ClassID:

242059

Y10S438/97 - CPC Classification

Classification description:

Semiconductor device manufacturing: process Specified etch stop material

Recent Application in this class:
#1
20140170846
2014-06-19

Sidewall-free CESL for enlarging ILD gap-fill window

#2
20130270651
2013-10-17

Sidewall free CESL for enlarging ILD gap-fill window

#3
20120049325
2012-03-01

Integrated circuit having an edge passivation and oxidation resistant layer and method

#4
20100314690
2010-12-16

Sidewall-Free CESL for Enlarging ILD Gap-Fill Window

#5
20100019388
2010-01-28

Method for an integrated circuit contact

#6
20080254612
2008-10-16

Polycarbosilane buried etch stops in interconnect structures

#7
20080160760
2008-07-03

Method of forming contact plug in semiconductor

#8
20080057720
2008-03-06

Method for patterning contact etch stop layers by using a planarization process

#9
20070281487
2007-12-06

Method for an integrated circuit contact

#10
20070222023
2007-09-27

Integrated circuit having an edge passivation and oxidation resistant layer and method

#11
20070187712
2007-08-16

Light emitting device and method of fabricating the same

#12
20070111509
2007-05-17

Polycarbosilane buried etch stops in interconnect structures

#13
20070077708
2007-04-05

Technique for creating different mechanical strain by forming a contact etch stop layer stack having differently modified intrinsic stress

#14
20060009028
2006-01-12

Anti-reflective coating doped with carbon for use in integrated circuit technology and method of formation

#15
20050266634
2005-12-01

Methods of fabricating semiconductor devices including polysilicon resistors and related devices

#16
20050136642
2005-06-23

Method for fabricating semiconductor device

#17
20050098899
2005-05-12

Structure and method of forming an enlarged head on a plug to eliminate the enclosure requirement

#18
20050020090
2005-01-27

Method for an integrated circuit contact

#19
20050020056
2005-01-27

Method for an integrated circuit contact

#20
20050020049
2005-01-27

Method for an integrated circuit contact