248366 ⎘
Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor Apparatus
Sub-classes:APPARATUS, SYSTEMS, AND METHODS OF USING ATOMIC HYDROGEN RADICALS WITH SELECTIVE EPITAXIAL DEPOSITION
#2APPARATUS, SYSTEMS, AND METHODS OF USING ATOMIC HYDROGEN RADICALS WITH SELECTIVE EPITAXIAL DEPOSITION
#3Ingot puller apparatus that use a solid-phase dopant
#4METHODS FOR PRODUCING A SINGLE CRYSTAL SILICON INGOT USING BORIC ACID AS A DOPANT
#5CRYSTAL PULLING SYSTEM AND METHODS FOR PRODUCING MONOCRYSTALLINE INGOTS WITH REDUCED EDGE BAND DEFECTS
#6SEMICONDUCTOR DEVICE AND SEMICONDUCTOR DEVICE PRODUCTION SYSTEM
#7RF choke for gas delivery to an RF driven electrode in a plasma processing apparatus
#8Methods for producing a single crystal silicon ingot using boric acid as a dopant and ingot puller apparatus that use a solid-phase dopant
#9Assembly for the deposition of silicon nanostructures
#10Sample stage/holder for improved thermal and gas flow control at elevated growth temperatures
#11Semiconductor device and semiconductor device production system
#12DEVICE AND METHOD FOR PRESSURE-DRIVEN PLUG TRANSPORT AND REACTION
#13Semiconductor device and semiconductor device production system
#14RF CHOKE FOR GAS DELIVERY TO AN RF DRIVEN ELECTRODE IN A PLASMA PROCESSING APPARATUS
#15RF choke for gas delivery to an RF driven electrode in a plasma processing apparatus
#16SINGLE CRYSTAL INGOTS WITH REDUCED DISLOCATION DEFECTS AND METHODS FOR PRODUCING SUCH INGOTS
#17Device and method for pressure-driven plug transport and reaction
#18Method for conducting an autocatalytic reaction in plugs in a microfluidic system
#19FERROELECTRIC CRYSTAL FILM, ELECTRONIC COMPONENT, MANUFACTURING METHOD OF FERROELECTRIC CRYSTAL FILM, AND MANUFACTURING APPARATUS THEREFOR
#20Device and method for pressure-driven plug transport and reaction
#21Method for conducting reactions involving biological molecules in plugs in a microfluidic system
#22Semiconductor device and semiconductor device production system
#23SINGLE CRYSTAL INGOTS WITH REDUCED DISLOCATION DEFECTS AND METHODS FOR PRODUCING SUCH INGOTS
#24Film forming apparatus and film forming method
#25RF choke for gas delivery to an RF driven electrode in a plasma processing apparatus
#26Method for cleaning exhaust passage for semiconductor crystal manufacturing device
#27Multi-heater method for growing high quality diamond
#28METHOD OF MAKING LARGE SURFACE AREA FILAMENTS FOR THE PRODUCTION OF POLYSILICON IN A CVD REACTOR
#29System and fabrication method of piezoelectric stack that reduces driving voltage and clamping effect
#30Crystal pulling systems and methods for producing monocrystalline ingots with reduced edge band defects
#31Vitreous silica crucible and method of manufacturing the same
#32Device and method for pressure-driven plug transport and reaction
#33Method of crystallization in aqueous plugs flowing in immiscible carrier-fluid in microfluidic system
#34Method of manufacturing composite crucible
#35Semiconductor device and semiconductor device production system
#36Crystal puller for inhibiting melt contamination
#37Transfer chamber metrology for improved device yield
#38Method of manufacturing a pressure vessel for growing single crystals
#39Method of fabricating light emitting device through forming a template for growing semiconductor and separating growth substrate
#40Crystal growth system and method for lead-contained compositions using batch auto-feeding
#41Amorphous silicon crystallizing method, crystallized silicon film forming method, semiconductor device manufacturing method and film forming apparatus
#42Polysilicon manufacturing device
#43Method to provide a patterned orientation template for a self-assemblable polymer
#44RF choke for gas delivery to an RF driven electrode in a plasma processing apparatus
#45Metal heterocyclic compounds for deposition of thin films
#46Arrangement and method for manufacturing a crystal from a melt of a raw material and single crystal
#47Ferroelectric crystal film, electronic component, manufacturing method of ferroelectric crystal film, and manufacturing apparatus therefor
#48Apparatus for cleaning exhaust passage for semiconductor crystal manufacturing device
#49Silicon seed rod assembly of polycrystalline silicon, method of forming the same, polycrystalline silicon producing apparatus, and method of producing polycrystalline silicon
#50Susceptor and method for manufacturing epitaxial wafer
#51Line scan sequential lateral solidification of thin films
#52Method of performing PCR reaction in continuously flowing microfluidic plugs
#53Shield member and apparatus for growing single crystal equipped with the same
#54MULTI-HEATER SYSTEM FOR GROWING HIGH QUALITY DIAMOND AND A METHOD FOR GROWING THE SAME
#55Apparatus for manufacturing silicon substrate for solar cell using continuous casting and having contacting solidification and stress relieving regions
#56Method and apparatus for crystal growth using a membrane-assisted semi-closed reactor
#57Feed tool for shielding a portion of a crystal puller
#58Reactor for polycrystalline silicon and polycrystalline silicon production method
#59Method and apparatus for the production of crystalline silicon substrates
#60System and methods for growing high-resistance single crystals
#61Apparatus and method for extracting a silicon ingot made by an electromagnetic continuous casting method
#62Tool for harvesting polycrystalline silicon-coated rods from a chemical vapor deposition reactor
#63Production method, production vessel and member for nitride crystal
#64Single crystal silicon pulling device, method for preventing contamination of silicon melt, and device for preventing contamination of silicon melt
#65Crystal manufacturing
#66Process gas delivery for semiconductor process chambers
#67Multilayer structure for a diamond growth and a method of providing the same
#68TEMPLATE, METHOD FOR MANUFACTURING THE TEMPLATE, AND METHOD FOR MANUFACTURING VERTICAL TYPE NITRIDE-BASED SEMICONDUCTOR LIGHT EMITTING DEVICE USING THE TEMPLATE
#69TEMPLATE, METHOD FOR MANUFACTURING THE TEMPLATE AND METHOD FOR MANUFACTURING VERTICAL TYPE NITRIDE-BASED SEMICONDUCTOR LIGHT EMITTING DEVICE USING THE TEMPLATE
#70Kyropoulos sapphire single crystal growing apparatus using elliptic crucible
#71System and method for low-power nanotube growth using direct resistive heating
#72Apparatus for producing multicrystalline silicon ingots by induction method
#73HALOGEN ASSISTED PHYSICAL VAPOR TRANSPORT METHOD FOR SILICON CARBIDE GROWTH
#74Vitreous silica crucible and method of manufacturing the same
#75Method and device for producing semicrystalline polymer material
#76Enclosure for controlling the environment of optical crystals
#77Composite crucible and method of manufacturing the same
#78Apparatus for manufacturing silicon carbide single crystal
#79System of controlling diameter of single crystal ingot and single crystal ingot growing apparatus including the same
#80Crystallizer for producing phenol-BPA adduct crystals
#812-DIMENSIONAL LINE-DEFECTS CONTROLLED SILICON INGOT, WAFER AND EPITAXIAL WAFER, AND MANUFACTURING PROCESS AND APPARATUS THEREFOR
#82DEVICE AND PROCESS FOR PRODUCING A BLOCK OF CRYSTALLINE MATERIAL
#83High pressure apparatus with stackable rings
#84Vitreous silica crucible
#85Method for growing single crystal of group III metal nitride and reaction vessel for use in same
#862-dimensional line-defects controlled silicon ingot, wafer and epitaxial wafer, and manufacturing process and apparatus therefor
#87Apparatus for directional solidification of silicon including a refractory material
#88Transfer chamber metrology for improved device yield
#89High pressure apparatus and method for nitride crystal growth
#90Seed crystal axis for solution growth of single crystal
#91Support ring for supporting a semiconductor wafer composed of monocrystalline silicon during a thermal treatment, method for the thermal treatment of such a semiconductor wafer, and thermally treated semiconductor wafer composed of monocrystalline silicon
#92Single crystal pulling-up apparatus of pulling-up silicon single crystal and single crystal pulling-up method of pulling-up silicon single crystal
#93Apparatus for growth of single crystals including a solute feeder
#94Crystal growth crucible lid
#95Method and device for manufacturing semiconductor compound materials by means of vapour phase epitaxy
#96CRYSTALLIZER AND METHOD FOR PRODUCING PHENOL-BPA ADDUCT CRYSTALS
#97Method and device for producing thin silicon rods
#98Crucible vessel and crucible cover having grooves for producing single-crystal silicon carbide, production apparatus and method
#99Method and device for producing oriented solidified blocks made of semi-conductor material
#100Microfluidic protein crystallography
#101Method for manufacturing a polycrystalline silicon thin film by joule-heating induced crystallization
#102SiC Crystals Having Spatially Uniform Doping Impurities
#103Method of producing high quality silicon carbide crystal in a seeded growth system
#104DIRECTIONAL SOLID PHASE CRYSTALLIZATION OF THIN AMORPHOUS SILICON FOR SOLAR CELL APPLICATIONS
#105Method of making large surface area filaments for the production of polysilicon in a CVD reactor
#106Single crystalline metal nanoplate and the fabrication method thereof
#107Single scan irradiation for crystallization of thin films
#108Upper heater, single crystal production apparatus, and method for producing single crystal
#109Single-shot semiconductor processing system and method having various irradiation patterns
#110Method and system for diamond deposition using a liquid-solvent carbon-tranfser mechanism
#111Method for conducting an autocatalytic reaction in plugs in a microfluidic system
#112Device for pressure-driven plug transport comprising microchannel with traps
#113Method for conducting reactions involving biological molecules in plugs in a microfluidic system
#114DEVICE AND METHOD FOR PRESSURE-DRIVEN PLUG TRANSPORT
#115Method for obtaining a collection of plugs comprising biological molecules
#116Nitride semiconductor crystal manufacturing apparatus, nitride semiconductor crystal manufacturing method, and nitride semiconductor crystal
#117Method for the bottom-seeded growth of potassium lead chloride crystals from polycrystalline seeds
#118Production process for high purity polycrystal silicon and production apparatus for the same
#119High purity crystalline silicon, high purity silicon tetrachloride for processes for producing the same
#120System and method for crystal growing
#121Method for detecting diameter of single crystal, single-crystal manufacturing method by using the same and single-crystal manufacturing apparatus
#122DEVICE AND METHOD FOR PRESSURE-DRIVEN PLUG TRANSPORT
#123Silicon single crystal pull-up apparatus having a sliding sample tube
#124Capsule and elements for synthesised diamond production
#125Silicon single crystal pull-up apparatus that pulls a doped silicon single crystal from a melt
#126Method for manufacturing epitaxial wafer and wafer holder used in the method
#127Method for measuring liquid level in single crystal pulling apparatus employing CZ method
#128Silicon crystallization system and silicon crystallization method using laser
#129APPARATUS AND PROCESS FOR CRYSTAL GROWTH
#130CRYSTAL GROWTH METHOD AND APPARATUS
#131Single-crystal manufacturing apparatus and single-crystal manufacturing method
#132Process for fabricating a structure for epitaxy without an exclusion zone
#133One hundred millimeter single crystal silicon carbide wafer
#134Directional solid phase crystallization of thin amorphous silicon for solar cell applications
#135Solid Hollow Fiber Cooling Crystallization Methods
#136Substrate processing apparatus with an insulator disposed in the reaction chamber
#137Method for producing fluoride crystal
#138Method of manufacturing silicon single crystal, apparatus for pulling silicon single crystal and vitreous silica crucible
#139Device and method for producing crystalline bodies by directional solidification
#140High-temperature ionic state compound crystallization technology
#141Method and apparatus for controlling the growth process of a monocrystalline silicon ingot
#142Method and apparatus for fast and local anneal of anti-ferromagnetic (AF) exchange-biased magnetic stacks
#143Vitreous silica crucible for pulling silicon single crystal
#144Vitreous silica crucible for pulling single-crystal silicon and method of manufacturing the same
#145DEVICE AND METHOD FOR PRESSURE-DRIVEN PLUG TRANSPORT AND REACTION
#146Manufacturing apparatus of polycrystalline silicon
#147Crystal manufacturing apparatus
#148Apparatus and method for producing single crystal
#149HVPE SHOWERHEAD DESIGN
#150Crystallization apparatus, crystallization method, device and phase modulation element
#151Modification process of synthetic silica powder and its quartz glass product
#152Method and apparatus for controlling diameter of a silicon crystal ingot in a growth process
#153Apparatus for producing silicon nanocrystals using inductively coupled plasma
#154Single-shot semiconductor processing system and method having various irradiation patterns
#155Crucible having a doped upper wall portion and method for making the same
#156Forced-circulation crystallizer
#157Devices and methods for holding microfluidic devices
#158Crucible and method for pulling a single crystal
#159THERMALLY INSULATED CONFIGURATION AND METHOD FOR PRODUCING A BULK SIC CRYSTAL
#160Base material for forming single crystal diamond film and method for producing single crystal diamond using the same
#161Method for manufacturing silicon single crystal in which a crystallization temperature gradient is controlled
#162Apparatus for pulling silicon single crystal
#163Method for introducing impurities and apparatus for introducing impurities
#164Silica glass crucible for pulling up silicon single crystal and method for manufacturing thereof
#165System for continuous growing of monocrystalline silicon
#166Process and apparatus for producing a single crystal of semiconductor material
#167Surface modified quartz glass crucible, and its modification process
#168Silica glass crucible for pulling up silicon single crystal and method for manufacturing thereof
#169Apparatus for crystal growth
#170Method for feeding arsenic dopant into a silicon crystal growing apparatus
#171Quartz glass crucible for silicon single crystal pulling operation and process for manufacturing the same
#172Method and apparatus for growth of multi-component single crystals
#173Silica glass crucible for pulling up silicon single crystal, method for manufacturing thereof and method for manufacturing silicon single crystal
#174Graphite crucible for silicon electromagnetic induction heating and apparatus for silicon melting and refining using the graphite crucible
#175Arc discharge apparatus, apparatus and method for manufacturing vitreous silica glass crucible, and method for pulling up silicon single crystal
#176Device and process for producing a block of crystalline material
#177NEEDLE ASSEMBLY FOR ASPIRATING AND DISPENSING FROM SEALED CONTAINERS
#178Method for manufacturing a single crystal of nitride by epitaxial growth on a substrate preventing growth on the edges of the substrate
#179Method and apparatus for manufacturing fused silica crucible, and the fused silica crucible
#180High temperature support apparatus and method of use for casting materials
#181Manufacturing apparatus of polycrystalline silicon
#182Method and apparatus for producing nanocrystals
#183Apparatus for the production of silica crucible
#184Apparatus for producing trichlorosilane
#185System and method for liquid silicon containment
#186Crucible for a crystal pulling apparatus
#187Process gas delivery for semiconductor process chamber
#188APPARATUS AND METHODS FOR PREPARATION OF HIGH-PURITY SILICON RODS USING MIXED CORE MEANS
#189Method for producing a single crystal of semiconductor material
#190METHOD AND APPARATUS FOR REFINING A MOLTEN MATERIAL
#191Apparatus and method for seed crystal utilization in large-scale manufacturing of gallium nitride
#192Doping apparatus for simultaneously injecting two dopants into a semiconductor melt at different positions and method for manufacturing silicon single crystal using the doping apparatus
#193Semiconductor device and semiconductor device production system
#194Method and apparatus for the production of crystalline silicon substrates
#195Method and apparatus for controlling diameter of a silicon crystal ingot in a growth process
#196System for forming SiC crystals having spatially uniform doping impurities
#197Metal heterocyclic compounds for deposition of thin films
#198High pressure apparatus and method for nitride crystal growth
#199Apparatus for producing polycrystalline silicon
#200Systems and methods for creating crystallographic-orientation controlled poly-silicon films
#201Crucible protection sheet and crucible apparatus using the crucible protection sheet
#202Crucible holding member and method for producing the same
#203Film thickness measurement method, epitaxial wafer production process and epitaxial wafer
#204Apparatus for evaporation, a crucible for evaporation and a method of growing a film on a substrate
#205High pressure apparatus and method for nitride crystal growth
#206Slicing method and method for manufacturing epitaxial wafer
#207Method for constructing a phase conjugate mirror
#208Silica glass crucible
#209Nonplanar faceplate for a plasma processing chamber
#210Method and device for feeding arsenic dopant into a silicon crystal growing apparatus
#211Device and a method for promoting crystallisation
#212Device and method for forming macromolecule crystal
#213System and method for epitaxial deposition of a crystal using a liquid-solvent fluidized-bed mechanism
#214Apparatus for producing solid product
#215Polycrystalline silicon manufacturing apparatus
#216Crystal growth system and method for lead-contained compositions using batch auto-feeding
#217Epitaxial wafer manufacturing apparatus and manufacturing method
#218Single crystal silicon pulling apparatus, method for preventing contamination of silicon melt, and device for preventing contamination of silicon melt
#219Apparatuses and Methods for Growing Single Crystals
#220CRUCIBLE HOLDING MEMBER AND METHOD FOR PRODUCING THE SAME
#221Temperature-controlled purge gate valve for chemical vapor deposition chamber
#222Crystallization apparatus, crystallization method, phase modulation element, device and display apparatus
#223Device for making monocrystalline or multicrystalline materials, in particular multicrystalline silicon
#224Crystal pulling apparatus and method for the production of heavy crystals
#225CRYSTALLIZATION APPARATUS, OPTICAL MEMBER FOR USE IN CRYSTALLIZATION APPARATUS, CRYSTALLIZATION METHOD, MANUFACTURING METHOD OF THIN FILM TRANSISTOR, AND MANUFACTURING METHOD OF MATRIX CIRCUIT SUBSTRATE OF DISPLAY
#226Crystallization apparatus, optical member for use in crystallization apparatus, crystallization method, manufacturing method of thin film transistor, and manufacturing method of matrix circuit substrate of display
#227Cooling structure for body of crystal-growing furnace
#228High-purity vitreous silica crucible used for pulling large-diameter single-crystal silicon ingot
#229Supporting table having heaters inside crystal-growing furnace
#230Method and apparatus for producing group III nitride based compound semiconductor
#231Apparatus for pulling single crystal by CZ method
#2322-dimensional line-defects controlled silicon ingot, wafer and epitaxial wafer, and manufacturing process and apparatus therefor
#233Microfluidic protein crystallography
#234Crystallization apparatus, crystallization method, phase modulation element, device and display apparatus
#235Silicon seed rod assembly of polycrystalline silicon, method of forming the same, polycrystalline silicon producing apparatus, and method of producing polycrystalline silicon
#236Apparatus for producing single crystal silicon
#237Crystal-growing furnace with convectional cooling structure
#238Method for growing group III nitride semiconductor crystal and growing device for group III nitride semiconductor crystal
#239Method for producing a monocrystalline or polycrystalline semiconductor material
#240Method and apparatus for generating a precursor for a semiconductor processing system
#241High-purity vitreous silica crucible for pulling large-diameter single-crystal silicon ingot
#242Czochralski apparatus for growing crystals and purification method of waste salts using the same
#243Apparatus and methods for preparation of high-purity silicon rods using mixed core means
#244Method of producing silicon carbide epitaxial layer
#245Crystal growth apparatus
#246Method for growing single crystals of metals
#247Device for manufacturing sic single crystal and method for the same
#248Group III nitride semiconductor manufacturing system
#249Device and process for heating III-V wafers, and annealed III-V semiconductor single crystal wafer
#250Apparatus for manufacturing poly crystaline silicon ingot for solar battery having door open/close device using hinge
#251Epitaxial growth film formation method
#252Process and apparatus for producing a single crystal of semiconductor material
#253Method for manufacturing single crystal nano-structures capable of controlling morphology and device for manufacturing nano-structures
#254Reactor for polycrystalline silicon and polycrystalline silicon production method
#255Process for producing a nitride single crystal and apparatus therefor
#256Process and apparatus for forming nanoparticles using radiofrequency plasmas
#257Halogen assisted physical vapor transport method for silicon carbide growth
#258SINGLE CRYSTAL AND SEMICONDUCTOR WAFER AND APPARATUS AND METHOD FOR PRODUCING A SINGLE CRYSTAL
#259RF choke for gas delivery to an RF driven electrode in a plasma processing apparatus
#260Method and apparatus for production of a cast component
#261Corrosion-resistant internal coating method using a germanium-containing precursor and hollow cathode techniques
#262Pressure vessel for growing single crystals
#263Method and apparatus for providing precursor gas to a processing chamber
#264Apparatus for producing nitride single crystal
#265Liquid-phase growth apparatus and method
#266Solid hollow fiber cooling crystallization systems and methods
#267HVPE SHOWERHEAD DESIGN
#268Arrangement and method for manufacturing a crystal from a melt of a raw material and single crystal
#269Apparatus for pulling single crystal by CZ method
#270Apparatus for pulling single crystal by CZ method
#271Method and apparatus for fast and local anneal of anti-ferromagnetic (AF) exchange-biased magnetic stacks
#272Manufacturing method of epitaxial silicon wafer and substrate cleaning apparatus
#273Removable thermal control for ribbon crystal pulling furnaces
#274Ribbon crystal pulling furnace afterheater with at least one opening
#275Process for fabricating a structure for epitaxy without an exclusion zone
#276Consolidated vacuum sublimation module
#277Apparatus for manufacturing group III nitride semiconductor
#278Method and mould for casting articles with a pre-determined crystalline orientation
#279Nitride single crystal manufacturing apparatus
#280Method of growing single crystals from melt
#281Method, system, and apparatus for doping and for multi-chamber high-throughput solid-phase epitaxy deposition process
#282Production of nanostructure by curie point induction heating
#283Substrate processing apparatus and semiconductor device producing method
#284Vapor phase growth apparatus and vapor phase growth method
#285Method for producing solid product
#286Crystal growing apparatus
#287Chemical precursor ampoule for vapor deposition processes
#288Crystal manufacturing apparatus
#289Method and device for manufacturing semiconductor compound materials by means of vapour phase epitaxy
#290Method and apparatus for growth of multi-component single crystals
#291Cooling system for chamber of ingot growth arrangement
#292Crucible for the crystallization of silicon
#293Method and apparatus for refining a molten material
#294Seed crystal holder for growing single crystal from melt
#295Susceptor for Expitaxial Reactors and Tool for the Handling Thereof
#296Method and apparatus for producing single crystalline diamonds
#297Single crystal pulling apparatus
#298Systems and methods for inducing crystallization of thin films using multiple optical paths
#299Method, system, and apparatus for the growth of SiC and related or similar material, by chemical vapor deposition, using precursors in modified cold-wall reactor
#300Crucible and single crystal growth method using crucible