233422 ⎘
Generating plasma; Handling plasma Investigating plasma, e.g. measuring the degree of ionisation or the electron temperature
Sub-classes:PARALLEL ELECTRON SWARM PARAMETER CALCULATION METHOD TAKING ION DYNAMICS INTO CONSIDERATION, AND RELATED APPARATUS
#2LOW-TEMPERATURE PLASMA CONTROL SYSTEM
#3POSITION DETECTION APPARATUS, POSITION DETECTION METHOD, AND NON-TRANSITORY COMPUTER-READABLE MEDIUM STORING POSITION DETECTION PROGRAM
#4DATA COLLECTION SYSTEM, DATA COLLECTION APPARATUS, DATA COLLECTION METHOD, AND DATA COLLECTION PROGRAM
#5ATMOSPHERIC PLASMA FILTER
#6Microscale gas breakdown device and process
#7Ignition apparatus including spark plug that generates plasma
#8Plasma flow interaction simulator
#9System and method for calibration of optical signals in semiconductor process systems
#10Dielectric barrier discharge ionization detector
#11Dielectric barrier discharge ionization detector
#12Quasi-resonant plasma voltage generator
#13Plasma flow interaction simulator
#14Processing object modifying apparatus, printing apparatus, printing system, and method for manufacturing printout
#15Processing object modifying apparatus, printing apparatus, printing system, and method for manufacturing printout
#16Plasma flow interaction simulator
#17Plasma flow interaction simulator
#18Plasma temperature control apparatus and plasma temperature control method
#19Method and system for diagnosing abnormal plasma discharge
#20Method for calibrating particle beam energy
#21Application of in-situ plasma measurements to performance and control of a plasma processing system