241346 ⎘
Material or article handling; Associated with semiconductor wafer handling Wafer cassette transporting
TOWER LIFT, LOGISTICS SYSTEM INCLUDING THE SAME, AND TRANSFER METHOD USING THE SAME
#2Article accommodation facility
#3Article storage facility
#4Substrate processing method and substrate processing system
#5Side opening unified pod
#6Integrated systems for interfacing with substrate container storage systems
#7Substrate processing method and substrate processing system
#8Wafer transfer device
#9Temporary storage system, conveyance system using same, and temporary storage method
#10Article transport facility
#11Side opening unified pod
#12Method of etching and cleaning wafers
#13Container transport facility
#14Integrated systems for interfacing with substrate container storage systems
#15Substrate processing apparatus
#16Elevator-based tool loading and buffering system
#17Scalable stockers with automatic handling buffer
#18LCD glass substrate storage tray
#19Storage system for glass substrate and method for storing glass substrate
#20Substrate loading and unloading station with buffer
#21Transport system
#22Heat treatment apparatus and method of transferring substrates to the same
#23Transport system and transport method
#24Carrier transfer facilitating device
#25Anodizing apparatus
#26Transport system and set-up method
#27Article storage facility
#28Transport device
#29Scalable stockers with automatic handling buffer
#30Stocker apparatus and substrate treating apparatus
#31Elevator-based tool loading and buffering system
#32Article transport facility
#33BATCH PROCESSING PLATFORM FOR ALD AND CVD
#34Automatic storage system
#35System for purging reticle storage
#36Integrated systems for interfacing with substrate container storage systems
#37Substrate container storage system
#38Overhead transportation system and method of transferring article
#39Gate valve and substrate-treating apparatus including the same
#40Semiconductor wafer robot alignment system and method
#41STOCKER APPARATUS AND SUBSTRATE TREATING APPARATUS
#42Substrate processing apparatus
#43Substrate treatment apparatus
#44Substrate loading and unloading station with buffer
#45CLEAN DEVICE WITH CLEAN BOX-OPENING/CLOSING DEVICE
#46Coating and developing apparatus, coating and developing method, and storage medium
#47Vertical wafer buffering system
#48WAFER CARRIER HANDLING METHODS, SYSTEMS AND APPARATUS FOR SEMICONDUCTOR WAFER FABRICATION
#49ASCENDING/DESCENDING APPARATUS AND COMPLEX SINTERING FURNACE USING THE SAME
#50System and method for substrate transport
#51Reticle storage pod (RSP) transport system utilizing FOUP adapter plate
#52Actuatable loadport system
#53Vacuum Processing Apparatus And Semiconductor Manufacturing Line Using The Same
#54Suspended platform for overhead traveling carriage
#55Scalable stocker with automatic handling buffer
#56Photo spinner apparatus and wafer carrier loading/unloading method using the same
#57Semiconductor automation buffer storage identification system and method
#58Apparatus for Manufacturing Magnetic Recording Disk, and In-Line Type Substrate Processing Apparatus
#59Substrate processing apparatus
#60Side opening unified pod
#61Substrate treatment apparatus
#62Container changing system and container changing method
#63Coating and developing apparatus, coating and developing method, and storage medium
#64Vertical heat treatment apparatus and method for operating the same
#65Substrate processing system, substrate processing method, sealed container storing apparatus, program for implementing the substrate processing method, and storage medium storing the program
#66Transport system including vertical rollers
#67Method and system for locally buffering substrate carriers in an overhead transport system for enhancing input/output capabilities of process tools
#68Article storage facility
#69DIRECT TOOL LOADING
#70Transporting apparatus, transporting system, and elongation mechanism
#71High throughput semiconductor wafer processing
#72Apparatus for manufacturing magnetic recording disk, and in-line type substrate processing apparatus
#73Tray transportation device
#74Direct tool loading
#75OHT accessible high density stocker and method
#76Apparatus for storing contamination-sensitive flat articles, in particular for storing semiconductor wafers
#77Article transport facility
#78Suspended type transporting carriage and transporting system
#79Apparatus for manufacturing magnetic recording disk, and in-line type substrate processing apparatus
#80Vacuum expansion of integrated circuits at sort
#81Purge system for a substrate container
#82Vertical heat processing apparatus and heat processing method using the vertical heat processing apparatus
#83Vertical type heat processing apparatus and vertical type heat processing method
#84Method and apparatus for supplying substrates to a processing tool
#85Apparatus for Manufacturing Magnetic Recording Disk, and In-Line Type Substrate Processing Apparatus
#86Material supply device for diffusion furnaces
#87Work handling apparatus
#88Storage apparatus for transported object
#89VACUUM PROCESSING APPARATUS AND SEMICONDUCTOR MANUFACTURING LINE USING THE SAME
#90Processing system with increased cassette storage capacity
#91Load port device
#92Kinematic pin with shear member and substrate carrier for use therewith
#93KINEMATIC PIN WITH SHEAR MEMBER AND SUBSTRATE CARRIER FOR USE THEREWITH
#94Variable lot size load port
#95Clean stocker and method of storing articles
#96Batch processing platform for ALD and CVD
#97Ascending/descending apparatus and complex sintering furnace using the same
#98Methods and apparatus for enhanced operation of substrate carrier handlers
#99Substrate carrying and processing apparatus
#100Compact apparatus and method for storing and loading semiconductor wafer carriers
#101Transport system including vertical rollers
#102Transport system including vertical rollers
#103APPARATUS FOR STORING AND MOVING A CASSETTE
#104Method for carrying a semiconductor device
#105Apparatus for Manufacturing Magnetic Recording Disk, and In-Line Type Substrate Processing Apparatus
#106Pod clamping unit load port equipped with pod clamping unit and mini environment system including pod and load port
#107Transportable container including an internal environment monitor
#108Substrate processing apparatus
#109Kinematic coupling with textured contact surfaces
#110Reticle storage pod (RSP) transport system utilizing FOUP adapter plate
#111Horizontal array stocker
#112Modular terminal for high-throughput AMHS
#113Apparatus and method for cleaning and drying a container for semiconductor workpieces
#114Clean device with clean box-opening/closing device
#115Methods and apparatus for a band to band transfer module
#116Methods and apparatus for a transport lift assembly
#117Methods and apparatus for a transfer station
#118Article transport facility
#119Gate valve and substrate-treating apparatus including the same
#120System and method for improved auto-boating
#121Substrate transfer system
#122Pod swapping internal to tool run time
#123Interface between conveyor and semiconductor process tool load port
#124Coating method and coating apparatus
#125Dual cassette load lock
#126Method of controlling a lithographic processing cell, device manufacturing method, lithographic apparatus, track unit, lithographic processing, cell and computer program
#127Methods and apparatus for enhanced operation of substrate carrier handlers
#128Direct tool loading
#129Direct tool loading
#130Vertical batch processing apparatus
#131Method of carrying out an exposure process for a liquid crystal display device
#132Carriage system
#133Methods and apparatus for identifying small lot size substrate carriers
#134Overhead travelling carriage
#135Overhead travelling carriage
#136Substrate transportation device (air)
#137Substrate processing system, substrate processing method, sealed container storing apparatus, program for implementing the substrate processing method, and storage medium storing the program
#138Apparatus and method for processing wafers
#139Elevator-based tool loading and buffering system
#140Film forming system and film forming method
#141System and method for reticle protection and transport
#142Substrate carrier having door latching and substrate clamping mechanisms
#143Overhead travelling carriage system
#144Apparatus for storing and moving a cassette
#145Article storage facility and system for the same
#146Overhead travelling carriage system
#147Stocker driving system and stocker driving method using the same
#148Vacuum processing apparatus and operating method therefor
#149Apparatus for storing and moving a cassette
#150Transportable container including an internal environment monitor
#151Lithographic apparatus and device manufacturing method
#152Lithographic apparatus and device manufacturing method
#153Small lot size lithography bays
#154Method and device for controlling position of cassette in semiconductor manufacturing equipment
#155Apparatus for replacing gas in storage container and method for replacing gas therewith
#156Positioning apparatus, exposure apparatus, and semiconductor device manufacturing method
#157Apparatus for transporting substrates under a controlled atmosphere
#158Wafer scale die handling
#159Method of controlling a lithographic processing cell, device manufacturing method, lithographic apparatus, track unit, lithographic processing cell, and computer program
#160Vacuum processing apparatus and semiconductor manufacturing line using the same
#161Receiving container body for object to be processed
#162Kinematic pin with shear member and substrate carrier for use therewith
#163Overhead travelling carriage system
#164Extractor/buffer
#165Stocker utilization self-balancing system and method
#166Exposure apparatus having a processing chamber, a vacuum chamber and first and second load lock chambers
#167Auto-boating process
#168Apparatus for manufacturing magnetic recording disk, and in-line type substrate processing apparatus
#169Lithography equipment
#170Integrated transport system
#171Proactive staging for distributed material handling
#172Apparatus for conveying substrates
#173Method for providing distributed material management and flow control in an integrated circuit factory
#174Automated semiconductor processing systems
#175Transfer robot and inspection method for thin substrate
#176Device for temporarily loading, storing and unloading a container