220743 ⎘
Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators; Constructional features of resonators of material which is not piezo-electric, electrostrictive, or magnetostrictive of microelectro-mechanical resonators Ring resonators
MEMS RESONATOR
#2MICRO/NANO ELECTROMECHANICAL RING OSCILLATOR DEVICE
#3CONTROL DEVICE FOR VIBRATION-TYPE ACTUATOR
#4DUAL RESONATOR STRUCTURE FOR OVEN-CONTROLLED MEMS OSCILLATORS, INCLUDING RELATED APPARATUSES
#5DUAL RESONATOR STRUCTURE FOR TEMPERATURE-COMPENSATED OSCILLATORS, INCLUDING RELATED APPARATUSES
#6SPHERICAL DIELECTRIC STRUCTURES FOR STORING ELECTROMAGNETIC ENERGY
#7Methods and devices for microelectromechanical resonators
#8Methods and devices for microelectromechanical resonators
#9MEMS Vibrating Ring Resonator with Deformable Inner Ring-Shaped Spring Supports
#10HIGH ELECTROMECHANICAL COUPLING STRENGTH HOLLOW DISK RESONATORS
#11Methods and devices for microelectromechanical resonators
#12Micro-electro-mechanical device with reduced temperature sensitivity and manufacturing method thereof
#13Apparatus and methods for photonic integrated resonant accelerometers
#14Methods and devices for microelectromechanical resonators
#15Distributed-mode beam and frame resonators for high frequency timing circuits
#16Pitch/roll annulus gyroscope with slanted quadrature tuning electrodes and related fabrication methods
#17Micro-electro-mechanical device with reduced temperature sensitivity and manufacturing method thereof
#18Microelectromechanical resonator with improved electrical features
#19Signal processing apparatus and method for transmitting and receiving coherent parallel optical signals
#20MEMS-based regenerative transceiver
#21Tunable electronic circuit which converts balanced signals to unbalanced signals
#22Micromechanical frequency divider
#23Micro-hemispherical resonators and methods of making the same
#24Multiple coil spring MEMS resonator
#25Compound spring MEMS resonators for frequency and timing generation
#26Resonation element, resonator, oscillator, electronic device and moving object
#27Methods and devices for microelectromechanical resonators
#28Methods and devices for microelectromechanical pressure sensors
#29Rotational MEMS resonator for oscillator applications
#30Detecting responses of micro-electromechanical system (MEMS) resonator device
#31MEMS resonator
#32MEMS device
#33Micromechanical resonating devices and related methods
#34Electromechanical systems piezoelectric contour mode differential resonators and filters
#35MEMS resonator devices
#36Frame-shaped MEMS piezoresistive resonator
#37Resonator and periodic structure
#38Resonator and a method of manufacturing the same, and oscillator and electronic apparatus including the same
#39Resonance frequency tunable MEMS device
#40Resonator and methods of making resonators
#41MEMS resonator devices with a plurality of mass elements formed thereon
#42Passive temperature compensation of silicon MEMS devices
#43Micromechanical resonating devices and related methods
#44Nanomechanical oscillator
#45Oscillating mass resonator
#46Resonator, oscillator and communication device
#47Multi-ring resonator system and method
#48Resonator, oscillator, and communication apparatus
#49MEMS resonator array structure
#50Mechanical oscillator formed by a network of basic oscillators
#51Microelectromechanical resonator structure, and method of designing, operating and using same
#52Dielectrically transduced single-ended to differential MEMS filter
#53Method of forming an integrated MEMS resonator
#54MEMS resonator having an inner element and an outer element that flex
#55Breath-mode ring resonator structure, and method of designing, operating and using same
#56MEMS resonator array structure and method of operating and using same
#57Microelectromechanical resonator structure, and method of designing, operating and using same
#58High-Q micromechanical resonator devices and filters utilizing same
#59Micromechanical resonator device having a desired mode shape
#60Micromechanical electrostatic resonator
#61Vacuum-cavity MEMS resonator
#62MEMS-tunable optical ring resonator
#63Vertical differential resonator