Y10S438/908 - CPC Classification Index

#1

20130065796

2013-03-14

Advanced Mixing System for Integrated Tool Having Site-Isolated Reactors

#2

20120231975

2012-09-13

Advanced mixing system for integrated tool having site-isolated reactors

#3

20110281773

2011-11-17

Advanced mixing method for integrated tool having site-isolated reactors

#4

20110271907

2011-11-10

Device for processing a substrate, method of processing a substrate and method of manufacturing semiconductor device

#5

20110204045

2011-08-25

Suitably short wavelength light for laser annealing of silicon in DSA type systems

#6

20110132260

2011-06-09

MANUFACTURING APPARATUS

#7

20110104847

2011-05-05

Evaporative system for solar cell fabrication

#8

20100159142

2010-06-24

Substrate processing apparatus and substrate processing method

#9

20100144077

2010-06-10

Method of manufacturing a semiconductor device

#10

20100136714

2010-06-03

Device for processing a substrate, method of processing a substrate and method of manufacturing semiconductor device

#11

20100131093

2010-05-27

FABRICATION SYSTEM AND FABRICATION METHOD

#12

20090275215

2009-11-05

Suitably short wavelength light for laser annealing of silicon in DSA type systems

#13

20090217878

2009-09-03

System for thin film deposition utilizing compensating forces

#14

20090170337

2009-07-02

Device for processing substrate and method of manufacturing semiconductor device

#15

20090081886

2009-03-26

System for thin film deposition utilizing compensating forces

#16

20090075411

2009-03-19

Method of fabricating light emitting devices

#17

20090029509

2009-01-29

Substrate processing apparatus and a manufacturing method of a thin film semiconductor device

#18

20080243293

2008-10-02

Fabrication system and fabrication method

#19

20080156769

2008-07-03

Advanced mixing system for integrated tool having site-isolated reactors

#20

20080081485

2008-04-03

Post-ion implant cleaning for silicon on insulator substrate preparation

#21

20080018868

2008-01-24

Circulation system for high refractive index liquid in pattern forming apparatus

#22

20080012013

2008-01-17

Pattern manufacturing equipments, organic thin-film transistors and manufacturing methods for organic thin-film transistor

#23

20070173046

2007-07-26

Manufacturing method of a thin film semiconductor device

#24

20070166892

2007-07-19

Method and apparatus of fabricating semiconductor device

#25

20070093012

2007-04-26

Method for fabricating a gate dielectric of a field effect transistor

#26

20070084832

2007-04-19

Method and apparatus for thermally processing microelectronic workpieces

#27

20070057352

2007-03-15

METHOD AND APPARATUS FOR THERMALLY PROCESSING MICROELECTRONIC WORKPIECES

#28

20060286783

2006-12-21

Post-ion implant cleaning for silicon on insulator substrate preparation

#29

20060206223

2006-09-14

Methods for configuring a plasma cluster tool

#30

20060185596

2006-08-24

Vapor phase growth method by controlling the heat output in the gas introduction region

#31

20060161286

2006-07-20

Substrate transfer controlling apparatus and substrate transferring method

#32

20060111805

2006-05-25

Fabrication system and fabrication method

#33

20060111802

2006-05-25

Fabrication system and fabrication method

#34

20060105580

2006-05-18

Method and apparatus for thermally processing microelectronic workpieces

#35

20060105514

2006-05-18

Thin film semiconductor device and method of manufacturing the same

#36

20060098978

2006-05-11

Substrate processing apparatus and substrate processing method

#37

20060032079

2006-02-16

Serial thermal processor arrangement

#38

20050236114

2005-10-27

Sample processing system

#39

20050031783

2005-02-10

System for and method of manufacturing a large-area backplane by use of a small-area shadow mask