabricating a film bulk acoustic resonator
#160Film bulk acoustic resonator structure and method of making
#161Ink jet recording head and ink jet printer with piezoelectric element
#162Film bulk acoustic resonator having supports and manufacturing method therefore
#163Method of manufacturing film bulk acoustic resonator using internal stress of metallic film and resonator manufactured thereby