Eindhoven
Netherlands
12
2020-04-23
The entities that hold a legal rights for patent applications filed by inventor Corcoran Gregory Martin Mason:
Gregory Martin Mason Corcoran from Eindhoven, NL has applied for patents for these inventions. The list has both pending applications and granted patents:
Lithographic apparatus, support table for a lithographic apparatus and device manufacturing method
#2 | 2019-06-06Lithographic apparatus and method
#3 | 2018-10-04Lithographic apparatus, support table for a lithographic apparatus and device manufacturing method
#4 | 2018-03-15Lithographic apparatus and method
#5 | 2016-07-14Lithographic apparatus and method
#6 | 2016-06-23Lithographic apparatus and a device manufacturing method
#7 | 2013-06-13Lithographic apparatus and a device manufacturing method
#8 | 2013-02-28Fluid handling structure, a lithographic apparatus and a device manufacturing method
#9 | 2013-02-21Lithographic apparatus, support table for a lithographic apparatus and device manufacturing method
#10 | 2012-01-19Lithographic apparatus and method
#11 | 2010-11-18Immersion lithographic apparatus including a pressure sensor to measure pressure of the immersion liquid and a device manufacturing method
#12 | 2010-10-14Fluid handling device, an immersion lithographic apparatus and a device manufacturing method
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