ClassID:

248366

Y10T117/10 - CPC Classification

Classification description:

Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor Apparatus

Sub-classes:
Recent Application in this class:
#1
20250132155
2025-04-24

APPARATUS, SYSTEMS, AND METHODS OF USING ATOMIC HYDROGEN RADICALS WITH SELECTIVE EPITAXIAL DEPOSITION

#2
20250087485
2025-03-13

APPARATUS, SYSTEMS, AND METHODS OF USING ATOMIC HYDROGEN RADICALS WITH SELECTIVE EPITAXIAL DEPOSITION

#3
20230160094
2023-05-25

Ingot puller apparatus that use a solid-phase dopant

#4
20230160093
2023-05-25

METHODS FOR PRODUCING A SINGLE CRYSTAL SILICON INGOT USING BORIC ACID AS A DOPANT

#5
20210340691
2021-11-04

CRYSTAL PULLING SYSTEM AND METHODS FOR PRODUCING MONOCRYSTALLINE INGOTS WITH REDUCED EDGE BAND DEFECTS

#6
20210118916
2021-04-22

SEMICONDUCTOR DEVICE AND SEMICONDUCTOR DEVICE PRODUCTION SYSTEM

#7
20210090777
2021-03-25

RF choke for gas delivery to an RF driven electrode in a plasma processing apparatus

#8
20200407869
2020-12-31

Methods for producing a single crystal silicon ingot using boric acid as a dopant and ingot puller apparatus that use a solid-phase dopant

#9
20200283890
2020-09-10

Assembly for the deposition of silicon nanostructures

#10
20200173014
2020-06-04

Sample stage/holder for improved thermal and gas flow control at elevated growth temperatures

#11
20200135770
2020-04-30

Semiconductor device and semiconductor device production system

#12
20200070172
2020-03-05

DEVICE AND METHOD FOR PRESSURE-DRIVEN PLUG TRANSPORT AND REACTION

#13
20190341404
2019-11-07

Semiconductor device and semiconductor device production system

#14
20190198217
2019-06-27

RF CHOKE FOR GAS DELIVERY TO AN RF DRIVEN ELECTRODE IN A PLASMA PROCESSING APPARATUS

#15
20190189328
2019-06-20

RF choke for gas delivery to an RF driven electrode in a plasma processing apparatus

#16
20190136407
2019-05-09

SINGLE CRYSTAL INGOTS WITH REDUCED DISLOCATION DEFECTS AND METHODS FOR PRODUCING SUCH INGOTS

#17
20190030538
2019-01-31

Device and method for pressure-driven plug transport and reaction

#18
20180304268
2018-10-25

Method for conducting an autocatalytic reaction in plugs in a microfluidic system

#19
20180282896
2018-10-04

FERROELECTRIC CRYSTAL FILM, ELECTRONIC COMPONENT, MANUFACTURING METHOD OF FERROELECTRIC CRYSTAL FILM, AND MANUFACTURING APPARATUS THEREFOR

#20
20180272352
2018-09-27

Device and method for pressure-driven plug transport and reaction

#21
20180272351
2018-09-27

Method for conducting reactions involving biological molecules in plugs in a microfluidic system

#22
20180190677
2018-07-05

Semiconductor device and semiconductor device production system

#23
20180100246
2018-04-12

SINGLE CRYSTAL INGOTS WITH REDUCED DISLOCATION DEFECTS AND METHODS FOR PRODUCING SUCH INGOTS

#24
20180073163
2018-03-15

Film forming apparatus and film forming method

#25
20170327946
2017-11-16

RF choke for gas delivery to an RF driven electrode in a plasma processing apparatus

#26
20170314162
2017-11-02

Method for cleaning exhaust passage for semiconductor crystal manufacturing device

#27
20170266634
2017-09-21

Multi-heater method for growing high quality diamond

#28
20170253960
2017-09-07

METHOD OF MAKING LARGE SURFACE AREA FILAMENTS FOR THE PRODUCTION OF POLYSILICON IN A CVD REACTOR

#29
20170186937
2017-06-29

System and fabrication method of piezoelectric stack that reduces driving voltage and clamping effect

#30
20170107639
2017-04-20

Crystal pulling systems and methods for producing monocrystalline ingots with reduced edge band defects

#31
20170066686
2017-03-09

Vitreous silica crucible and method of manufacturing the same

#32
20160288124
2016-10-06

Device and method for pressure-driven plug transport and reaction

#33
20160215411
2016-07-28

Method of crystallization in aqueous plugs flowing in immiscible carrier-fluid in microfluidic system

#34
20160115625
2016-04-28

Method of manufacturing composite crucible

#35
20160111451
2016-04-21

Semiconductor device and semiconductor device production system

#36
20160083864
2016-03-24

Crystal puller for inhibiting melt contamination

#37
20150263222
2015-09-17

Transfer chamber metrology for improved device yield

#38
20150182928
2015-07-02

Method of manufacturing a pressure vessel for growing single crystals

#39
20150179875
2015-06-25

Method of fabricating light emitting device through forming a template for growing semiconductor and separating growth substrate

#40
20150159296
2015-06-11

Crystal growth system and method for lead-contained compositions using batch auto-feeding

#41
20150159295
2015-06-11

Amorphous silicon crystallizing method, crystallized silicon film forming method, semiconductor device manufacturing method and film forming apparatus

#42
20150098871
2015-04-09

Polysilicon manufacturing device

#43
20140245948
2014-09-04

Method to provide a patterned orientation template for a self-assemblable polymer

#44
20140216344
2014-08-07

RF choke for gas delivery to an RF driven electrode in a plasma processing apparatus

#45
20140119977
2014-05-01

Metal heterocyclic compounds for deposition of thin films

#46
20140103493
2014-04-17

Arrangement and method for manufacturing a crystal from a melt of a raw material and single crystal

#47
20130323534
2013-12-05

Ferroelectric crystal film, electronic component, manufacturing method of ferroelectric crystal film, and manufacturing apparatus therefor

#48
20130306109
2013-11-21

Apparatus for cleaning exhaust passage for semiconductor crystal manufacturing device

#49
20130224401
2013-08-29

Silicon seed rod assembly of polycrystalline silicon, method of forming the same, polycrystalline silicon producing apparatus, and method of producing polycrystalline silicon

#50
20130180447
2013-07-18

Susceptor and method for manufacturing epitaxial wafer

#51
20130012036
2013-01-10

Line scan sequential lateral solidification of thin films

#52
20120329171
2012-12-27

Method of performing PCR reaction in continuously flowing microfluidic plugs

#53
20120318198
2012-12-20

Shield member and apparatus for growing single crystal equipped with the same

#54
20120312227
2012-12-13

MULTI-HEATER SYSTEM FOR GROWING HIGH QUALITY DIAMOND AND A METHOD FOR GROWING THE SAME

#55
20120292825
2012-11-22

Apparatus for manufacturing silicon substrate for solar cell using continuous casting and having contacting solidification and stress relieving regions

#56
20120291696
2012-11-22

Method and apparatus for crystal growth using a membrane-assisted semi-closed reactor

#57
20120285373
2012-11-15

Feed tool for shielding a portion of a crystal puller

#58
20120266820
2012-10-25

Reactor for polycrystalline silicon and polycrystalline silicon production method

#59
20120260849
2012-10-18

Method and apparatus for the production of crystalline silicon substrates

#60
20120255484
2012-10-11

System and methods for growing high-resistance single crystals

#61
20120240635
2012-09-27

Apparatus and method for extracting a silicon ingot made by an electromagnetic continuous casting method

#62
20120237678
2012-09-20

Tool for harvesting polycrystalline silicon-coated rods from a chemical vapor deposition reactor

#63
20120237431
2012-09-20

Production method, production vessel and member for nitride crystal

#64
20120222613
2012-09-06

Single crystal silicon pulling device, method for preventing contamination of silicon melt, and device for preventing contamination of silicon melt

#65
20120217446
2012-08-30

Crystal manufacturing

#66
20120208372
2012-08-16

Process gas delivery for semiconductor process chambers

#67
20120192785
2012-08-02

Multilayer structure for a diamond growth and a method of providing the same

#68
20120187445
2012-07-26

TEMPLATE, METHOD FOR MANUFACTURING THE TEMPLATE, AND METHOD FOR MANUFACTURING VERTICAL TYPE NITRIDE-BASED SEMICONDUCTOR LIGHT EMITTING DEVICE USING THE TEMPLATE

#69
20120187444
2012-07-26

TEMPLATE, METHOD FOR MANUFACTURING THE TEMPLATE AND METHOD FOR MANUFACTURING VERTICAL TYPE NITRIDE-BASED SEMICONDUCTOR LIGHT EMITTING DEVICE USING THE TEMPLATE

#70
20120186513
2012-07-26

Kyropoulos sapphire single crystal growing apparatus using elliptic crucible

#71
20120177808
2012-07-12

System and method for low-power nanotube growth using direct resistive heating

#72
20120174630
2012-07-12

Apparatus for producing multicrystalline silicon ingots by induction method

#73
20120167825
2012-07-05

HALOGEN ASSISTED PHYSICAL VAPOR TRANSPORT METHOD FOR SILICON CARBIDE GROWTH

#74
20120167821
2012-07-05

Vitreous silica crucible and method of manufacturing the same

#75
20120165497
2012-06-28

Method and device for producing semicrystalline polymer material

#76
20120160856
2012-06-28

Enclosure for controlling the environment of optical crystals

#77
20120160158
2012-06-28

Composite crucible and method of manufacturing the same

#78
20120152166
2012-06-21

Apparatus for manufacturing silicon carbide single crystal

#79
20120145071
2012-06-14

System of controlling diameter of single crystal ingot and single crystal ingot growing apparatus including the same

#80
20120142974
2012-06-07

Crystallizer for producing phenol-BPA adduct crystals

#81
20120141808
2012-06-07

2-DIMENSIONAL LINE-DEFECTS CONTROLLED SILICON INGOT, WAFER AND EPITAXIAL WAFER, AND MANUFACTURING PROCESS AND APPARATUS THEREFOR

#82
20120141336
2012-06-07

DEVICE AND PROCESS FOR PRODUCING A BLOCK OF CRYSTALLINE MATERIAL

#83
20120137966
2012-06-07

High pressure apparatus with stackable rings

#84
20120137964
2012-06-07

Vitreous silica crucible

#85
20120137961
2012-06-07

Method for growing single crystal of group III metal nitride and reaction vessel for use in same

#86
20120132131
2012-05-31

2-dimensional line-defects controlled silicon ingot, wafer and epitaxial wafer, and manufacturing process and apparatus therefor

#87
20120119407
2012-05-17

Apparatus for directional solidification of silicon including a refractory material

#88
20120118224
2012-05-17

Transfer chamber metrology for improved device yield

#89
20120118223
2012-05-17

High pressure apparatus and method for nitride crystal growth

#90
20120103251
2012-05-03

Seed crystal axis for solution growth of single crystal

#91
20120098100
2012-04-26

Support ring for supporting a semiconductor wafer composed of monocrystalline silicon during a thermal treatment, method for the thermal treatment of such a semiconductor wafer, and thermally treated semiconductor wafer composed of monocrystalline silicon

#92
20120067272
2012-03-22

Single crystal pulling-up apparatus of pulling-up silicon single crystal and single crystal pulling-up method of pulling-up silicon single crystal

#93
20120048183
2012-03-01

Apparatus for growth of single crystals including a solute feeder

#94
20120031325
2012-02-09

Crystal growth crucible lid

#95
20120021163
2012-01-26

Method and device for manufacturing semiconductor compound materials by means of vapour phase epitaxy

#96
20110319670
2011-12-29

CRYSTALLIZER AND METHOD FOR PRODUCING PHENOL-BPA ADDUCT CRYSTALS

#97
20110314869
2011-12-29

Method and device for producing thin silicon rods

#98
20110308449
2011-12-22

Crucible vessel and crucible cover having grooves for producing single-crystal silicon carbide, production apparatus and method

#99
20110308448
2011-12-22

Method and device for producing oriented solidified blocks made of semi-conductor material

#100
20110306522
2011-12-15

Microfluidic protein crystallography

#101
20110306183
2011-12-15

Method for manufacturing a polycrystalline silicon thin film by joule-heating induced crystallization

#102
20110303884
2011-12-15

SiC Crystals Having Spatially Uniform Doping Impurities

#103
20110290174
2011-12-01

Method of producing high quality silicon carbide crystal in a seeded growth system

#104
20110277682
2011-11-17

DIRECTIONAL SOLID PHASE CRYSTALLIZATION OF THIN AMORPHOUS SILICON FOR SOLAR CELL APPLICATIONS

#105
20110271718
2011-11-10

Method of making large surface area filaments for the production of polysilicon in a CVD reactor

#106
20110262702
2011-10-27

Single crystalline metal nanoplate and the fabrication method thereof

#107
20110248278
2011-10-13

Single scan irradiation for crystallization of thin films

#108
20110214604
2011-09-08

Upper heater, single crystal production apparatus, and method for producing single crystal

#109
20110186854
2011-08-04

Single-shot semiconductor processing system and method having various irradiation patterns

#110
20110185964
2011-08-04

Method and system for diamond deposition using a liquid-solvent carbon-tranfser mechanism

#111
20110177609
2011-07-21

Method for conducting an autocatalytic reaction in plugs in a microfluidic system

#112
20110177586
2011-07-21

Device for pressure-driven plug transport comprising microchannel with traps

#113
20110177494
2011-07-21

Method for conducting reactions involving biological molecules in plugs in a microfluidic system

#114
20110176966
2011-07-21

DEVICE AND METHOD FOR PRESSURE-DRIVEN PLUG TRANSPORT

#115
20110174622
2011-07-21

Method for obtaining a collection of plugs comprising biological molecules

#116
20110171462
2011-07-14

Nitride semiconductor crystal manufacturing apparatus, nitride semiconductor crystal manufacturing method, and nitride semiconductor crystal

#117
20110168080
2011-07-14

Method for the bottom-seeded growth of potassium lead chloride crystals from polycrystalline seeds

#118
20110165032
2011-07-07

Production process for high purity polycrystal silicon and production apparatus for the same

#119
20110158885
2011-06-30

High purity crystalline silicon, high purity silicon tetrachloride for processes for producing the same

#120
20110146566
2011-06-23

System and method for crystal growing

#121
20110146564
2011-06-23

Method for detecting diameter of single crystal, single-crystal manufacturing method by using the same and single-crystal manufacturing apparatus

#122
20110142734
2011-06-16

DEVICE AND METHOD FOR PRESSURE-DRIVEN PLUG TRANSPORT

#123
20110132257
2011-06-09

Silicon single crystal pull-up apparatus having a sliding sample tube

#124
20110132256
2011-06-09

Capsule and elements for synthesised diamond production

#125
20110120367
2011-05-26

Silicon single crystal pull-up apparatus that pulls a doped silicon single crystal from a melt

#126
20110114014
2011-05-19

Method for manufacturing epitaxial wafer and wafer holder used in the method

#127
20110114010
2011-05-19

Method for measuring liquid level in single crystal pulling apparatus employing CZ method

#128
20110097906
2011-04-28

Silicon crystallization system and silicon crystallization method using laser

#129
20110073034
2011-03-31

APPARATUS AND PROCESS FOR CRYSTAL GROWTH

#130
20110067625
2011-03-24

CRYSTAL GROWTH METHOD AND APPARATUS

#131
20110056427
2011-03-10

Single-crystal manufacturing apparatus and single-crystal manufacturing method

#132
20110037075
2011-02-17

Process for fabricating a structure for epitaxy without an exclusion zone

#133
20110024766
2011-02-03

One hundred millimeter single crystal silicon carbide wafer

#134
20110021008
2011-01-27

Directional solid phase crystallization of thin amorphous silicon for solar cell applications

#135
20110014110
2011-01-20

Solid Hollow Fiber Cooling Crystallization Methods

#136
20110000425
2011-01-06

Substrate processing apparatus with an insulator disposed in the reaction chamber

#137
20110000423
2011-01-06

Method for producing fluoride crystal

#138
20100326349
2010-12-30

Method of manufacturing silicon single crystal, apparatus for pulling silicon single crystal and vitreous silica crucible

#139
20100320638
2010-12-23

Device and method for producing crystalline bodies by directional solidification

#140
20100320075
2010-12-23

High-temperature ionic state compound crystallization technology

#141
20100319611
2010-12-23

Method and apparatus for controlling the growth process of a monocrystalline silicon ingot

#142
20100314360
2010-12-16

Method and apparatus for fast and local anneal of anti-ferromagnetic (AF) exchange-biased magnetic stacks

#143
20100251959
2010-10-07

Vitreous silica crucible for pulling silicon single crystal

#144
20100236473
2010-09-23

Vitreous silica crucible for pulling single-crystal silicon and method of manufacturing the same

#145
20100233026
2010-09-16

DEVICE AND METHOD FOR PRESSURE-DRIVEN PLUG TRANSPORT AND REACTION

#146
20100229796
2010-09-16

Manufacturing apparatus of polycrystalline silicon

#147
20100229787
2010-09-16

Crystal manufacturing apparatus

#148
20100229785
2010-09-16

Apparatus and method for producing single crystal

#149
20100215854
2010-08-26

HVPE SHOWERHEAD DESIGN

#150
20100214641
2010-08-26

Crystallization apparatus, crystallization method, device and phase modulation element

#151
20100212582
2010-08-26

Modification process of synthetic silica powder and its quartz glass product

#152
20100206219
2010-08-19

Method and apparatus for controlling diameter of a silicon crystal ingot in a growth process

#153
20100203334
2010-08-12

Apparatus for producing silicon nanocrystals using inductively coupled plasma

#154
20100197147
2010-08-05

Single-shot semiconductor processing system and method having various irradiation patterns

#155
20100186662
2010-07-29

Crucible having a doped upper wall portion and method for making the same

#156
20100183489
2010-07-22

Forced-circulation crystallizer

#157
20100183481
2010-07-22

Devices and methods for holding microfluidic devices

#158
20100180815
2010-07-22

Crucible and method for pulling a single crystal

#159
20100175614
2010-07-15

THERMALLY INSULATED CONFIGURATION AND METHOD FOR PRODUCING A BULK SIC CRYSTAL

#160
20100175613
2010-07-15

Base material for forming single crystal diamond film and method for producing single crystal diamond using the same

#161
20100175611
2010-07-15

Method for manufacturing silicon single crystal in which a crystallization temperature gradient is controlled

#162
20100170432
2010-07-08

Apparatus for pulling silicon single crystal

#163
20100167508
2010-07-01

Method for introducing impurities and apparatus for introducing impurities

#164
20100162947
2010-07-01

Silica glass crucible for pulling up silicon single crystal and method for manufacturing thereof

#165
20100162946
2010-07-01

System for continuous growing of monocrystalline silicon

#166
20100158783
2010-06-24

Process and apparatus for producing a single crystal of semiconductor material

#167
20100154702
2010-06-24

Surface modified quartz glass crucible, and its modification process

#168
20100147213
2010-06-17

Silica glass crucible for pulling up silicon single crystal and method for manufacturing thereof

#169
20100139555
2010-06-10

Apparatus for crystal growth

#170
20100132829
2010-06-03

Method for feeding arsenic dopant into a silicon crystal growing apparatus

#171
20100132609
2010-06-03

Quartz glass crucible for silicon single crystal pulling operation and process for manufacturing the same

#172
20100129657
2010-05-27

Method and apparatus for growth of multi-component single crystals

#173
20100107965
2010-05-06

Silica glass crucible for pulling up silicon single crystal, method for manufacturing thereof and method for manufacturing silicon single crystal

#174
20100095883
2010-04-22

Graphite crucible for silicon electromagnetic induction heating and apparatus for silicon melting and refining using the graphite crucible

#175
20100095881
2010-04-22

Arc discharge apparatus, apparatus and method for manufacturing vitreous silica glass crucible, and method for pulling up silicon single crystal

#176
20100083895
2010-04-08

Device and process for producing a block of crystalline material

#177
20100080733
2010-04-01

NEEDLE ASSEMBLY FOR ASPIRATING AND DISPENSING FROM SEALED CONTAINERS

#178
20100074826
2010-03-25

Method for manufacturing a single crystal of nitride by epitaxial growth on a substrate preventing growth on the edges of the substrate

#179
20100071613
2010-03-25

Method and apparatus for manufacturing fused silica crucible, and the fused silica crucible

#180
20100061916
2010-03-11

High temperature support apparatus and method of use for casting materials

#181
20100058988
2010-03-11

Manufacturing apparatus of polycrystalline silicon

#182
20100058978
2010-03-11

Method and apparatus for producing nanocrystals

#183
20100055222
2010-03-04

Apparatus for the production of silica crucible

#184
20100055007
2010-03-04

Apparatus for producing trichlorosilane

#185
20100051108
2010-03-04

System and method for liquid silicon containment

#186
20100050930
2010-03-04

Crucible for a crystal pulling apparatus

#187
20100048032
2010-02-25

Process gas delivery for semiconductor process chamber

#188
20100040803
2010-02-18

APPARATUS AND METHODS FOR PREPARATION OF HIGH-PURITY SILICON RODS USING MIXED CORE MEANS

#189
20100037815
2010-02-18

Method for producing a single crystal of semiconductor material

#190
20100034723
2010-02-11

METHOD AND APPARATUS FOR REFINING A MOLTEN MATERIAL

#191
20100031872
2010-02-11

Apparatus and method for seed crystal utilization in large-scale manufacturing of gallium nitride

#192
20100031871
2010-02-11

Doping apparatus for simultaneously injecting two dopants into a semiconductor melt at different positions and method for manufacturing silicon single crystal using the doping apparatus

#193
20100029068
2010-02-04

Semiconductor device and semiconductor device production system

#194
20100025885
2010-02-04

Method and apparatus for the production of crystalline silicon substrates

#195
20100024716
2010-02-04

Method and apparatus for controlling diameter of a silicon crystal ingot in a growth process

#196
20100018455
2010-01-28

System for forming SiC crystals having spatially uniform doping impurities

#197
20090321733
2009-12-31

Metal heterocyclic compounds for deposition of thin films

#198
20090320744
2009-12-31

High pressure apparatus and method for nitride crystal growth

#199
20090314207
2009-12-24

Apparatus for producing polycrystalline silicon

#200
20090309104
2009-12-17

Systems and methods for creating crystallographic-orientation controlled poly-silicon films

#201
20090308307
2009-12-17

Crucible protection sheet and crucible apparatus using the crucible protection sheet

#202
20090308306
2009-12-17

Crucible holding member and method for producing the same

#203
20090305021
2009-12-10

Film thickness measurement method, epitaxial wafer production process and epitaxial wafer

#204
20090301390
2009-12-10

Apparatus for evaporation, a crucible for evaporation and a method of growing a film on a substrate

#205
20090301387
2009-12-10

High pressure apparatus and method for nitride crystal growth

#206
20090288530
2009-11-26

Slicing method and method for manufacturing epitaxial wafer

#207
20090273839
2009-11-05

Method for constructing a phase conjugate mirror

#208
20090272315
2009-11-05

Silica glass crucible

#209
20090269512
2009-10-29

Nonplanar faceplate for a plasma processing chamber

#210
20090266294
2009-10-29

Method and device for feeding arsenic dopant into a silicon crystal growing apparatus

#211
20090264632
2009-10-22

Device and a method for promoting crystallisation

#212
20090257929
2009-10-15

Device and method for forming macromolecule crystal

#213
20090255457
2009-10-15

System and method for epitaxial deposition of a crystal using a liquid-solvent fluidized-bed mechanism

#214
20090246102
2009-10-01

Apparatus for producing solid product

#215
20090241838
2009-10-01

Polycrystalline silicon manufacturing apparatus

#216
20090241829
2009-10-01

Crystal growth system and method for lead-contained compositions using batch auto-feeding

#217
20090238971
2009-09-24

Epitaxial wafer manufacturing apparatus and manufacturing method

#218
20090229512
2009-09-17

Single crystal silicon pulling apparatus, method for preventing contamination of silicon melt, and device for preventing contamination of silicon melt

#219
20090223439
2009-09-10

Apparatuses and Methods for Growing Single Crystals

#220
20090211517
2009-08-27

CRUCIBLE HOLDING MEMBER AND METHOD FOR PRODUCING THE SAME

#221
20090205563
2009-08-20

Temperature-controlled purge gate valve for chemical vapor deposition chamber

#222
20090203231
2009-08-13

Crystallization apparatus, crystallization method, phase modulation element, device and display apparatus

#223
20090188427
2009-07-30

Device for making monocrystalline or multicrystalline materials, in particular multicrystalline silicon

#224
20090188425
2009-07-30

Crystal pulling apparatus and method for the production of heavy crystals

#225
20090181483
2009-07-16

CRYSTALLIZATION APPARATUS, OPTICAL MEMBER FOR USE IN CRYSTALLIZATION APPARATUS, CRYSTALLIZATION METHOD, MANUFACTURING METHOD OF THIN FILM TRANSISTOR, AND MANUFACTURING METHOD OF MATRIX CIRCUIT SUBSTRATE OF DISPLAY

#226
20090180190
2009-07-16

Crystallization apparatus, optical member for use in crystallization apparatus, crystallization method, manufacturing method of thin film transistor, and manufacturing method of matrix circuit substrate of display

#227
20090173277
2009-07-09

Cooling structure for body of crystal-growing furnace

#228
20090173276
2009-07-09

High-purity vitreous silica crucible used for pulling large-diameter single-crystal silicon ingot

#229
20090173275
2009-07-09

Supporting table having heaters inside crystal-growing furnace

#230
20090173273
2009-07-09

Method and apparatus for producing group III nitride based compound semiconductor

#231
20090173272
2009-07-09

Apparatus for pulling single crystal by CZ method

#232
20090169460
2009-07-02

2-dimensional line-defects controlled silicon ingot, wafer and epitaxial wafer, and manufacturing process and apparatus therefor

#233
20090168066
2009-07-02

Microfluidic protein crystallography

#234
20090166624
2009-07-02

Crystallization apparatus, crystallization method, phase modulation element, device and display apparatus

#235
20090165704
2009-07-02

Silicon seed rod assembly of polycrystalline silicon, method of forming the same, polycrystalline silicon producing apparatus, and method of producing polycrystalline silicon

#236
20090158996
2009-06-25

Apparatus for producing single crystal silicon

#237
20090158995
2009-06-25

Crystal-growing furnace with convectional cooling structure

#238
20090158994
2009-06-25

Method for growing group III nitride semiconductor crystal and growing device for group III nitride semiconductor crystal

#239
20090158993
2009-06-25

Method for producing a monocrystalline or polycrystalline semiconductor material

#240
20090151633
2009-06-18

Method and apparatus for generating a precursor for a semiconductor processing system

#241
20090151624
2009-06-18

High-purity vitreous silica crucible for pulling large-diameter single-crystal silicon ingot

#242
20090139444
2009-06-04

Czochralski apparatus for growing crystals and purification method of waste salts using the same

#243
20090130333
2009-05-21

Apparatus and methods for preparation of high-purity silicon rods using mixed core means

#244
20090126624
2009-05-21

Method of producing silicon carbide epitaxial layer

#245
20090120354
2009-05-14

Crystal growth apparatus

#246
20090120351
2009-05-14

Method for growing single crystals of metals

#247
20090107394
2009-04-30

Device for manufacturing sic single crystal and method for the same

#248
20090106959
2009-04-30

Group III nitride semiconductor manufacturing system

#249
20090104423
2009-04-23

Device and process for heating III-V wafers, and annealed III-V semiconductor single crystal wafer

#250
20090090296
2009-04-09

Apparatus for manufacturing poly crystaline silicon ingot for solar battery having door open/close device using hinge

#251
20090087560
2009-04-02

Epitaxial growth film formation method

#252
20090084669
2009-04-02

Process and apparatus for producing a single crystal of semiconductor material

#253
20090084310
2009-04-02

Method for manufacturing single crystal nano-structures capable of controlling morphology and device for manufacturing nano-structures

#254
20090081380
2009-03-26

Reactor for polycrystalline silicon and polycrystalline silicon production method

#255
20090078193
2009-03-26

Process for producing a nitride single crystal and apparatus therefor

#256
20090056628
2009-03-05

Process and apparatus for forming nanoparticles using radiofrequency plasmas

#257
20090056619
2009-03-05

Halogen assisted physical vapor transport method for silicon carbide growth

#258
20090031945
2009-02-05

SINGLE CRYSTAL AND SEMICONDUCTOR WAFER AND APPARATUS AND METHOD FOR PRODUCING A SINGLE CRYSTAL

#259
20090022905
2009-01-22

RF choke for gas delivery to an RF driven electrode in a plasma processing apparatus

#260
20090020257
2009-01-22

Method and apparatus for production of a cast component

#261
20090017230
2009-01-15

Corrosion-resistant internal coating method using a germanium-containing precursor and hollow cathode techniques

#262
20090013926
2009-01-15

Pressure vessel for growing single crystals

#263
20090011129
2009-01-08

Method and apparatus for providing precursor gas to a processing chamber

#264
20090000542
2009-01-01

Apparatus for producing nitride single crystal

#265
20090000540
2009-01-01

Liquid-phase growth apparatus and method

#266
20090000080
2009-01-01

Solid hollow fiber cooling crystallization systems and methods

#267
20080314311
2008-12-25

HVPE SHOWERHEAD DESIGN

#268
20080311417
2008-12-18

Arrangement and method for manufacturing a crystal from a melt of a raw material and single crystal

#269
20080311021
2008-12-18

Apparatus for pulling single crystal by CZ method

#270
20080311019
2008-12-18

Apparatus for pulling single crystal by CZ method

#271
20080308537
2008-12-18

Method and apparatus for fast and local anneal of anti-ferromagnetic (AF) exchange-biased magnetic stacks

#272
20080308129
2008-12-18

Manufacturing method of epitaxial silicon wafer and substrate cleaning apparatus

#273
20080308035
2008-12-18

Removable thermal control for ribbon crystal pulling furnaces

#274
20080308034
2008-12-18

Ribbon crystal pulling furnace afterheater with at least one opening

#275
20080303118
2008-12-11

Process for fabricating a structure for epitaxy without an exclusion zone

#276
20080299023
2008-12-04

Consolidated vacuum sublimation module

#277
20080299020
2008-12-04

Apparatus for manufacturing group III nitride semiconductor

#278
20080282972
2008-11-20

Method and mould for casting articles with a pre-determined crystalline orientation

#279
20080282971
2008-11-20

Nitride single crystal manufacturing apparatus

#280
20080282968
2008-11-20

Method of growing single crystals from melt

#281
20080264332
2008-10-30

Method, system, and apparatus for doping and for multi-chamber high-throughput solid-phase epitaxy deposition process

#282
20080264330
2008-10-30

Production of nanostructure by curie point induction heating

#283
20080251008
2008-10-16

Substrate processing apparatus and semiconductor device producing method

#284
20080236477
2008-10-02

Vapor phase growth apparatus and vapor phase growth method

#285
20080226531
2008-09-18

Method for producing solid product

#286
20080223288
2008-09-18

Crystal growing apparatus

#287
20080216743
2008-09-11

Chemical precursor ampoule for vapor deposition processes

#288
20080216737
2008-09-11

Crystal manufacturing apparatus

#289
20080213543
2008-09-04

Method and device for manufacturing semiconductor compound materials by means of vapour phase epitaxy

#290
20080203361
2008-08-28

Method and apparatus for growth of multi-component single crystals

#291
20080202721
2008-08-28

Cooling system for chamber of ingot growth arrangement

#292
20080196656
2008-08-21

Crucible for the crystallization of silicon

#293
20080196209
2008-08-21

Method and apparatus for refining a molten material

#294
20080190358
2008-08-14

Seed crystal holder for growing single crystal from melt

#295
20080190357
2008-08-14

Susceptor for Expitaxial Reactors and Tool for the Handling Thereof

#296
20080190356
2008-08-14

Method and apparatus for producing single crystalline diamonds

#297
20080184929
2008-08-07

Single crystal pulling apparatus

#298
20080176414
2008-07-24

Systems and methods for inducing crystallization of thin films using multiple optical paths

#299
20080173242
2008-07-24

Method, system, and apparatus for the growth of SiC and related or similar material, by chemical vapor deposition, using precursors in modified cold-wall reactor

#300
20080173234
2008-07-24

Crucible and single crystal growth method using crucible