Patents-Review.com
ClassID:

233417 ⎘

H05G2/005 - CPC Classification

Classification description:

X-ray radiation generated from plasma being produced from a liquid or gas containing a metal as principal radiation generating component

Recent Application in this class:
#1
20250081319
2025-03-06

Light Source Using Pre-Ionization

 #2
20250063649
2025-02-20

EUV SOURCE WITH ROTATION CRUCIBLE AND LASER AND TIN (SN) AUTO-FILLING METHOD

 #3
20240361350
2024-10-31

PARTICLE IMAGE VELOCIMETRY OF EXTREME ULTRAVIOLET LITHOGRAPHY SYSTEMS

 #4
20240324090
2024-09-26

METHODS OF GENERATING EXTREME ULTRAVIOLET RADIATION

 #5
20240295825
2024-09-05

Lithography Apparatus and Method

 #6
20240284580
2024-08-22

ELECTROMAGNETIC PUMP

 #7
20240275114
2024-08-15

A SEED LASER OPTICAL ISOLATOR, SEED ISOLATOR MODULE, EUV RADIATION SOURCE, LITHOGRAPHIC APPARATUS AND OPTICAL ISOLATOR OPERATING METHOD

 #8
20240260164
2024-08-01

TARGET SUPPLY DEVICE AND ELECTRONIC DEVICE MANUFACTURING METHOD

 #9
20240237183
2024-07-11

PICOSECOND LASER-DRIVEN PLASMA X-RAY SOURCE

 #10
20240196504
2024-06-13

CONNECTION ASSEMBLY

 #11
20240188206
2024-06-06

MODULAR LASER-PRODUCED PLASMA X-RAY SYSTEM

 #12
20240057243
2024-02-15

EUV light source with a separation device

 #13
20240015875
2024-01-11

Mechanical alignment of x-ray sources

 #14
20240004317
2024-01-04

ROTARY FOIL TRAP AND LIGHT SOURCE DEVICE

 #15
20230403778
2023-12-14

Rotating target for extreme ultraviolet source with liquid metal

 #16
20230389168
2023-11-30

EUV light source and apparatus for lithography

 #17
20230380044
2023-11-23

Shock wave visualization for extreme ultraviolet plasma optimization

 #18
20230367224
2023-11-16

RADIATION SOURCE MODULE AND LITHOGRAPHIC APPARATUS

 #19
20230363074
2023-11-09

Apparatus and method for generating extreme ultraviolet radiation

 #20
20230359125
2023-11-09

EUV vessel perimeter flow auto adjustment

 #21
20230309211
2023-09-28

EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS AND ELECTRONIC DEVICE MANUFACTURING METHOD

 #22
20230296992
2023-09-21

System and method for detecting debris in a photolithography system

 #23
20230296642
2023-09-21

Particle image velocimetry of extreme ultraviolet lithography systems

 #24
20230280656
2023-09-07

LIQUID TAMPED TARGETS FOR EXTREME ULTRAVIOLET LITHOGRAPHY

 #25
20230269858
2023-08-24

SYSTEMS AND METHODS FOR LASER-TO-DROPLET ALIGNMENT

 #26
20230215594
2023-07-06

EUV lithography apparatus

 #27
20230189422
2023-06-15

Method and system for generating droplets for EUV photolithography processes

 #28
20230185207
2023-06-15

Target debris collection device and extreme ultraviolet light source apparatus including the same

 #29
20230164899
2023-05-25

EXTREME ULTRAVIOLET LIGHT SOURCE APPARATUS

 #30
20230161273
2023-05-25

Lithography system and operation method thereof

 #31
20230156898
2023-05-18

CONTAMINATION SHIELD FOR MECHANICALLY INSULATING DEVICE

 #32
20230132074
2023-04-27

Lithography apparatus and method

 #33
20230122253
2023-04-20

EXTREME-ULTRAVIOLET LIGHT SOURCE DEVICE USING ELECTRON BEAMS

 #34
20230107078
2023-04-06

Replacement and refill method for droplet generator

 #35
20230091648
2023-03-23

Contamination trap

 #36
20230064840
2023-03-02

Method and apparatus for mitigating contamination

 #37
20230062302
2023-03-02

EUV lithography apparatus

 #38
20230061242
2023-03-02

EUV vessel perimeter flow auto adjustment

 #39
20230058753
2023-02-23

Semiconductor processing tool and methods of operation

 #40
20230023631
2023-01-26

Vessel for a radiation source

 #41
20230021544
2023-01-26

CIRCULATION MECHANISM AND OPERATION APPARATUS

 #42
20230010810
2023-01-12

System and method for supplying target material in an EUV light source

 #43
20220408538
2022-12-22

SEMICONDUCTOR SYSTEM INSPECTION TOOL AND METHODS OF OPERATION

 #44
20220369447
2022-11-17

EUV light source and apparatus for EUV lithography

 #45
20220361311
2022-11-10

Shock wave visualization for extreme ultraviolet plasma optimization

 #46
20220357677
2022-11-10

Lithography system and operation method thereof

 #47
20220338335
2022-10-20

Droplet generator assembly and method of replacing components

 #48
20220338334
2022-10-20

Method and system for generating droplets for EUV photolithography processes

 #49
20220338333
2022-10-20

EUV LIGHT SOURCE AND APPARATUS FOR LITHOGRAPHY

 #50
20220299883
2022-09-22

System and method for detecting debris in a photolithography system

 #51
20220291597
2022-09-15

Foil trap and light source apparatus including the same

 #52
20220276572
2022-09-01

Droplet generator and method of servicing a photolithographic tool

 #53
20220256681
2022-08-11

Modular laser-produced plasma x-ray system

 #54
20220229371
2022-07-21

System and method for monitoring and controlling extreme ultraviolet photolithography processes

 #55
20220225490
2022-07-14

Extreme ultraviolet lithography system with heated tin vane bucket having a heated cover

 #56
20220197158
2022-06-23

Contamination trap

 #57
20220191999
2022-06-16

EUV light source and apparatus for lithography

 #58
20220179328
2022-06-09

Cleaning a structure surface in an EUV chamber

 #59
20220141945
2022-05-05

Tin trap device, extreme ultraviolet light generation apparatus, and electronic device manufacturing method

 #60
20220132647
2022-04-28

High-brightness laser produced plasma source and method of generation and collection radiation

 #61
20220124901
2022-04-21

Apparatus and method for generating extreme ultraviolet radiation

 #62
20220113642
2022-04-14

Target debris collection device and extreme ultraviolet light source apparatus including the same

 #63
20220104335
2022-03-31

Target supply control apparatus and method in an extreme ultraviolet light source

 #64
20220075271
2022-03-10

Extreme ultraviolet light source system

 #65
20210410260
2021-12-30

Mechanical alignment of x-ray sources

 #66
20210407700
2021-12-30

Extreme ultraviolet light concentrating mirror and electronic device manufacturing method

 #67
20210318625
2021-10-14

Thermal controlling method in lithography system

 #68
20210298161
2021-09-23

Replacement method for droplet generator

 #69
20210294226
2021-09-23

Droplet generator and method of servicing extreme ultraviolet radiation source apparatus

 #70
20210294220
2021-09-23

Particle image velocimetry of extreme ultraviolet lithography systems

 #71
20210274627
2021-09-02

Apparatus and method for generating extreme ultraviolet radiation

 #72
20210247702
2021-08-12

Extreme ultraviolet lithography system with heated tin vane bucket having a heated cover

 #73
20210243875
2021-08-05

Light source for lithography exposure process

 #74
20210235572
2021-07-29

Residual gain monitoring and reduction for EUV drive laser

 #75
20210235571
2021-07-29

Extreme ultraviolet light generation apparatus and electronic device manufacturing method

 #76
20210227676
2021-07-22

EUV light source and apparatus for EUV lithography

 #77
20210223708
2021-07-22

EUV lithography system and method for decreasing debris in EUV lithography system

 #78
20210208508
2021-07-08

EUV radiation source apparatus for lithography

 #79
20210153333
2021-05-20

EUV light concentrating apparatus and lithography apparatus including the same

 #80
20210149317
2021-05-20

Method of operating semiconductor apparatus and semiconductor apparatus

 #81
20210092824
2021-03-25

Short-wavelength radiation source with multisectional collector module and method of collecting radiation

 #82
20210076479
2021-03-11

Method of operating semiconductor apparatus and semiconductor apparatus

 #83
20210063899
2021-03-04

Cleaning a structure surface in an EUV chamber

 #84
20210063891
2021-03-04

Systems and methods for operating a light system

 #85
20210059036
2021-02-25

Refill and replacement method for droplet generator

 #86
20210059035
2021-02-25

Target debris collection device and extreme ultraviolet light source apparatus including the same

 #87
20210048752
2021-02-18

Target image capturing device and extreme ultraviolet light generation apparatus

 #88
20210033981
2021-02-04

Extreme ultraviolet light generation apparatus and electronic device manufacturing method

 #89
20200413526
2020-12-31

Extreme ultraviolet photolithography method

 #90
20200348608
2020-11-05

Droplet generator and method of servicing extreme ultraviolet radiation source apparatus

 #91
20200348607
2020-11-05

Radiation source apparatus and method for decreasing debris in radiation source apparatus

 #92
20200312479
2020-10-01

Extreme ultraviolet chamber apparatus, extreme ultraviolet light generation system, and method for manufacturing electronic device

 #93
20200301285
2020-09-24

Extreme ultraviolet light generation device and electronic device manufacturing method

 #94
20200205276
2020-06-25

Generating extreme ultraviolet radiation with nanoscale antennas

 #95
20200163197
2020-05-21

High brightness laser-produced plasma light source

 #96
20200146137
2020-05-07

Residual gain monitoring and reduction for EUV drive laser

 #97
20200146136
2020-05-07

EUV LIGHT CONCENTRATING APPARATUS AND LITHOGRAPHY APPARATUS INCLUDING THE SAME

 #98
20200128657
2020-04-23

Supply system for an extreme ultraviolet light source

 #99
20200124976
2020-04-23

Radiation Source Module and Lithographic Apparatus

 #100
20200107426
2020-04-02

EUV light source and apparatus for EUV lithography

 #101
20200103433
2020-04-02

Particle image velocimetry of extreme ultraviolet lithography systems

 #102
20200100350
2020-03-26

Optical system, metrology apparatus and associated method

 #103
20200075190
2020-03-05

Apparatus and method for generating extreme ultraviolet radiation

 #104
20200073261
2020-03-05

Radiation source apparatus, EUV lithography system, and method for decreasing debris in EUV lithography system

 #105
20200068697
2020-02-27

Extreme ultraviolet light generation apparatus

 #106
20200068696
2020-02-27

Light source for lithography exposure process

 #107
20200068695
2020-02-27

Laser apparatus for generating extreme ultraviolet light

 #108
20200060014
2020-02-20

High brightness short-wavelength radiation source (variants)

 #109
20200057364
2020-02-20

Lithography system and operation method thereof

 #110
20200045801
2020-02-06

Light generation system using metal-nonmetal compound as precursor and related light generation method

 #111
20200041783
2020-02-06

Apparatus and method for prevention of contamination on collector of extreme ultraviolet light source

 #112
20200037428
2020-01-30

System, method and apparatus for target material debris cleaning of EUV vessel and EUV collector

 #113
20200033739
2020-01-30

EXTREME ULTRAVIOLET LIGHT GENERATION DEVICE

 #114
20200033731
2020-01-30

Target supply device, extreme ultraviolet light generation device, and target supply method

 #115
20200020458
2020-01-16

Radial lithographic source homogenizer

 #116
20200015343
2020-01-09

Method of purifying target material for an EUV light source

 #117
20200012202
2020-01-09

EUV cleaning systems and methods thereof for an extreme ultraviolet light source

 #118
20200008290
2020-01-02

EUV light source and apparatus for lithography

 #119
20200004168
2020-01-02

Droplet generator and method of servicing extreme ultraviolet radiation source apparatus

 #120
20200004167
2020-01-02

EUV light source and apparatus for lithography

 #121
20200004160
2020-01-02

EUV radiation source apparatus for lithography

 #122
20190394865
2019-12-26

Method of operating semiconductor apparatus and semiconductor apparatus

 #123
20190361361
2019-11-28

Extreme ultraviolet (EUV) light generating apparatus and control method for centroid of EUV light

 #124
20190339620
2019-11-07

High-temperature plasma raw material supply apparatus and extreme ultra violet light source apparatus

 #125
20190338431
2019-11-07

High purity tin and method for manufacturing same

 #126
20190289705
2019-09-19

Extreme ultraviolet light generation apparatus

 #127
20190289704
2019-09-19

System, method and apparatus for target material debris cleaning of EUV vessel and EUV collector

 #128
20190274210
2019-09-05

Reducing the effect of plasma on an object in an extreme ultraviolet light source

 #129
20190265594
2019-08-29

Debris mitigation system, radiation source and lithographic apparatus

 #130
20190237303
2019-08-01

Target supply device, target material refining method, recording medium having target material refining program recorded therein, and target generator

 #131
20190235287
2019-08-01

Laser device and extreme ultraviolet light generation device

 #132
20190200442
2019-06-27

Apparatus for and method of source material delivery in a laser produced plasma EUV light source

 #133
20190174614
2019-06-06

Extreme ultraviolet light generation device

 #134
20190171111
2019-06-06

Systems and methods for operating a light system

 #135
20190170670
2019-06-06

X-ray source using electron impact excitation of high velocity liquid metal beam

 #136
20190166679
2019-05-30

High-brightness laser produced plasma source and methods for generating radiation and mitigating debris

 #137
20190159328
2019-05-23

Chamber apparatus, target generation method, and EUV light generation apparatus

 #138
20190159327
2019-05-23

Extreme ultraviolet light generation method

 #139
20190155177
2019-05-23

Anti-rotation coupling

 #140
20190150265
2019-05-16

Light source for lithography exposure process

 #141
20190150263
2019-05-16

Apparatus and method for generating extreme ultraviolet radiation

 #142
20190150261
2019-05-16

Droplet collection device

 #143
20190146350
2019-05-16

Radiation source, lithographic apparatus device manufacturing method, sensor system and sensing method

 #144
20190141826
2019-05-09

System and method for generating extreme ultraviolet light

 #145
20190094718
2019-03-28

Radiation source apparatus, EUV lithography system, and method for decreasing debris in EUV lithography system

 #146
20190075642
2019-03-07

Chamber device and extreme ultraviolet light generating device

 #147
20190045614
2019-02-07

Target supply device, processing device and processing method therefor

 #148
20190037677
2019-01-31

System and method for generating extreme ultraviolet light

 #149
20190008026
2019-01-03

Tank, target generation device, and extreme-UV-light generation device

 #150
20180376575
2018-12-27

EUV light source and apparatus for lithography

 #151
20180373157
2018-12-27

Systems and methods for operating a light system

 #152
20180368242
2018-12-20

Supply system for an extreme ultraviolet light source

 #153
20180368241
2018-12-20

Droplet generator for lithographic apparatus, EUV source and lithographic apparatus

 #154
20180343730
2018-11-29

Reducing the effect of plasma on an object in an extreme ultraviolet light source

 #155
20180317309
2018-11-01

EUV source generation method and related system

 #156
20180317308
2018-11-01

Residual gain monitoring and reduction for EUV drive laser

 #157
20180307146
2018-10-25

Radiation system and optical device

 #158
20180298506
2018-10-18

High purity tin and method for manufacturing same

 #159
20180284617
2018-10-04

Extreme ultraviolet light generation device

 #160
20180263101
2018-09-13

TARGET GENERATION DEVICE AND EUV LIGHT GENERATION DEVICE

 #161
20180259861
2018-09-13

EUV cleaning systems and methods thereof for an extreme ultraviolet light source

 #162
20180255630
2018-09-06

Calibrating apparatus and method

 #163
20180206320
2018-07-19

Modular laser-produced plasma X-ray system

 #164
20180206318
2018-07-19

Modular laser-produced plasma X-ray system

 #165
20180173117
2018-06-21

Extreme ultraviolet lithography system with debris trapper on exhaust line

 #166
20180172967
2018-06-21

Integrated rotary structure and fabrication method thereof

 #167
20180160519
2018-06-07

Extreme ultraviolet light generation device

 #168
20180160518
2018-06-07

Target storage device

 #169
20180160517
2018-06-07

System, method and apparatus for target material debris cleaning of EUV vessel and EUV collector

 #170
20180146536
2018-05-24

Extreme ultraviolet light generation apparatus

 #171
20180110116
2018-04-19

System and method for generating extreme ultraviolet light

 #172
20180077785
2018-03-15

Extreme ultraviolet light generation device

 #173
20180034235
2018-02-01

Radiation source

 #174
20180031979
2018-02-01

Radiation source

 #175
20180027642
2018-01-25

Apparatus for and method of source material delivery in a laser produced plasma EUV light source

 #176
20180007771
2018-01-04

Droplet detector and extreme ultraviolet light generating apparatus

 #177
20170350745
2017-12-07

Liquid level detection device, method of detecting liquid level, high temperature plasma raw material supply device and extreme ultra violet light source device

 #178
20170332467
2017-11-16

Droplet dispensing device, method for providing droplets, and light source for providing UV or X-ray light

 #179
20170322499
2017-11-09

Radiation source and lithographic apparatus

 #180
20170280543
2017-09-28

Target supply device, processing device and processing method thefefor

 #181
20170247778
2017-08-31

Method and apparatus for purifying target material for EUV light source

 #182
20170231075
2017-08-10

Extreme ultraviolet light generation device

 #183
20170215267
2017-07-27

Extreme ultraviolet light generation apparatus

 #184
20170215265
2017-07-27

System, method and apparatus for target material debris cleaning of EUV vessel and EUV collector

 #185
20170196072
2017-07-06

System and method for generating extreme ultraviolet light employing laser pulse including pedestal

 #186
20170160646
2017-06-08

Lithographic apparatus, spectral purity filter and device manufacturing method

 #187
20170122803
2017-05-04

System and method for analyzing a light beam guided by a beam guiding optical unit

 #188
20170097572
2017-04-06

Faceted EUV optical element

 #189
20170086283
2017-03-23

EUV collector with orientation to avoid contamination

 #190
20170084360
2017-03-23

Method of improving measurement of energy of extreme ultraviolet radiation generated in a chamber

 #191
20170076901
2017-03-16

Techniques for optimizing nanotips derived from frozen taylor cones

 #192
20170064800
2017-03-02

Extreme ultraviolet light generation apparatus

 #193
20170059837
2017-03-02

EUV light generator including collecting mirror having drip hole

 #194
20170055336
2017-02-23

Extreme ultraviolet light generation apparatus

 #195
20170052456
2017-02-23

Lithographic system

 #196
20170048959
2017-02-16

Systems and methods for stabilization of droplet-plasma interaction via laser energy modulation

 #197
20170019983
2017-01-19

System and method for generating extreme ultraviolet light

 #198
20170019981
2017-01-19

Solution for EUV power increment at wafer level

 #199
20160377985
2016-12-29

Component for a radiation source, associated radiation source and lithographic apparatus

 #200
20160377848
2016-12-29

Extreme ultraviolet light source, exposure apparatus, and integrated rotary structure fabricating method

 #201
20160366756
2016-12-15

Method for EUV power improvement with fuel droplet trajectory stabilization

 #202
20160365694
2016-12-15

Laser apparatus and laser apparatus manufacturing method

 #203
20160353561
2016-12-01

Protecting a vacuum environment from leakage

 #204
20160345419
2016-11-24

Extreme UV radiation light source device

 #205
20160341601
2016-11-24

System for generating extreme ultra violet light

 #206
20160334711
2016-11-17

Radiation source

 #207
20160320708
2016-11-03

Extreme ultraviolet lithography collector contamination reduction

 #208
20160306282
2016-10-20

Collector in an extreme ultraviolet lithography system with optimal air curtain protection

 #209
20160295674
2016-10-06

Device for emitting extreme ultraviolet light

 #210
20160285222
2016-09-29

Laser unit and extreme ultraviolet light generating system

 #211
20160278196
2016-09-22

Radiation source having debris control

 #212
20160278195
2016-09-22

Apparatus for generating extreme ultraviolet light

 #213
20160274467
2016-09-22

Radiation source and method for lithography

 #214
20160270199
2016-09-15

Target producing apparatus

 #215
20160255709
2016-09-01

Extreme ultraviolet light generation apparatus

 #216
20160252821
2016-09-01

Radiation source device, lithographic apparatus and device manufacturing method

 #217
20160249443
2016-08-25

Target supply device

 #218
20160242268
2016-08-18

Extreme ultraviolet source with magnetic cusp plasma control

 #219
20160234920
2016-08-11

Extreme ultraviolet light generation apparatus

 #220
20160227638
2016-08-04

Extreme ultraviolet light generation apparatus including target droplet joining apparatus

 #221
20160227637
2016-08-04

Filter and target supply apparatus

 #222
20160209753
2016-07-21

Radiation source, lithographic apparatus device manufacturing method, sensor system and sensing method

 #223
20160209750
2016-07-21

Surface correction of mirrors with decoupling coating

 #224
20160205757
2016-07-14

Dual pulse driven extreme ultraviolet (EUV) radiation source method

 #225
20160198557
2016-07-07

Beam guiding apparatus

 #226
20160192470
2016-06-30

Extreme ultraviolet light generation apparatus

 #227
20160189910
2016-06-30

Metal-jet X-ray tube

 #228
20160181052
2016-06-23

Device for producing an electron beam

 #229
20160174352
2016-06-16

Apparatus for and method of source material delivery in a laser produced plasma EUV light source

 #230
20160174351
2016-06-16

Variable radius mirror dichroic beam splitter module for extreme ultraviolet source

 #231
20160165708
2016-06-09

Target supply apparatus and EUV light generating apparatus

 #232
20160156150
2016-06-02

Laser apparatus and extreme ultraviolet light generation system

 #233
20160150626
2016-05-26

Droplet generator steering system

 #234
20160150625
2016-05-26

Extreme ultraviolet source with dual magnetic cusp particle catchers

 #235
20160147160
2016-05-26

Radiation source for an EUV optical lithographic apparatus, and lithographic apparatus comprising such a radiation source

 #236
20160143122
2016-05-19

Apparatus and system for generating extreme ultraviolet light and method of using the same

 #237
20160128172
2016-05-05

System and method for generating extreme ultraviolet light

 #238
20160116332
2016-04-28

Light source and photolithography apparatus containing the same, calibrating apparatus and method

 #239
20160113101
2016-04-21

EUV light source and exposure apparatus

 #240
20160113100
2016-04-21

EUV light source and exposure apparatus

 #241
20160081174
2016-03-17

Dual pulse driven extreme ultraviolet (EUV) radiation source utilizing a droplet comprising a metal core with dual concentric shells of buffer gas

 #242
20160073486
2016-03-10

Extreme UV radiation light source device

 #243
20160057845
2016-02-25

Laser-driven light source for generating light from a plasma in an pressurized chamber

 #244
20160037616
2016-02-04

Extreme UV light generation apparatus and method

 #245
20160029471
2016-01-28

Target for extreme ultraviolet light source

 #246
20160018739
2016-01-21

Method for reducing contamination in extreme ultraviolet lithography light source

 #247
20160007435
2016-01-07

Systems and methods for synchronous operation of debris-mitigation devices

 #248
20150351211
2015-12-03

Extreme ultraviolet light generating apparatus, method of generating extreme ultraviolet light, concentrated pulsed laser light beam measuring apparatus, and method of measuring concentrated pulsed laser light beam

 #249
20150342016
2015-11-26

Target for laser produced plasma extreme ultraviolet light source

 #250
20150338753
2015-11-26

Radiation source and lithographic apparatus

 #251
20150293456
2015-10-15

Droplet generator, EUV radiation source, lithographic apparatus, method for generating droplets and device manufacturing method

 #252
20150289353
2015-10-08

Laser-driven light source

 #253
20150282287
2015-10-01

Transport system for an extreme ultraviolet light source

 #254
20150282285
2015-10-01

Discharge electrodes for use in a light source device

 #255
20150261094
2015-09-17

Collector in an extreme ultraviolet lithography system with optimal air curtain protection

 #256
20150247679
2015-09-03

Arrangement for cooling a plasma-based radiation source with a metal cooling liquid and method for starting up a cooling arrangement of this type

 #257
20150189730
2015-07-02

Method for generating extreme ultraviolet light and device for generating extreme ultraviolet light

 #258
20150189729
2015-07-02

Target for laser produced plasma extreme ultraviolet light source

 #259
20150189728
2015-07-02

Extreme ultraviolet light source

 #260
20150179401
2015-06-25

Method for controlling an interaction between droplet targets and a laser and apparatus for conducting said method

 #261
20150170868
2015-06-18

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