ClassID:

242067

Y10S438/978 - CPC Classification

Classification description:

Semiconductor device manufacturing: process forming tapered edges on substrate or adjacent layers

Recent Application in this class:
#1
20170365677
2017-12-21

Nonplanar device with thinned lower body portion and method of fabrication

#2
20160005829
2016-01-07

Nonplanar device with thinned lower body portion and method of fabrication

#3
20140295652
2014-10-02

GaN vertical superjunction device structures and fabrication methods

#4
20140239358
2014-08-28

Nonplanar device with thinned lower body portion and method of fabrication

#5
20130341677
2013-12-26

GAN vertical superjunction device structures and fabrication methods

#6
20130062767
2013-03-14

Via structure and via etching process of forming the same

#7
20120012934
2012-01-19

Nonplanar device with thinned lower body portion and method of fabrication

#8
20110062512
2011-03-17

Nonplanar device with thinned lower body portion and method of fabrication

#9
20100244247
2010-09-30

Via structure and via etching process of forming the same

#10
20100197043
2010-08-05

Structure and method for fabricating cladded conductive lines in magnetic memories

#11
20100075463
2010-03-25

Method and apparatus for fabricating self-assembling microstructures

#12
20090289324
2009-11-26

Mask overhang reduction or elimination after substrate etch

#13
20090107956
2009-04-30

Thermal gradient control of high aspect ratio etching and deposition processes

#14
20090081870
2009-03-26

Method of forming a semiconductor device featuring copper wiring layers of different widths having metal capping layers of different thicknesses formed thereon

#15
20080280428
2008-11-13

Method of manufacturing semiconductor device

#16
20080251845
2008-10-16

Semiconductor device and manufacturing method thereof

#17
20080213989
2008-09-04

Method for manufacturing SOI wafer

#18
20080132038
2008-06-05

Semiconductor device and manufacturing method of the same

#19
20080090408
2008-04-17

Methods for controlling the profile of a trench of a semiconductor structure

#20
20070173031
2007-07-26

Thin-film circuit device having a low strength region, method for manufacturing the thin-film circuit device, and electronic apparatus

#21
20070052339
2007-03-08

Electron emitters with dopant gradient

#22
20060281318
2006-12-14

Method of manufacturing semiconductor device

#23
20060237812
2006-10-26

Electronic emitters with dopant gradient

#24
20060226765
2006-10-12

Electronic emitters with dopant gradient

#25
20060214231
2006-09-28

Nonplanar device with thinned lower body portion and method of fabrication

#26
20060199379
2006-09-07

Method for forming dual damascene structures with tapered via portions and improved performance

#27
20060172546
2006-08-03

Dry-etching method

#28
20060157854
2006-07-20

Semiconductor device featuring copper wiring layers of different widths having metal capping layers of different thickness formed thereon, and method for manufacturing the same

#29
20060121669
2006-06-08

Heterojunction bipolar transistor with dielectric assisted planarized contacts and method for fabricating

#30
20060108695
2006-05-25

Semiconductor device with a via hole having a diameter at the surface larger than a width of a pad electrode

#31
20060086977
2006-04-27

Nonplanar device with thinned lower body portion and method of fabrication

#32
20060068547
2006-03-30

Methods of forming self-aligned floating gates using multi-etching

#33
20060030127
2006-02-09

Method of fabricating semiconductor device

#34
20060027875
2006-02-09

Semiconductor device with gate spacer of positive slope and fabrication method thereof

#35
20060009024
2006-01-12

Method for forming a metal line in a semiconductor device

#36
20060006545
2006-01-12

Semiconductor structure and fabrication therefor

#37
20050274690
2005-12-15

Via etch process

#38
20050227419
2005-10-13

Semiconductor device and manufacturing method thereof

#39
20050186712
2005-08-25

Method and apparatus for fabricating self-assembling microstructures

#40
20050186359
2005-08-25

Method for manufacturing conductive element substrate, conductive element substrate, method for manufacturing liquid crystal display, liquid crystal display and electronic information equipment

#41
20050176257
2005-08-11

Method of manufacturing a semiconductor apparatus with a tapered aperture pattern to form a predetermined line width

#42
20050095778
2005-05-05

Method for forming capacitor of semiconductor device

#43
20050048744
2005-03-03

Method of manufacturing semiconductor device

#44
20050037562
2005-02-17

Semiconductor capacitor structure and method for manufacturing the same

#45
20050023951
2005-02-03

Electron emitters with dopant gradient