SILICON-SUPPORTED WAFER TO WAFER SOLDER BOND

DUAL RESONATOR CHIP

STEEP SKIRT COMBINATION MICROELECTROMECHANICAL SYSTEM CAVITY FILTER AND BULK ACOUSTIC WAVE FILTER

Single mode cavity filter

Method of making a ceramic resonator RF filter, an RF module and a wireless mobile device by forming stacked rows of ceramic resonators connected to a printed circuit board

Aluminum nitride combined overtone resonators for the mmWave spectrum

Spectral analysis of electronic circuits

Microwave duplexer using coupled inductors to improve isolation

Stacked ceramic resonator filter connected by tabs to a printed circuit board and usable for forming an RF module and a wireless mobile device

Spectral analysis of electronic circuits

RF-powered micromechanical clock generator

Assembly processes for three-dimensional microstructures

Stacked ceramic resonator radio frequency filter for wireless communications

Signal processing apparatus and method for transmitting and receiving coherent parallel optical signals

Low-loss tunable radio frequency filter

Micro-acoustic component having improved temperature compensation

Method of providing protective cavity and integrated passive components in wafer level chip scale package using a carrier wafer

Resonator circuit having greater degrees of freedom, filter with improved tunability, and duplexer with improved tunability

MEMS device with large out-of-plane actuation and low-resistance interconnect and methods of use

Widely tunable cavity filter using low voltage, large out-of-plane actuation MEMS

Low-loss tunable radio frequency filter

Method of trimming a component and a component trimmed by such a method

Tunable evanescent-mode cavity filter with closed loop control

RF component with reduced coupling and suitable for miniaturization

Integrated microelectromechanical system devices and methods for making the same

Apparatus and method for tuning a resonance frequency

Low-loss tunable radio frequency filter

Low-loss tunable radio frequency filter

Resonator with a staggered electrode configuration

Micro-electro-mechanical transducer having an optimized non-flat surface

Micro-electro-mechanical transducer having an optimized non-flat surface

Micro-electro-mechanical transducer having an optimized non-flat surface

MEMS/NEMS device comprising a network of electrostatically actuated resonators and having an adjustable frequency response, notably for a band-pass filter

Low-loss tunable radio frequency filter

Radio frequency filter

Microelectromechanical system with a micro-scale spring suspension system and methods for making the same

Integrated microelectromechanical system devices and methods for making the same

MICROWAVE ACOUSTIC WAVE FILTERS

Microwave acoustic wave filters

Tunable and switchable resonator and filter structures in single crystal piezoelectric MEMS devices using bimorphs

Variable capacitor and switch structures in single crystal piezoelectric MEMS devices using bimorphs

Resonator and fabrication method thereof

Tunable MEMS resonators

Limited Q factor tunable front end using tunable circuits and microelectromechanical system (MEMS)

RF mixer filter MEMS resonator array

Cross-sectional dilation mode resonators

Cross-sectional dilation mode resonators and resonator-based ladder filters

Electromechanical systems oscillator with piezoelectric contour mode resonator for multiple frequency generation

Microelectromechanical filter

MEMS NOTCH FILTER AND METHOD

Low-loss tunable radio frequency filter

Micro-electro-mechanical transducer having an optimized non-flat surface

Micro-electro-mechanical transducer having a surface plate

Low-loss tunable radio frequency filter

Tunable MEMS resonators

Resonators, resonator arrays, apparatus and methods

MEMS ultrasonic device having a PZT and cMUT

Digitally programmable RF MEMS filters with mechanically coupled resonators

Array of coupled resonators, bandpass filter and oscillator

Low-loss tunable radio frequency filter

Micro-electro-mechanical transducer having a surface plate

Resonator and fabrication method thereof

Membrane suspended MEMS structures

System and method for using MEMS filter bank

Apparatus, method, and computer program product providing edgeless carbon nanotube resonator arrays

Micro-electro-mechanical transducer having embedded springs

Nano-electromechanical circuit using co-planar transmission line

Method of manufacturing vibrating micromechanical structures

Low-loss tunable radio frequency filter

MEMS filter device having a nanosize coupling element and manufacturing method thereof

Method of manufacturing vibrating micromechanical structures

Vacuum packaged single crystal silicon device

Vacuum packaged single crystal silicon device

Electro mechanical device and manufacturing method thereof, and resonator and manufacturing method thereof

MEMS resonator array structure

Electromagnetic composite metamaterial

Electromechanical filter utilizing a quantum device and sensing electrode

Electromechanical filter

Electromechanical filter and electrical circuit and electrical equipment employing electromechanical filter

Spread-spectrum radio utilizing MEMS components

MEMS acoustic filter and fabrication of the same

Micro-resonator and communication apparatus

Micromachine and production method thereof

Micro electric machine system resonator, drive method thereof, manufacturing method thereof, and frequency filter

MEMS resonator array structure and method of operating and using same

Microresonator, band-pass filter, semiconductor device, and communication apparatus

Vacuum packaged single crystal silicon device

Method of manufacturing vibrating micromechanical structures

Highly tunable low-impedance capacitive micromechanical resonators, oscillators, and processes relating thereto

Microresonator, manufacturing method, and electronic apparatus

Nanoelectromechanical components

Radio having a MEMS preselect filter

Micromechanical device and method of manufacture thereof

High-Q micromechanical resonator devices and filters utilizing same

Microelectricalmechanical system with improved beam suspension

Micromechanical device and related methods

Dual-mode MEMS resonator, oscillator, sensor, timing device, acoustic filter and front-end module and the methods of making

Trimming method for microresonators and microresonators made thereby

Attenuation of spurious responses in electromechanical filters

Micromechanical devices based on piezoelectric resonators

Tuning method for microresonators and microresonators made thereby

Microresonator electrode design