220768 ⎘
Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators; Filters; Microelectro-mechanical filters Post-fabrication trimming of parameters, e.g. center frequency
Tunable narrow bandpass MEMS technology filter using an arch beam microresonator
#2CO-INTEGRATED BULK ACOUSTIC WAVE RESONATORS
#3Multi-frequency excitation
#4Tunable Q resonator
#5Co-integrated bulk acoustic wave resonators
#6Microelectronic machine-based ariable
#7Tunable and switchable resonator and filter structures in single crystal piezoelectric MEMS devices using bimorphs
#8Variable capacitor and switch structures in single crystal piezoelectric MEMS devices using bimorphs
#9Methods of forming micro-electromichanical resonators having boron-doped resonator bodies containing eutectic alloys
#10Resonant circuit, oscillation circuit, filter circuit, and electronic device
#11Trimming method for microresonators and microresonators made thereby
#12Micromechanical devices based on piezoelectric resonators