248365 ⎘
Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
Sub-classes:DEVICES AND METHODS FOR GROWING CRYSTALS
#2LARGE DIAMETER SILICON CARBIDE SINGLE CRYSTALS AND APPARATUS AND METHOD OF MANUFACTURE THEREOF
#3METHODS AND SYSTEMS FOR PRODUCING COMPOSITE CRYSTALS
#4Vapor phase epitaxial growth device
#5Ingot puller apparatus that use a solid-phase dopant
#6METHODS FOR PRODUCING A SINGLE CRYSTAL SILICON INGOT USING BORIC ACID AS A DOPANT
#7DEVICES AND METHODS FOR GROWING CRYSTALS
#8Single crystal furnace
#9Vapor deposition device and method for manufacturing epitaxial silicon wafer
#10Devices and methods for growing crystals
#11Large diameter silicon carbide single crystals and apparatus and method of manufacture thereof
#12Apparatus for producing bulk silicon carbide
#13Methods for producing a single crystal silicon ingot using boric acid as a dopant and ingot puller apparatus that use a solid-phase dopant
#14Vapor phase epitaxial growth device
#15Sample stage/holder for improved thermal and gas flow control at elevated growth temperatures
#16Method for cleaning exhaust passage for semiconductor crystal manufacturing device
#17Apparatus for producing bulk silicon carbide
#18Apparatus for cleaning exhaust passage for semiconductor crystal manufacturing device
#19Susceptor and method for manufacturing epitaxial wafer