Sensor-based position and orientation feedback of robot end effector with respect to destination chamber

Replaceable end effector contact pads, end effectors, and maintenance methods

Substrate storage and processing

Substrate treating apparatus with parallel gas supply pipes and a gas exhaust pipe

Multi-story substrate treating apparatus with flexible transport mechanisms and vertically divided treating units

Method of etching and cleaning wafers

Removable spin chamber with vacuum attachment

Container transport facility

Port door positioning apparatus and associated methods

Systems, apparatus and methods for transporting substrates in electronic device manufacturing

Low cost high throughput processing platform

Substrate transport apparatus with active edge gripper

LCD glass substrate storage tray

Semiconductor manufacturing systems

Substrate loading and unloading station with buffer

Method for fabricating semiconductor device, and method for fabricating display device

Purge device and load port apparatus including the same

Frame feeding system and frame feeding method

System and Method for Using a Two Part Cover and a Box for Protecting a Reticle

Load port

Methods and loadport for purging a substrate carrier

Cluster tool architecture for processing a substrate

Substrate transferring system and substrate transferring method

Lid opening/closing system of an airtight container

Robot arm apparatus

Substrate transfer method for performing processes including photolithography sequence

Industrial robot

Substrate transport apparatus with active edge gripper

CLUSTER TOOL ARCHITECTURE FOR PROCESSING A SUBSTRATE

Substrate treating apparatus

Linear semiconductor processing facilities

Substrate treating apparatus with vertical treatment arrangement including vertical blowout and exhaust units

Substrate treating apparatus using horizontal treatment cell arrangements with parallel treatment lines

Substrate processing sequence in a cartesian robot cluster tool

Anodizing apparatus

Vacuum processing apparatus

Processing thin wafers

Thin film deposition apparatus and method of manufacturing organic light-emitting display device by using the same

Load port apparatus

Lid opening/closing system of an airtight container

Methods and loadport apparatus for purging a substrate carrier

Integrated apparatus to assure wafer quality and manufacturability

Stacked process modules for a semiconductor handling system

Substrate processing apparatus and substrate transfer method adopted in substrate processing apparatus

Loadlock designs and methods for using same

Port door positioning apparatus and associated methods

Minimum contact area wafer clamping with gas flow for rapid wafer cooling

Substrate support apparatus and vacuum processing apparatus

Substrate processing system and substrate transferring method

Vacuum processing apparatus

Substrate transfer method and substrate transfer apparatus

Method for machining a workpiece on a workpiece support

Gas charging apparatus, gas discharging apparatus, gas charging method, and gas discharging method

Substrate storage pod and lid member thereof, and processing apparatus for a substrate

Methods and systems of transferring, docking and processing substrates

Apparatus for transferring a substrate

MANUFACTURING APPARATUS

Method of transfer by means of a ferroelectric substrate

Substrate processing apparatus

Thin film deposition apparatus and method of manufacturing organic light-emitting display device by using the same

Method and storage medium for replacing process instrument in processing apparatus

System and method for using a two part cover and a box for protecting a reticle

Method of object transfer for a heat treatment system

Method and apparatus for transferring substrate

System for purging reticle storage

Lid opening/closing system for closed container and substrate processing method using same

ELECTRONIC DEVICE MANUFACTURING CHAMBER AND METHODS OF FORMING THE SAME

Substrate processing sequence in a Cartesian robot cluster tool

Semiconductor wafer robot alignment system and method

Lid opening/closing system of an airtight container

Substrate processing apparatus and substrate processing method

Systems, apparatus and methods for transporting substrates

Methods and systems of transferring a substrate to minimize heat loss

Substrate loading and unloading station with buffer

Methods and systems of transferring, docking and processing substrates

Drying furnace for coated film

Substrate processing apparatus, program for performing operation and control method thereof, and computer readable storage medium storing the program

System and method for introducing a substrate into a process chamber

System and method for introducing a substrate into a process chamber

EXTENDABLE MES FOR CROSS-AMHS TRANSPORTATION

FABRICATION SYSTEM AND FABRICATION METHOD

Substrate processing system and substrate processing method

Substrate processing method and substrate processing system

Vacuum processing apparatus

Wafer's ambiance control

Multi-chamber system having compact installation set-up for an etching facility for semiconductor device manufacturing

Unit and method for transferring substrates and apparatus and method for treating substrates with the unit

Processing thin wafers

Wafer processing apparatus with wafer alignment device

Gate valve and semiconductor manufacturing apparatus

Vacuum Processing Apparatus And Semiconductor Manufacturing Line Using The Same

MULTI-CHAMBER SYSTEM HAVING COMPACT INSTALLATION SET-UP FOR AN ETCHING FACILITY FOR SEMICONDUCTOR DEVICE MANUFACTURING

Substrate processing system and substrate transfer method

Substrate treating apparatus, and a substrate transporting method therefor

Method for transferring test trays in a side-docking type test handler

Apparatus for Manufacturing Magnetic Recording Disk, and In-Line Type Substrate Processing Apparatus

Loadlock designs and methods for using same

Multi-story substrate treating apparatus with flexible transport mechanisms and vertically divided treating units

Work transfer system, route setting method, and route setting program

Apparatus and method for a multi-level load lock chamber, transfer chamber, and robot suitable for interfacing with same

Substrate transfer apparatus and method for controlling down flow

Methods and systems for lithography process control

Method of fabricating light emitting devices

Seal device and method for operating the same and substrate processing apparatus comprising a vacuum chamber

Stacked process modules for a semiconductor handling system

Cluster tool architecture for processing a substrate

Cluster tool architecture for processing a substrate

Cluster tool architecture for processing a substrate

Lid opening/closing system for closed container and substrate processing method using same

Dual-mode robot systems and methods for electronic device manufacturing

Apparatus for manufacturing magnetic recording disk, and in-line type substrate processing apparatus

Vacuum processing apparatus

Parallel substrate treatment for a plurality of substrate treatment lines

Apparatus and method for transferring two or more wafers whereby the positions of the wafers can be measured

Vacuum processing apparatus

Apparatus for processing a substrate

Apparatus for processing a substrate

Method and system for removing empty carriers from process tools by controlling an association between control jobs and carrier

COAT/DEVELOP MODULE WITH SHARED DISPENSE

System for testing and sorting electronic components

Extendable MES for Cross-AMHS Transportation

Substrate processing method, substrate processing system, and computer-readable storage medium

Substrate attracting device and substrate transfer apparatus

Apparatus for storing contamination-sensitive flat articles, in particular for storing semiconductor wafers

Lithographic apparatus and method for masking a substrate

Fabrication system and fabrication method

Substrate processing apparatus, control method for the apparatus, and program for implementing the method

CLUSTER TOOL ARCHITECTURE FOR PROCESSING A SUBSTRATE

Apparatus for manufacturing magnetic recording disk, and in-line type substrate processing apparatus

Vacuum expansion of integrated circuits at sort

Displacement device

Cluster tool architecture for processing a substrate

Apparatus for Manufacturing Magnetic Recording Disk, and In-Line Type Substrate Processing Apparatus

Unit and method for transferring substrates and apparatus and method for treating substrates with the unit

Material supply device for diffusion furnaces

High temperature robot end effector

Method for fabricating highly reliable interconnects

Method and apparatus for processing a wafer

Vacuum processing apparatus

Method and apparatus for processing a wafer

VACUUM PROCESSING APPARATUS AND SEMICONDUCTOR MANUFACTURING LINE USING THE SAME

System and method for introducing a substrate into a process chamber

Planar motor

Carrier module for use in a handler and handler for handling packaged chips for a test using the carrier modules

Coating/developing apparatus and substrate transfer method

Multifunctional handler system for electrical testing of semiconductor devices

Integrated method for removal of halogen residues from etched substrates in a processing system

Substrate processing apparatus and substrate processing method

Substrate treating apparatus

Method and apparatus for processing a wafer

Linear semiconductor processing facilities

Utility apparatus and utility method of substrate processing apparatus

Utility apparatus and utility method of substrate processing apparatus

Semiconductor device fabricating system

Intermediate transfer chamber, substrate processing system, and exhaust method for the intermediate transfer chamber

Wafer transfer apparatus and substrate transfer apparatus

Method for manufacturing electronic device

Substrate collection method and substrate treatment apparatus

Buffer system for adjusting first-in first-out

Multi-level load lock chamber, transfer chamber, and robot suitable for interfacing with same

METHODS AND APPARATUS FOR ELECTRONIC DEVICE MANUFACTURING SYSTEM MONITORING AND CONTROL

Inspection device for inspecting thin plate container and method of inspecting thin plate container

Methods and apparatus for transporting substrate carriers

Workpiece processing device

Method for detecting transfer shift of transfer mechanism and semiconductor processing equipment

Methods and apparatus for enhanced operation of substrate carrier handlers

System and method for using a two part cover and a box for protecting a reticle

Apparatus for Manufacturing Magnetic Recording Disk, and In-Line Type Substrate Processing Apparatus

Vertical type of thermal processing apparatus and method of using the same

Substrate treatment apparatus

Rack for supporting liquid crystal display devices

Plasma processing apparatus

Method and storage medium for replacing process instrument in processing apparatus

Low cost high throughput processing platform

Heat treatment system and method therefore

Methods and apparatus for purging a substrate carrier

Lid opening/closing system of an airtight container

Lid opening/closing system of an airtight container

Conveyance method for transporting objects

Substrate processing sequence in a cartesian robot cluster tool

Seal device and method for operating the same and substrate processing apparatus comprising a vacuum chamber

Semiconductor manufacturing apparatus and semiconductor manufacturing method using the same

System and method for performing semiconductor processing on target substrate

Substrate transfer method and substrate transfer apparatus

Method for machining a workpiece on a workpiece support

Straight conveying device for vacuum

Method and apparatus for processing a wafer

Methods and apparatus for positioning a substrate relative to a support stage

Methods and apparatus for a band to band transfer module

Methods and apparatus for a transport lift assembly

Methods and apparatus for a transfer station

Methods and apparatus for transporting substrate carriers

Heat treatment apparatus and heat treatment method using the same

System and method for improved auto-boating

Sensor device for non-intrusive diagnosis of a semiconductor processing system

Treatment unit for the wet-chemical or electrolytic treatment of flat workpieces

Detachable edge ring for thermal processing support towers

CASSETTE FOR A LOAD-LOCK

Cluster tool architecture for processing a substrate

Cluster tool architecture for processing a substrate

Substrate processing system and substrate processing method

Purging apparatus and purging method

Linear semiconductor processing facilities

Methods and apparatus for transporting substrate carriers

Coating method and coating apparatus

Gripper and method of operating the same

Pod cover removing-installing apparatus

Transfer chamber between workstations

Methods and apparatus for transporting substrate carriers

Integrated thermal unit having a shuttle with a temperature controlled surface

Sensor device for non-intrusive diagnosis of a semiconductor processing system

Gate valve for plus-atmospheric pressure semiconductor process vessels

Substrate transport apparatus with active edge gripper

Substrate processing apparatus and substrate housing method

Method of controlling a lithographic processing cell, device manufacturing method, lithographic apparatus, track unit, lithographic processing, cell and computer program

Door device comprising a double bayonet socket for an insulator

Gate valve and vacuum container for semiconductor processing system

Semiconductor manufacturing apparatus and method

Methods and apparatus for enhanced operation of substrate carrier handlers

Cartesian robot cluster tool architecture

Substrate processing apparatus and substrate transfer method adopted in substrate processing apparatus

Methods and apparatus for identifying small lot size substrate carriers

Unified frame for semiconductor material handling system

Wireless substrate-like sensor

Sensor for measuring liquid contaminants in a semiconductor wafer fabrication process

Load lock system for ion beam processing

Vacuum processing apparatus

In-line program system for assembly printed circuit board

Substrate transfer controlling apparatus and substrate transferring method

Distributed temperature control system for point of dispense temperature control on track systems utilizing mixing of hot and cold streams

Transfer chamber for vacuum processing system

Transfer system and transfer method of object to be processed

Wireless substrate-like sensor

Methods and systems for lithography process control

Substrate transportation device (air)

Method and system for determining post exposure bake endpoint

Coat/develop module with independent stations

Cluster tool architecture for processing a substrate

Developer endpoint detection in a track lithography system

Purged vacuum chuck with proximity pins

Cluster tool substrate throughput optimization

Cluster tool architecture for processing a substrate

Coat/develop module with shared dispense

Fabrication system and fabrication method

Fabrication system and fabrication method

Substrate processing apparatus and substrate processing method

Substrate processing apparatus, program for performing operation and control method thereof, and computer readable storage medium storing the program

Substrate processing apparatus and substrate processing method

Processing thin wafers

Electronic device manufacturing chamber method

System for using a two part cover for and a box for protecting a reticle

Method of transferring a substantially disc-shaped workpiece, and device for carrying out this method

Contact material and system for ultra-clean applications

Substrate processing apparatus with removable component module

Low cost high throughput processing platform

Advanced low cost high throughput processing platform

Planar motor initialization method, planar motor, lithographic apparatus and device manufacturing method

Transport speed monitoring apparatus and semiconductor processing system utilizing the same

Electromagnetic alignment and scanning apparatus

Component placement apparatus, component feeding apparatus and method

Simplified wafer alignment

Positioning apparatus, exposure apparatus, and semiconductor device manufacturing method

Apparatus for transporting substrates under a controlled atmosphere

Transport pod with protection by the thermophoresis effect

Multi-chamber system having compact installation set-up for an etching facility for semiconductor device manufacturing

Methods and apparatus for electronic device manufacturing system monitoring and control

Methods and systems for driving robotic components of a semiconductor handling system

Lift pin alignment and operation methods and apparatus

Coating and developing apparatus

System and method providing control of reticle stocking and sorting

Apparatus for manufacturing substrate

Substrate processing apparatus and substrate processing method

Wafer scale die handling

Method and device for processing substrate

Method of controlling mover device

Method of controlling a lithographic processing cell, device manufacturing method, lithographic apparatus, track unit, lithographic processing cell, and computer program

Transport system for a lithographic apparatus and device manufacturing method

Vacuum processing apparatus and semiconductor manufacturing line using the same

Method of correction for wafer crystal cut error in semiconductor processing

Substrate treating apparatus

Wafer edge detector

Wafer loading station that automatically retracts from a moving conveyor in response to an unscheduled event

Substrate processing apparatus and management method

Integrated lithographic fabrication cluster

Structure for racking substrates

Sensor device for non-intrusive diagnosis of a semiconductor processing system

Substrate processing apparatus, control method for the apparatus, and program for implementing the method

Substrate processing apparatus and method including obstacle detection

Methods and systems for handling a workpiece in vacuum-based material handling system

Stacked process modules for a semiconductor handling system

Supply control system and method, program, and information storage medium

Software controller for handling system

Sensor methods and systems for semiconductor handling

Air cleaning system for semiconductor manufacturing equipment

Auto-boating process

Methods and systems for reducing the effect of vibration in a vacuum-based semiconductor handling system

Wafer support attachment for a semi-conductor wafer transport container

Apparatus for manufacturing magnetic recording disk, and in-line type substrate processing apparatus

Port structure in semiconductor processing system

Heat treatment jig for semiconductor substrate