220744 ⎘
Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators; Constructional features of resonators of material which is not piezo-electric, electrostrictive, or magnetostrictive of microelectro-mechanical resonators Disk resonators
BIMORPH MICROELECTROMECHANICAL SYSTEMS (MEMS) INTEGRATION FOR ANALOG TUNABILITY IN METASURFACES
#2Resonator, Electronic Component, and Resonant System
#3Acoustically Decoupled MEMS Devices
#4Methods and devices for microelectromechanical resonators
#5Methods and devices for microelectromechanical resonators
#6METHOD OF MANUFACTURING A PLURALITY OF MECHANICAL RESONATORS IN A MANUFACTURING WAFER
#7Clock device
#8HIGH ELECTROMECHANICAL COUPLING STRENGTH HOLLOW DISK RESONATORS
#9Acoustically decoupled MEMS devices
#10Methods and devices for microelectromechanical resonators
#11Electromechanically damped resonator devices and methods
#12Resonator and device including the same
#13Resonator and resonator array
#14Methods and devices for microelectromechanical resonators
#15Active resonator system with tunable quality factor, frequency, and impedance
#16Microelectromechanical system resonator devices and oscillator control circuits
#17Bulk mode microelectromechanical resonator devices and methods
#18MEMS-based regenerative transceiver
#19Active resonator system with tunable quality factor, frequency, and impedance
#20Micromechanical frequency divider
#21Tunable Q resonator
#22Hollow supports and anchors for mechanical resonators
#23Temperature compensated plate resonator
#24Apparatus and method for tuning a resonance frequency
#25Methods and devices for microelectromechanical resonators
#26Methods and devices for microelectromechanical pressure sensors
#27Micromechanical resonator oscillator structure and driving method thereof
#28Micromechanical resonators
#29Transverse acoustic wave resonator, oscillator having the resonator and method for making the resonator
#30Bulk acoustic wave resonator and method of manufacturing thereof
#31Method of adjusting the resonance frequency of a micro-machined vibrating element
#32Micromechanical Resonator
#33GT-cut quartz crystal resonator
#34PARTIALLY-FILLED ELECTRODE-TO-RESONATOR GAP
#35Resonator device and method of optimizing a Q-factor
#36Electromechanical resonator with resonant anchor
#37Thermal-mechanical signal processing
#38Electromechanical systems piezoelectric contour mode differential resonators and filters
#39Dual in-situ mixing for extended tuning range of resonators
#40Microelectromechanical resonator and a method for producing the same
#41Method and device for suppressing hysteresis of resonators through simultaneous resonance
#42Device with a micro electromechanical structure
#43Compensated micro/nano-resonator with improved capacitive detection and method for producing same
#44Microelectromechanical resonant structure having improved electrical characteristics
#45MEMS resonator
#46MEMS controlled oscillator
#47Resonator electrode shields
#48MICRO MECHANICAL RESONATOR
#49Resonator and a method of manufacturing the same, and oscillator and electronic apparatus including the same
#50Resonators, resonator arrays, apparatus and methods
#51Vibrating nano-scale or micro-scale electromechanical component with enhanced detection level
#52Digitally programmable RF MEMS filters with mechanically coupled resonators
#53Array of coupled resonators, bandpass filter and oscillator
#54Method of fabricating a MEMS/NEMS electromechanical component
#55BULK MODE RESONATOR
#56HIGH-Q DISK NANO RESONATOR DEVICE AND METHOD OF FABRICATING THE SAME
#57Micro-electromechanical resonance device with periodic structure
#58High-deformation composite microresonator
#59MEMS filter device having a nanosize coupling element and manufacturing method thereof
#60Electromagnetic composite metamaterial
#61MEMS controlled oscillator
#62MEMS device annealing
#63Dielectrically transduced single-ended to differential MEMS filter
#64Micromechanical structures having a capacitive transducer gap filled with a dielectric and method of making same
#65Shell type actuator
#66Thermal-mechanical signal processing
#67Micromechanical resonator device having a desired mode shape
#68Micromechanical electrostatic resonator
#69Disk resonator gyroscope with out-of-plane electrodes