232872 ⎘
Ohmic-resistance heating; Heater elements characterised by the composition or nature of the materials or by the arrangement of the conductor characterised by the composition or nature of the conductive material the material being non-metallic; Conductive ceramics, e.g. metal oxides, metal carbides, barium titanate, ferrites, zirconia, vitrous compounds applied to semiconductors, e.g. wafers heating
CERAMIC HEATER AND METHOD OF MANUFACTURING CERAMIC HEATER
#2CERAMIC HEATER
#3SELF-LIMITING THICK FILM POSITIVE TEMPERATURE COEFFICIENT OF RESISTIVITY (PTCR) RESISTOR COMPOSITIONS
#4PBN Heaters For ALD Temperature Uniformity
#5Method for Forming a Tantalum Nitride Resistive Heater for Thermally-Tunable Photonics Devices
#6CEMENT-BASED ELECTRIC SURFACE HEATING STRUCTURE AND METHOD OF MANUFACTURING THE SAME
#7CERAMIC SUSCEPTOR
#8APPARATUS AND METHOD FOR DRYING SUBSTRATE
#9Method and Apparatus of Substrate Support Repair and Refurbishment
#10SUSCEPTOR
#11BONDING SYSTEM AND METHOD
#12CERAMIC HEATER
#13CERAMIC HEATER
#14HEATER AND PRODUCTION THEREOF
#15ELECTROSTATIC CHUCK HEATER AND FILM DEPOSITION APPARATUS
#16High Heat Capacity Hot Plate
#17Tantalum Nitride Resistive Heater for Thermally-Tunable Photonics Devices
#18CERAMIC HEATER
#19Ceramic heater
#20METROLOGY DEVICE, SYSTEM AND METHOD
#21SUBSTRATE HOLDER AND METHOD OF PRODUCING SUBSTRATE HOLDER
#22WAFER PLACEMENT TABLE
#23Susceptor for high-temperature use having shaft with low thermal conductivity
#24Apparatus and method for drying substrate
#25CERAMIC STRUCTURE AND WAFER SYSTEM
#26CERAMIC HEATER AND METHOD OF MANUFACTURING THE CERAMIC HEATER
#27CERAMIC HEATER AND MANUFACTURING METHOD THEREOF
#28CERAMIC HEATER AND MANUFACTURING METHOD THEREFOR
#29ELECTRODE-EMBEDDED MEMBER, SUBSTRATE HOLDING MEMBER, CERAMIC HEATER, AND ELECTROSTATIC CHUCK
#30Heated substrate support
#31Semiconductor-manufacturing apparatus member and method of manufacturing the same
#32Wafer placement table
#33Ceramic heater
#34CERAMIC HEATER WITH SHAFT
#35CERAMIC HEATER WITH SHAFT
#36Ceramic structure and structure with terminal
#37Thermocouple guide and ceramic heater
#38Thermocouple guide and ceramic heater
#39Ceramic heater and method of producing the same
#40High temperature micro-zone electrostatic chuck
#41SUPPORT UNIT AND SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME
#42Ceramic heater
#43Ceramic heater and thermocouple guide
#44Ceramic heater
#45CERAMIC HEATER AND METHOD OF MANUFACTURING THE SAME
#46Ceramic heater
#47PBN Heaters For ALD Temperature Uniformity
#48Method for manufacturing an electrically operable heating body for an inhaler
#49MATCHED TCR JOULE HEATER DESIGNS FOR ELECTROSTATIC CHUCKS
#50Heated pedestal design for improved heat transfer and temperature uniformity
#51Wafer support table
#52Wafer-heating device
#53Sample holder
#54COMPONENT FOR SEMICONDUCTOR PRODUCTION DEVICE
#55Heated substrate support
#56Heater system, ceramic heater, plasma treatment system, and adsorption system
#57Dual emission layer solid state infrared emitter apparatus and method of use thereof
#58Electrically conductive infrared emitter and back reflector in a solid state source apparatus and method of use thereof
#59Substrate heating apparatus with enhanced temperature uniformity characteristic
#60Thermally insulating electrical contact probe
#61HEATING ELEMENT
#62Laminated top plate of a workpiece carrier in micromechanical and semiconductor processing
#63Metal wiring bonding structure and production method therefor
#64Ceramic structure, method for manufacturing the same, and member for semiconductor manufacturing apparatus
#65CMOS-based semiconductor device on micro-hotplate and method of fabrication
#66Horizontal modular heater
#67Thermally insulating electrical contact probe
#68Ceramic heater and electrostatic chuck
#69Temperature control apparatus, temperature control method and recording medium
#70Method of heating/cooling a substrate
#71Diffusion bonded plasma resisted chemical vapor deposition (CVD) chamber heater
#72Heating body, vibration device, electronic apparatus, and moving object
#73Semiconductor device including asymmetric electrode arrangement
#74Ceramic heater and method for producing the same
#75Yttria-based material coated chemical vapor deposition chamber heater
#76Substrate support for substrate backside contamination control
#77HEATING DEVICE AND SEMICONDUCTOR DEVICE MANUFACTURING METHOD
#78CERAMIC HEATER
#79Resistance heater
#80SYSTEMS, APPARATUSES, AND METHODS FOR CHEMICALLY PROCESSING SUBSTRATES USING THE COANDA EFFECT
#81Substrate processing apparatuses and systems
#82ELECTRICAL RESISTANCE HEATER AND HEATER ASSEMBLIES
#83Ceramic heater
#84HEATER UNIT, HEATING AND COOLING DEVICE, AND APPARATUS COMPRISING SAME
#85Ceramic heater and method for making the same
#86STAGE FOR SUBSTRATE TEMPERATURE CONTROL APPARATUS
#87Ceramic heater and method for producing same
#88Plane heater
#89Rotatable heating-cooling plate and element in proximity thereto
#90Wafer heating apparatus and semiconductor manufacturing apparatus
#91Heater, manufacturing apparatus for semiconductor device, and manufacturing method for semiconductor device
#92CERAMIC HEATER, METHOD OF MANUFACTURING THE SAME, AND APPARATUS FOR FORMING A THIN LAYER HAVING THE SAME
#93Heating unit comprising a heat resistance element shaped as a conductive pattern
#94CERAMIC MEMBER, CERAMIC HEATER, SUBSTRATE PLACING MECHANISM, SUBSTRATE PROCESSING APPARATUS AND METHOD FOR MANUFACTURING CERAMIC MEMBER
#95Uniform temperature heater
#96Resistance heater
#97Planar heater
#98Electrode tuning method and apparatus for a layered heater structure
#99Corrosion-resistant multilayer ceramic member
#100Mounting table structure and heat treatment apparatus
#101ZONE CONTROL HEATER PLATE FOR TRACK LITHOGRAPHY SYSTEMS
#102Temperature controlling method of electron bombardment heating apparatus
#103Processing apparatus and heater unit
#104Heating device
#105SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND STORAGE MEDIUM
#106Heater apparatus and associated method
#107Ceramic heater
#108Heating device
#109Heating device
#110Methods of securing a thermocouple to a ceramic substrate
#111Substrate heating device
#112Assembly with Enhanced Thermal Uniformity and Method For Making Thereof
#113Electrode pattern for resistance heating element and wafer processing apparatus
#114Heater For Heating a Wafer and Method For Fabricating The Same
#115Wafer heating apparatus and semiconductor manufacturing apparatus
#116Hot plate and process for producing the same
#117Zone control heater plate for track lithography systems
#118Ceramic block with built in electrode and method of manufacture thereof
#119Ceramic heater and method of securing a thermocouple thereto
#120Heating element
#121Heating element
#122Heating device
#123Heating device
#124HEATING AND COOLING MODULE
#125HEATING DEVICE AND MANUFACTURING METHOD THEREOF
#126Ceramic heater unit
#127Ceramic heater and method for producing ceramic heater
#128Holder for use in semiconductor or liquid-crystal manufacturing device and semiconductor or liquid-crystal manufacturing device in which the holder is installed
#129Heater unit and semiconductor manufacturing apparatus including the same
#130Heating element
#131Heater
#132Heater and method of manufacturing the same
#133Heater for semiconductor manufacturing device and heating device equipped with the same
#134HEATING CHUCK ASSEMBLY
#135Power-supplying member and heating apparatus using the same
#136Processing device
#137Electrostatic chuck and method of manufacturing electrostatic chuck
#138Electron bombardment heating apparatus and temperature controlling apparatus
#139Heating systems
#140Ceramic susceptor for semiconductor manufacturing equipment
#141Method for restoring ceramic heater
#142Apparatus for heating wafer
#143Aluminum nitride conjugate body and method of producing the same
#144Aluminum nitride sintered body
#145Substrate heating apparatus
#146Substrate heating apparatus and manufacturing method for the same
#147Hot plate
#148Heater for heating a wafer and method for fabricating the same
#149Ceramics heater for semiconductor production system
#150Ceramic susceptor and a method of cleaning the same
#151Heating device
#152Heater and heating device
#153Ceramics heater for semiconductor production system
#154Heaters
#155Systems for heating wafers
#156Heating resistances and heaters
#157Ceramic heaters
#158Ceramics heater for semiconductor production system
#159Wafer holder and semiconductor manufacturing apparatus
#160Ceramic heater
#161Substrate heater and fabrication method for the same
#162Ceramic heater and ceramic joined article
#163Ceramic substrate and process for producing the same
#164Hot plate for semiconductor producing/examining device
#165Ceramic heater
#166Ceramic heater
#167Aluminum nitride sintered body, ceramic substrate, ceramic heater and electrostatic chuck
#168Ceramic substrate for semiconductor manufacture/inspection apparatus, ceramic heater, electrostatic clampless holder, and substrate for wafer prober
#169Ceramic substrate
#170Systems for supporting ceramic susceptors
#171Ceramic susceptor
#172Self-limiting thick film positive temperature coefficient of resistivity (PTCR) resistor compositions