METHOD AND DEVICE FOR RECOGNIZING A PROCESS STATE OF A PLASMA ARC METHOD

LOW-K RF ROD FOR RF BIAS POWER DELIVERY

Method for measuring plasma ion nonextensive parameter

Waveform shape factor for pulsed PVD power

Langmuir probe operating at fixed voltages

Device for detecting plasma of ultra fast with multi channel

Method for measuring electron nonextensive parameter of plasma using nonextensive statistical mechanics

Plasma generation apparatus, substrate treating apparatus including the same, and control method for the plasma generation apparatus

Microscale gas breakdown device and process

Method for controlling semiconductor process

Method and system for carrying out plasma chemical reaction in gas flow

Dielectric barrier discharge ionization detector

Suppression of self pulsing DC driven nonthermal microplasma discharge to operate in a steady DC mode

Apparatus and method for determining the type, density and temperature of neutral radicals in plasma

Feedforward temperature control for plasma processing apparatus

Method and control unit for operating a plasma generation apparatus

Plasma evaluation apparatus

System and method of determining effective glow discharge lamp current

Systems and methods for calibrating a switched mode ion energy distribution system

In-situ VHF current sensor for a plasma reactor

Method and apparatus for detecting arc in plasma chamber

Device and use of the device for measuring the density and/or the electron temperature and/or the collision frequency of a plasma

Atomic flux measurement device

Methods of electrical signaling in an ion energy analyzer

Ion energy analyzer and methods of manufacturing the same

Ion energy analyzer

In-situ VHF voltage sensor for a plasma reactor

LC resonance probe for determining local plasma density

Method and system for characterizing a plasma

High frequency detection device and coaxial cable including the same

Feedforward temperature control for plasma processing apparatus

PLASMA PROCESSING APPARATUS

Plasma monitoring method

Methods for measuring a set of electrical characteristics in a plasma

Plasma sterilizing device and method

Capacitively-coupled electrostatic (CCE) probe arrangement for detecting strike step in a plasma processing chamber and methods thereof

Direct real-time monitoring and feedback control of RF plasma output for wafer processing

Systems for detecting unconfined-plasma events

Methods and apparatus for controlling characteristics of a plasma

METHOD FOR DETERMINING PLASMA CHARACTERISTICS

Method for monitoring process drift using plasma characteristics

Plasma diagnostic apparatus and method

Plasma processing chamber with an apparatus for measuring a set of electrical characteristics in a plasma

Method for determining plasma characteristics

Method for determining plasma characteristics

Probe for measuring characteristics of an excitation current of a plasma, and associated plasma reactor

Particle beam current measurement system

Temperature control of plasma density probe

Method and apparatus for measuring plasma density in processing reactors using a long dielectric tube

Apparatus for measuring a set of electrical characteristics in a plasma

Synchronous undersampling for high-frequency voltage and current measurements

Electron temperature measurement method, electron temperature measurement program for implementing the method, and storage medium storing the electron temperature measurement program

Electrically floating diagnostic plasma probe with ion property sensors

Plasma potential measuring method and apparatus, and plasma potential measuring probe

Plasma-based electro-optical sensing and methods